• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1117-1120
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• 2001

Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Journal of the Korean Ceramic Society
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• v.45 no.10
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• pp.584-588
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• 2008

Porous hydroxyapatite(HA) and HA-coated porous $Al_2O_3$ possessing pore characteristics required for bone substitutes were prepared by a slurry foaming method combined with gelcasting. The HA coating was deposited by heating porous $Al_2O_3$ substrates in an aqueous solution containing $Ca^{2+}$ and ${PO_4}^{3-}$ ions at $65{\sim}95^{\circ}C$ under ambient pressure. The pore characteristic, microstructure, and compressive strength were investigated and compared for the two kinds of samples. The porosity of the samples was about 81% and 80% for HA and $Al_2O_3$, respectively with a highly interconnected network of spherical pores with size ranging from 50 to $250{\mu}m$. The porous $Al_2O_3$ sample showed much higher compressive strength(25 MPa) than the porous HA sample(10 MPa). Fairly dense and uniform HA coating(about $2{\mu}m$ thick) was deposited on the porous $Al_2O_3$ sample. Since the compressive strength of cancellous bone is $2{\sim}12$ MPa, both the porous HA and HA-coated porous $Al_2O_3$ samples could be successfully utilized as scaffolds for bone repair. Especially the latter is expected suitable for load bearing bone substitutes due to its excellent strength.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.86-89
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• 2003

Chemical Mechanical Planarization(CMP) has been accepted as the most effective processes for ultra large scale integrated (ULSI) chip manufacturing. However, as the polishing process continues, pad pores get to be glazed by polishing residues, which hinder the supply of new slurry. And pad surface is ununiformly deformed as real contact distance. These defects make material removal rate(MRR) decrease with a number of polishied wafer. Also the desired within-chip planarity, within wafer non-uniformity(WIWNU) and wafer to wafer non-uniformity(WTWNU) arc unable to be achieved. So, pad conditioning in CMP Process is essential to overcome these defects. The eletroplated or brazed diamond conditioner is used as the conventional conditioning. And. allumina long fiber, the jet power of high pressure deionized water, vacuum compression. ultrasonic conditioner aided by cavitation effect and ceramic plate conditioner are once used or under investigation. But. these methods arc not sufficient for ununiformly deformed pad surface and the limits of conditioning effect. So this paper focuses on the characteristics of diamond conditioner which reopens glazed pores and removes ununiformly deformed pad away.

• Journal of the Korean Ceramic Society
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• v.42 no.10 s.281
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• pp.654-659
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• 2005

The ceramic paper, which could adsorb VOC's effectively, was made by paper-making method with zeolite and ceramic fiber as main constituents. By this experiment, the optimal composition of the slurry for the ceramic paper formation was established. SEM observation showed that zeolite powder was uniformly dispersed and adhered to the paper by applying inorganic binder. The two type zeolites content in the ceramic paper was 26 wt$\%$ and its BET surface area was 131 $m^{2}$/g. The thickness and the basis weight of the ceramic paper were 0.2 mm and 130 g/$m^{2}$ respectively, and it had sufficient tensile characteristics to withstand tensile stress without tearing during corrugation. The total inorganic content of the paper was 78 wt$ \% $ and organic content was 22 wt$\%$. The equilibrium loading amount of toluene at the toluene at the toluene partial pressure of 0.2 mmHg was 3.2 wt$\%$.

• Proceedings of the Korean Geotechical Society Conference
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• 2001.03a
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• pp.65-72
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• 2001

Since Pyoungtaek thermal power plant began using natural gas in 1986, the annual using volume has rapidly increased and reached 12.7 million tons in 1999. When the natural gas is cooled to a temperature of approximately -162$^{\circ}$C at atmospheric pressure, it condenses to a liquid called liquefied natural gas(LNG). LNG has a special characters such as odorless, colorless, non-corrosive, and non-toxic. So, LNG storage tank, tanker ship, transfer pipelines are required the special storage and transportation systems and technology. The presently operating LNG terminals are Pyongtaek and Inchon terminals. A total of 19 above-ground LNG storage tanks(100 thousand ㎘ grade) are currently in operation with a sendout capacity of 4,360tons/hour. To meet the growing domestic demand of LNG supply, the Inchon receiving terminal is expanding(six in-ground tank) and constructing a third LNG terminal at Tongyong. In this paper, case study on seepage analysis and countermeasure against increasing the seepage volume of in-ground LNG storage tank excavation work is reported. The results of an additional seepage analysis are presented to verify the design seepage volume of assumption section and seepage volume after curtain-grouting in the slurry wall.

