• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.84-84
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• 2010

In this study, we report on the novel lithographic patterning method to fabricate organic-semiconductor devices based on photo and e-beam lithography with well-known silicon technology. The method is applied to fabricate pentacene-based organic field effect transistors. Owing to their solubility, sub-micron sized patterning of P3HT and PEDOT has been well established via micromolding in capillaries (MIMIC) and inkjet printing techniques. Since the thermally deposited pentacene cannot be dissolved in solvents, other approach was done to fabricate pentacene FETs with a very short channel length (~30nm), or in-plane orientation of pentacene molecules by using nanometer-scale periodic groove patterns as an alignment layer for high-performance pentacene devices. Here, we introduce the atomic layer deposition of $Al_2O_3$ film on pentacene as a passivation layer. $Al_2O_3$ passivation layer on OTFTs has some advantages in preventing the penetration of water and oxygen and obtaining the long-term stability of electrical properties. AZ5214 and ma N-2402 were used as a photo and e-beam resist, respectively. A few micrometer sized lithography patterns were transferred by wet and dry etching processes. Finally, we fabricated sub-micron sized pentacene FETs and measured their electrical characteristics.

• Journal of Powder Materials
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• v.25 no.6
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• pp.482-486
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• 2018

Despite numerous advances in the preparation and use of GaN, and many leading-edge applications in lighting technologies, the preparation of high-quality GaN powder remains a challenge. Ammonolytic preparations of polycrystalline GaN have been studied using various precursors, but all were time-consuming and required high temperatures. In this study, an efficient and low-temperature method to synthesize high-purity hexagonal GaN powder is developed using sub-micron $Ga_2O_3$ powder as a starting material. The sub-micron $Ga_2O_3$ powder was prepared by an ultrasonic spray pyrolysis process. The GaN powder is synthesized from the sub-micron $Ga_2O_3$ powder through a nitridation treatment in an $NH_3$ flow at $800^{\circ}C$. The characteristics of the synthesized powder are systematically examined by X-ray diffraction, scanning and transmission electron microscopy, and UV-vis spectrophotometer.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.5
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• pp.1-7
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• 2002

Deep sub-micron bulk CMOS circuits require gate electrode materials such as metal silicide and titanium silicide for gate oxides. Many authors have conducted research to improve the quality of the sub-micron gate oxide. However, few have reported on the electrical quality and reliability of an ultra-thin gate. In this paper, we will recommend a novel shallow trench isolation structure and a two-step TiS $i_2$ formation process to improve the corner metal oxide semiconductor field-effect transistor (MOSFET) for sub-0.1${\mu}{\textrm}{m}$ VLSI devices. Differently from using normal LOCOS technology, deep sub-micron CMOS devices using the novel shallow trench isolation (STI) technology have unique "inverse narrow-channel effects" when the channel width of the device is scaled down. The titanium silicide process has problems because fluorine contamination caused by the gate sidewall etching inhibits the silicide reaction and accelerates agglomeration. To resolve these Problems, we developed a novel two-step deposited silicide process. The key point of this process is the deposition and subsequent removal of titanium before the titanium silicide process. It was found by using focused ion beam transmission electron microscopy that the STI structure improved the narrow channel effect and reduced the junction leakage current and threshold voltage at the edge of the channel. In terms of transistor characteristics, we also obtained a low gate voltage variation and a low trap density, saturation current, some more to be large transconductance at the channel for sub-0.1${\mu}{\textrm}{m}$ VLSI devices.

• Food Science and Preservation
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• v.22 no.5
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• pp.714-720
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• 2015

Biji is a tofu by-product made by squeezing the liquid out of the dregs left over from making tofu. The objectives of this research were to break the biji into sub-micron-scale particles and to prepare a biji sub-micron suspension having increased quality characteristics such as antioxidant capacity, polyphenol, dietary fiber, and soluble protein contents, in comparison with untreated biji. Disruption of biji by an ultra-high-pressure homogenization (UHPH) process was used to prepare the sub-micron suspension of biji. UHPH can be used to prepare emulsions or suspensions with extremely small particle sizes. The effect of the UHPH process on biji was studied at 1,000, 1,500, and 2,000 bar. The extraction yield increased up to 1.64 times by breaking the biji to form a sub-micron suspension. The soluble dietary fiber, protein, and free amino acid contents were increased by the UHPH process (p<0.05), in comparison with those of untreated biji. Furthermore, the total sugar, free sugar, and total polyphenol contents of biji were augmented by the UHPH process. Antioxidant activity (ABTS) after exposure to UHPH (1,000-2,000 bar) was well retained (p<0.05). The extraction efficiencies and nutritive components were enhanced by increasing the pressure in the UHPH process.

