• 제목/요약/키워드: source material

검색결과 2,575건 처리시간 0.038초

$BCl_3$/He 플라즈마를 이용한 $Al_2O_3$ 박막 식각특성 연구 (Etching Characteristics of $Al_2O_3$ film Using $BCl_3$/He Plasma)

  • 이현우;윤선진;김만수;권광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.188-189
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    • 2007
  • The etching characteristics of $Al_2O_3$ films using the inductively coupled plasma (ICP) was investigated. The etch gas was the mixture of $BCl_3$ and He. The effect of ICP source and bias powers on etch rate and etch selectivity to polycrystalline Si was investigated in the etch process of $Al_2O_3$. The etch rate of $Al_2O_3$ film was 23nm/min when the source power and bias power were 600W and 60W, respectively. The results also indicated that the etch selectivity to polycrystalline Si could not be enhanced to be higher than 1.0 by changing the ICP source power and bias power, under the experimental conditions used in the present work. Based on plasma parameters extracted from Langmuir probe data, the etching mechanism of $Al_2O_3$ film was discussed in detail.

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저항형 고온 초전도 전류제한기의 저항변화 분석 (Anaysis of resistance variance of Resistive type high-Tc superconducting fault current limiter)

  • 박형민;최효상;임성훈;박충렬;한병성;정헌상;최창주;현옥배;정동철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.547-550
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    • 2004
  • Superconducting fault current limiter(SFCL) is expected to be introduced into electric power system in future as an effective countermeasure for the increase of the short-circuit current due to the growth of the electric power system. SFCL has a merit that the fault current can be limited by the resistance generated when a superconductor transits from a superconducting state to a normal state without additional detecting device. In this paper, we investigated the resistance variance of resistive type SFCL and the fault current limiting characteristics due to the amplitude of source voltage. We could obtain the more effective fault current limiting characteristics of SFCL as the source voltage increased.

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유기박막표면에 DuoPIGatron 이온소스를 이용한 IPS 셀의 전기광학 특성 (EO performance of IPS cell on the inorganic films surface using DuoPIGatron ion source)

  • 김병용;황정연;김상훈;한정민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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    • pp.89-90
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    • 2006
  • Electro-optical (EO) characteristics of in-plane switching (IPS) cell on the polyimide surface using obliquely ion beam (IB) exposure as new ion beam (IB) type system (DuoPIGatrion ion source). A good uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the polyimide surface was observed. In addition, it can be achieved the good EO properties of the ion-beam-aligned IPS-cell on poly imide surface ; the stable VT curve in the ion-beam-aligned IPS cell on a poly imide (PI) surface with ion beam exposure using new type IB equipment was obtained. and the fast response time in the ion-beam-aligned IPS cell on a polyimide (PI) surface with ion beam exposure using new type IB equipment was obtained.

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무기박막표면에 DuoPIGatron 이온소스를 이용한 TN-LCD 셀의 전기광학 특성 (EO performance of TN cell on the inorganic films surface using DuoPIGatron ion source on NDLC thin film)

  • 황정연;김병용;김상훈;한정민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.432-433
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    • 2006
  • Electro-optical (EO) characteristics of twisted nematic (TN) - liquid crystal display (LCD) on the NDLC thin film using obliquely ion beam (IB) exposure as new ion beam (IB) type system (DuoPIGatrion ion source). A good uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the NDLC thin film was observed. In addition, it can be achieved the good EO properties of the ion-beam-aligned TN-cell on polyimide surface ; the stable VT curve in the ion-beam-aligned TN cell on the NDLC thin film with ion beam exposure using new type IB equipment was obtained. and the fast response time in the ion-beam-aligned TN cell on the NDLC thin film with ion beam exposure using new type IB equipment was obtained.

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머신 비전 라인 스캔 카메라를 위한 라인 스캔 광원의 제어 특성에 관한 연구 (A Study on the Control Characteristics of Line Scan Light Source for Machine Vision Line Scan Camera)

  • 김태화;이천
    • 한국전기전자재료학회논문지
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    • 제34권5호
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    • pp.371-381
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    • 2021
  • A machine vision inspection system consists of a camera, optics, illumination, and image acquisition system. Especially a scanning system has to be made to measure a large inspection area. Therefore, a machine vision line scan camera needs a line scan light source. A line scan light source should have a high light intensity and a uniform intensity distribution. In this paper, an offset calibration and slope calibration methods are introduced to obtain a uniform light intensity profile. Offset calibration method is to remove the deviation of light intensity among channels through adding intensity difference. Slope calibration is to remove variation of light intensity slope according to the control step among channels through multiplying slope difference. We can obtain an improved light intensity profile through applying offset and slope calibration simultaneously. The proposed method can help to obtain clearer image with a high precision in a machine vision inspection system.