• Korean Journal of Materials Research
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• v.9 no.7
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• pp.675-679
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• 1999

An investigation was performed to prepare spherical cobalt powder with about particle size of 400nm from aqueous cobalt hydroxide slurry under hydrothermal reduction conditions using palladium chloride as a catalyst. The reduction kinetics was in good agreement with a surface reaction core model equation. and the activation energy obtained from Arrhenius plots was 55.6 KJ/mol at the temperature range of $145~195^{\circ}C$. Additionally, the study showed that the cobalt reduction rate is proportional to the initial hydrogen pressure with a reaction order of n=0.63. which corresponds to the gas chemisorption reaction type.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.481-482
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• 2006

Chemical-mechanical polishing, the dominant technology for LSI planarization, is trending to play an important function in micro-electro mechanical systems (MEMS). However, MEMS CMP process has a couple of different characteristics in comparison to LSI device CMP since the feature size of MEMS is bigger than that of LSI devices. Preliminary CMP tests are performed to understand material removal rate (MRR) with blanket wafer under a couple of polishing pressure and velocity. Based on the blanket CMP data, this paper focuses on the consumable approach to enhance MEMS CMP by the adjustment of slurry and pad. As a mechanical tool, newly developed microstructured (MS) pad is applied to compare with conventional pad (IC 1400-k Nitta-Haas), which is fabricated by micro melding method of polyurethane. To understand the CMP characteristics in real time, in-situ friction force monitoring system was used. Finally, the topography change of poly-si MEMS structures is compared according to the pattern density, size and shape as polishing time goes on.

• KIEAE Journal
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• v.8 no.1
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• pp.87-92
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• 2008

Sheathing work used for excavation in a crowded downtown is generally a temporary strut method using H-piles and sheathing wall includes lagging, CIP, SCW or slurry wall. A temporary strut serving the support for sheathing wall acts to resist the earth pressure, but it shall be removed when installing the underground structure members. A traditional temporary strut might cause the stress imbalance of the sheathing wall when it is demolished, resulting in time extension and the risk of collapse. A traditional temporary strut method thus needs to be improved for schedule and cost reduction, risk mitigation and for preparation for potential civic complaint. A permanent strut method doesn't require installing and demolishing the temporary structure that will lead to reducing the time and cost and the structural risk during the demolition process. And given the girder, the part of the underground structure, serves the role of strut, it can secure the wider interval compared to the traditional method, which enables to secure the wider space for the convenience of excavation as well as enhance the constructability and efficient site management. The thesis was intended to study the composite girder designed to use the strut as permanent structure so as to reduce the excavation and floor height.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.10a
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• pp.498-507
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• 2008

The mixture of bentonite powder and water is generally used to maintain the stability of excavation surface during the construction of vertical cutoff walls. The filter cake on the sidewall surface is the result of filtration of slurry into the adjacent soil formation. The filter cake is believed to have a very low hydraulic conductivity compared to that of the cutoff wall. This paper evaluates hydraulic conductivities of bentonite filter cakes set up with three types of bentonites under various pressure levels. A modified fluid loss test was employed in this experiment. Theory of filtration process was reviewed to explain the procedure in the present experiment. Hydraulic conductivity of the filter cakes with consideration of the filter medium resistance was evaluated. The results of the experiment with two calculation methods and discussion are presented to show the efficiency of the modified fluid loss test.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.10a
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• pp.1502-1511
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• 2008

The mixture of bentonite powder and water is generally used to maintain the stability of excavation surface during the construction of vertical cutoff walls. The filter cake on the sidewall surface is the result of filtration of slurry into the adjacent soil formation. The filter cake is believed to have a very low hydraulic conductivity compared to that of the cutoff wall. This paper evaluates hydraulic conductivities of bentonite filter cakes set up with three types of bentonites under various pressure levels. A modified fluid loss test was employed in this experiment. Theory of filtration process was reviewed to explain the procedure in the present experiment. Hydraulic conductivity of the filter cakes with consideration of the filter medium resistance was evaluated. The results of the experiment with two calculation methods and discussion are presented to show the efficiency of the modified fluid loss test.