The Study of Atomic Layer Etching Mechanism using Substrate Orientation of Si and Variation of Surface Roughness (Silicon 기판의 방향과 표면 roughness 변화를 통한 Atomic Layer Etching 메커니즘의 연구)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2005.11a
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- pp.175-176
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- 2005