The evaluation of the effect of residual stress induced in piezoresistor on resistance change ratio distribution (압저항체에서 발생하는 잔류응력이 저항변화율 분포도에 미치는 영향성 평가)
-
- Proceedings of the Korean Society of Precision Engineering Conference
- /
- 2005.10a
- /
- pp.790-793
- /
- 2005