막걸리의 제조를 위한 효소제의 개발연구 1 (Studies on improvement of manufacturing method of enzymic source for Maggerley(Korea wine) brewing(I))

  • 이성범;최경환;임동순;김덕치
    • 미생물학회지
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    • 제7권4호
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    • pp.159-166
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    • 1969
  • It is necessry to develop and strengthen the activity of enzymic source which in low applied for maggerley brewing as an amylolytic and proteolytic starter, recently in this country the active and strong enzymic starter is required for the better brewing and to substitute another starch material for the present wheat flour. In this study, manufacturing method the strong enzymic source have been developed and established with use of raw wheat bran plus fungal strains of Rhizopus sp. and Aspergillus usamii the culture of starter. The results on experimental the activities of enzymic sources (stater) are as following ; 1. Method of making the enzymic source (starter) is to cultivate the strains of Asperguillus orzyae, Asp. kawachii, Asp usamii and Rhizopus sp. in the acid treated raw or heatboiled wheat bran. 2. The saccharogenic pwoer (S.P.) of enzymic source which consisted of raw bran plus fungi and cultured in it is generally stronger than those of heat-boiled bran plus fungi, the strongest power was shown in the culture of Rhizopus plus raw bran, and the next other is in mixture of Asp.usamii and Rhizopus on raw wheat bran. 3. The most strong alpha amylase activity was expressed in the plot of Asp.oryzae on heat-boiled wheat bran, the next was in the culture of Rhizopus nad Aspergillus usamii on raw wheatbran. 4. The most vigourous acidic proteinase activity was expressed in the micture of raw bran plus Asp. usamii and Rhizopus those were independentlu cu;tured before mixing for neutral proteinase activity, it was shown in the mixed culture of Asp. usamii and Rhizopus on raw wheat bran, the msot active alkaline proteinase activity of enzymic source was found in the plot of raw bran material. 5. For poly-preptidase activity in pH 6.5 it is found that the culture of Rhizopus and Asp.usamii on raw bran was most active among them of enzymic sources. 6. Generally, it is concluded that culture of fungi on acid treated raw wheat bran is stronger in its activity than those of heat boiled wheat bran, especially the culture of Rhizopus nad Asp.usamii on raw bran exhibited the most vigorous and non-polarized activity for all aspects, so it is considered to be most desirable enzymic stater in Korean Maggerley brewing and this would be able to substitute brewing material for the present wheat flour because of its strong and wide hand activity of amylolytic and proteolytic action.

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HVPE 방법에 의해 성장된 탄소 마이크로구의 특성 (Characterization of carbon microspheres grown by HVPE)

  • 이찬미;전헌수;박민아;이찬빈;양민;이삼녕;안형수;김석환;유영문;신기삼;배종성;이효석
    • 한국결정성장학회지
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    • 제25권2호
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    • pp.62-67
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    • 2015
  • 혼합소스 HVPE 방법을 사용하여 탄소 마이크로구를 합성하였다. 소스 물질로는 그래파이트 보트에 담겨 진 Ga, Al을 사용하였고 반응가스로 암모니아, 염산, 질소 가스를 사용하였다. 탄소 마이크로구의 합성은 $1090^{\circ}C$에서 실시하였다. 질소 가스는 5000, 염산 가스는 80, 암모니아 가스는 2000 sccm으로 공급되며 반응 시간은 3시간으로 하였다. 탄소 마이크로구의 SEM 측정 결과 수백 ${\mu}m$의 지름을 가지고 매끈한 표면을 가지는 완전한 구형 모양을 가짐을 알 수 있었다. XPS 결과 탄소 마이크로구의 내부는 탄소 71.78 wt%, 산소 15.37 wt%, 황 0.32 wt%, 규소 1.97 wt%로 구성되어 있었다. 또한 TEM 분석을 통해 탄소 마이크로구가 비정질임을 알 수 있었다. 탄소 마이크로구가 합성된 것은 에피 성장 과정 중에 배양판과 같이 홈이 파져 있는 공간에서 가스 간의 흡착 반응에 의해 탄소 마이크로구의 성분들이 합성된 것으로 판단된다.

