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Deposition and Characterization of Antistiction Layer for Nanoimprint Lithography by VSAM (Vapor Self Assembly Monolayer) (기상 자기조립박막 법을 이용한 나노임프린트용 점착방지막 형성 및 특성평가)

  • Cha, Nam-Goo;Kim, Kyu-Chae;Park, Jin-Goo;Jung, Jun-Ho;Lee, Eung-Sug;Yoon, Neung-Goo
    • Korean Journal of Materials Research
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    • v.17 no.1
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    • pp.31-36
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    • 2007
  • Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.

Improvement of biohistological response of facial implant materials by tantalum surface treatment

  • Bakri, Mohammed Mousa;Lee, Sung Ho;Lee, Jong Ho
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.41
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    • pp.52.1-52.8
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    • 2019
  • Background: A compact passive oxide layer can grow on tantalum (Ta). It has been reported that this oxide layer can facilitate bone ingrowth in vivo though the development of bone-like apatite, which promotes hard and soft tissue adhesion. Thus, Ta surface treatment on facial implant materials may improve the tissue response, which could result in less fibrotic encapsulation and make the implant more stable on the bone surface. The purposes of this study were to verify whether surface treatment of facial implant materials using Ta can improve the biohistobiological response and to determine the possibility of potential clinical applications. Methods: Two different and commonly used implant materials, silicone and expanded polytetrafluoroethylene (ePTFE), were treated via Ta ion implantation using a Ta sputtering gun. Ta-treated samples were compared with untreated samples using in vitro and in vivo evaluations. Osteoblast (MG-63) and fibroblast (NIH3T3) cell viability with the Ta-treated implant material was assessed, and the tissue response was observed by placing the implants over the rat calvarium (n = 48) for two different lengths of time. Foreign body and inflammatory reactions were observed, and soft tissue thickness between the calvarium and the implant as well as the bone response was measured. Results: The treatment of facial implant materials using Ta showed a tendency toward increased fibroblast and osteoblast viability, although this result was not statistically significant. During the in vivo study, both Ta-treated and untreated implants showed similar foreign body reactions. However, the Ta-treated implant materials (silicone and ePTFE) showed a tendency toward better histological features: lower soft tissue thickness between the implant and the underlying calvarium as well as an increase in new bone activity. Conclusion: Ta surface treatment using ion implantation on silicone and ePTFE facial implant materials showed the possibility of reducing soft tissue intervention between the calvarium and the implant to make the implant more stable on the bone surface. Although no statistically significant improvement was observed, Ta treatment revealed a tendency toward an improved biohistological response of silicone and ePTFE facial implants. Conclusively, tantalum treatment is beneficial and has the potential for clinical applications.

A Study on the Review of Repair Methods and Repair Materials for the Prevention of Fire spread of Building Exterior Materials (건축물 외장재의 화재확대방지를 위한 보수구법 및 보수재료 검토에 관한 연구)

  • Lee, Byeong-Heun;Jin, Seung-Hyeon;Park, Sung-Ha;Kwon, Young-Jin
    • Fire Science and Engineering
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    • v.33 no.3
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    • pp.105-111
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    • 2019
  • In Korea, the results of a field survey on the construction of flammable exterior materials implemented in 2018 revealed that 147,559 buildings belong to this category. It was found that the fire spreading cases in upper and adjacent constructions are about 3,500 per year, the fires of starting in flammable exterior material are about 1,500 per year. In this study, we investigated the repair method of buildings constructed by flammable exterior material and conducted performance verification of each repair materials for prevention of similar fire. In the case of the repair method, a method of reinforcing with a repair material after removing the existing building finishing material and a method of attaching the repair material after performing the face finishing are proposed. In addition, we conducted cone calorimeter tests of 6 materials such as fireproof gypsum board, mineral wool, hard urethane foam, ceramic board and ALC panel as dryvit and repairing materials, and investigated basic combustion performance of that materials.