• Bulletin of the Korean Chemical Society
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• v.33 no.10
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• pp.3489-3492
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• 2012

• Air Cleaning Technology
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• v.8 no.4 s.31
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• pp.34-45
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• 1995

• The Magazine of the IEIE
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• v.19 no.5
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• pp.53-59
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• 1992

• Journal of the Korean Society for Precision Engineering
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• v.28 no.12
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• pp.1419-1424
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• 2011

Nanoimprint lithography is a next generation lithography technology, which enables to fabricate nano to micron-scale patterns through simple and low cost process. Nanoimprint lithography has been applied in various industry fields such as light emitting diodes, solar cells and display. Functional patterns, including anti-reflection moth-eye pattern, photonic crystal pattern, fabricated by nanoimprint lithography are used to improve overall efficiency of devices in that fields. For these reasons, in this study, sub-micron-scaled functional patterns were directly fabricated on Si and glass substrates by thermal imprinting process using ZnO nano-particles dispersion resin. Through the thermal imprinting process, arrays of sub-micron-scaled pillar and hole patterns were successfully fabricated on the Si and glass substrates. And then, the topography, components and optical property of the imprinted ZnO nano-particles/resin patterns are characterized by Scanning Electron Microscope, Energy-dispersive X-ray spectroscopy and UV-vis spectrometer, respectively.

• Journal of the Korean Ceramic Society
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• v.54 no.1
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• pp.23-27
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• 2017

A series of $CeO_2-TiO_2$ composite samples with different Ce/Ti molar ratios were prepared by the paper template. Powder X-ray diffraction (XRD) and transmission electron microscopy (TEM) were used to confirm a face-centered cubic lattice of $CeO_2$ with Ce/Ti =8:2 or 9:1 and a two phase mixture of anatase titania and face-centered cubic ceria with Ce/Ti = 7 : 3. The field emission scanning electron microscopy (FESEM) results suggest that the products are micron braid structures consisting of fibers with diameters in a range of $1-6{\mu}m$ and lengths of several hundred micrometers. $N_2$ absorption-desorption testing shows that the composite at Ce/Ti molar fraction of 8 : 2 has the largest BET surface area (about $81m^2{\cdot}g^{-1}$). Compared to the pure $CeO_2$ sample, the composites show superior catalytic activity for $H_2$ reduction and CO oxidation. For the micron braid structure $CeO_2-TiO_2$ composite (Ce/Ti = 8 : 2), due to the high surface area and the solid solution with appropriate $Ti^{4+}$ incorporation, the CO conversion at about $280^{\circ}C$ was above 50% and at $400^{\circ}C$ was 100%.

• Particle and aerosol research
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• v.18 no.4
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• pp.87-95
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• 2022

Currently, droplet protective screens (DPSs) are used to prevent the spread of respiratory diseases. As virus particles can maintain their infective in indoor environments, recent studies have investigated the risk of airborne transmission. However, the ability of DPSs to block airborne transmission has not been verified yet. In this study, the preventive ability of DPSs against droplet and airborne transmission was evaluated. Moreover, the effectiveness of a Portable air purifier (PAP) was investigated. According to results, in a simulated room where an infectious person spoke, the DPS blocked more than 90% of the micron-sized droplets (with a diameter larger than 1 ㎛) transmitted to the front of the infectious person. However, sub-micron droplets (with a diameter smaller than 1 ㎛) passed through the DPS and spread in a room. However, the PAP reduced the amount of both micron and sub-micron droplets transmitted to the front of the infectious person. When the PAP airflow direction was set from the DPS surface to the free space near the infectious person, improved prevention against droplet and airborne transmission was recorded. However, airborne transmission was accelerated when the PAP airflow direction was set from the free space to the DPS surface.