레이저 섬광법에 의한 압연된 저탄소강 판재의 열확산계수 측정 (Measurements of Thermal Diffusivity of Heavy Rolled Low Carbon Steel Plate With Laser Flash Technique)

  • 배신철;임동주
    • 대한기계학회논문집
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    • 제14권1호
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    • pp.157-171
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    • 1990
  • 본 연구에서는 저탄소강 판재가 소성변형을 하면 열확산계수가 변화하는가를 구명하려는 것이다. 재료의 소성변형은 압연법을 이용하며, 고온압연, 열간압연 및 냉간압연법으로 재료를 제작하여, 압연률을 변화시키면서 압연방법 및 압연률에 따르 는 변화를 규명하려 한다. 열확산계수의 측정은 레이저 섬광법으로 하며 온도를 실 온에서 500.deg. C 근처까지 변화시키면서 측정한다.

Formation of a thin nitrided GaAs layer

  • Park, Y.J.;Kim, S.I.;Kim, E.K.;Han, I.K.;Min, S.K.;O'Keeffe, P.;Mutoh, H.;Hirose, S.;Hara, K.;Munekata, H.;Kukimoto, H.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1996년도 제11회 학술발표회 논문개요집
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    • pp.40-41
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    • 1996
  • Nitridation technique has been receiving much attention for the formation of a thin nitrided buffer layer on which high quality nitride films can be formedl. Particularly, gallium nitride (GaN) has been considered as a promising material for blue-and ultraviolet-emitting devices. It can also be used for in situ formed and stable passivation layers for selective growth of $GaAs_2$. In this work, formation of a thin nitrided layer is investigated. Nitrogen electron cyclotron resonance(ECR)-plasma is employed for the formation of thin nitrided layer. The plasma source used in this work is a compact ECR plasma gun3 which is specifically designed to enhance control, and to provide in-situ monitoring of plasma parameters during plasma-assisted processing. Microwave power of 100-200 W was used to excite the plasma which was emitted from an orifice of 25 rnm in diameter. The substrate were positioned 15 em away from the orifice of plasma source. Prior to nitridation is performed, the surface of n-type (001)GaAs was exposed to hydrogen plasma for 20 min at $300{\;}^{\circ}C$ in order to eliminate a native oxide formed on GaAs surface. Change from ring to streak in RHEED pattern can be obtained through the irradiation of hydrogen plasma, indicating a clean surface. Nitridation was carried out for 5-40 min at $RT-600{\;}^{\circ}C$ in a ECR plasma-assisted molecular beam epitaxy system. Typical chamber pressure was $7.5{\times}lO^{-4}$ Torr during the nitridations at $N_2$ flow rate of 10 seem.(omitted)mitted)

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Effects of Solution Treatment Temperatures on Microstructure and Mechanical Properties of TIG-MIG Hybrid Arc Additive Manufactured 5356 Aluminum Alloy

  • Zuo, Wei;Ma, Le;Lu, Yu;Li, Shu-yong;Ji, Zhiqiang;Ding, Min
    • Metals and materials international
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    • 제24권6호
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    • pp.1346-1358
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    • 2018
  • A novel additive manufacturing method with TIG-MIG hybrid heat source was applied for fabricating 5356 aluminum alloy component. In this paper the microstructure evolution, mechanical properties and fracture morphologies of both as-deposited and heat-treated component were investigated, and how these were affected by different heat-treated temperature. The as-deposited microstructure showed dominant equiaxed grains with second phase, and the size of them is coarse in the bottom region, medium in the middle region and fine in the top region owing to different thermal cycling conditions. Compared with as-deposited microstructure, the size of grain becomes large and second phases gradually dissolve in the matrix as heat-treated temperature increase. Different microstructures determine the mechanical properties of component. Results show that average ultimate tensile strength enhances from 226 to 270 MPa and average microhardness increases from 64.2 to 75.3 HV0.1 but ductility decreases from 33 to 6.5% with heat-treated temperature increasing. For all components, the tensile properties are almost the same in the vertical direction (Z) and horizontal direction (Y) due to equiaxed grains, which exhibits isotropy, and the mechanisms of these are analyzed in detailed. In general, the results demonstrate that hybrid arc heat source has the potential to fabricate aluminum alloy component.