Ag Impregnated HAp Coatings on Alumina Substrate by IBAD and Its Biological Test (IBAD를 이용하여 알루미나 위에 HAp를 Coating하는 연구와 이의 항균력 시험)

  • Park, Eui-Seo;Kim, Taik-Nam;Yim, Hyuk-Jun;Kim, Yun-Jong;Hwang, Deuk-Soo;Kim, Jung-Woo;Kim, Sun-Ok
    • The Journal of Engineering Research
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    • v.3 no.1
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    • pp.181-187
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    • 1998
  • Hydroxyapatite was used as implant materials, because it has a good biocompatibility and is similar to human bone. However it is not expected to have a high strength as implant materials because of a low fracture strength after sintering of HAp. Alumina ($\alpha$-alumina) shows a stable chemical properties and high strength in physiological environments. Thus it was tried to use a HAp coatings on Alumina substrate as implant materials. In this study, HAp was coated on Alumina substrate by lon Beam Assisted Deposition(IBAD). Then Ag was impregnated on HAp coating layer, which showed antimicrobial effects. To carry out the ion exchange of $Ag^+$ with $Ca^{2+}$ in HAp on the surface, HAp coated alumina substrate was immersed in 20ppm, 100ppm $AgNO_3$ solution at room temperature for 48 hours. Antimicrobial test was studied by using bacteria, which normally caused periprosthetic infections. The follwing bacteria was used in antimicrobial test. Escherichia coli, Pseudomonas aeruginosa (gram negative) and staphylococcus epidermidis (gram positive). Ag impregnated HAp shows very good antimicrobial effects against these bacteria. The surface structure of sample, which was treated in $AgNO_3$ solution was studied by SEM, XRD. Ag release curve was studied in Simulated Body Fluid (SBF) solution.

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Electrochemical Properties of Lithium Secondary Battery and the Synthesis of Spherical Li4Ti5O12 Powder by Using TiCl4 As a Starting Material (TiCl4를 출발원료로한 구형 Li4Ti5O12 분말합성 및 리튬이차 전지특성)

  • Choi, Byung-Hyun;Ji, Mi-Jung;Kwon, Yong-Jin;Kim, Eun-Kyung;Nahm, Sahn
    • Korean Journal of Materials Research
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    • v.20 no.12
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    • pp.669-675
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    • 2010
  • One of the greatest challenges for our society is providing powerful electrochemical energy conversion and storage devices. Rechargeable lithium-ion batteries and fuel cells are among the most promising candidates in terms of energy and power density. As the starting material, $TiCl_4{\cdot}YCl_3$ solution and dispersing agent (HCP) were mixed and synthesized using ammonia as the precipitation agent, in order to prepare the nano size Y doped spherical $TiO_2$ precursor. Then, the $Li_4Ti_5O_{12}$ was synthesized using solid state reaction method through the stoichiometric mixture of Y doped spherical $TiO_2$ precursor and LiOH. The Ti mole increased the concentration of the spherical particle size due to the addition of HPC with a similar particle size distribution in a well in which $Li_4Ti_5O_{12}$ spherical particles could be obtained. The optimal synthesis conditions and the molar ratio of the Ti 0.05 mol reaction at $50^{\circ}C$ for 30 minutes and at $850^{\circ}C$ for 6 hours heat treatment time were optimized. $Li_4Ti_5O_{12}$ was prepared by the above conditions as a working electrode after generating the Coin cell; then, electrochemical properties were evaluated when the voltage range of 1.5V was flat, the initial capacity was 141 mAh/g, and cycle retention rate was 86%; also, redox reactions between 1.5 and 1.7V, which arose from the insertion and deintercalation of 0.005 mole of Y doping is not a case of doping because the C-rate characteristics were significantly better.

Analysis on contents and types of Web-based Multimeida Learning Materials for Environmental Education (웹 기반 멀티미디어 환경 교육 교수·학습 자료의 내용 및 유형 분석)

  • Cha, Min-Jung;So, Keum-Hyun;Shim, Kew-Cheol;Yeau, Sung-Hee
    • Journal of Science Education
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    • v.34 no.1
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    • pp.84-92
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    • 2010
  • We analyzed learning materials from web sites of the Ministry of Environments, the Ministry of Land, Transport and Maritime Affairs and Korea Energy Management Corporation to help people to develop and utilize web-based multimedia teaching materials. The contents of web-based multimedia teaching materials for environmental educations were generally concentrated in 304 cases of natural environments (22.1%), 250 cases of environmental contaminations (16.5%) and 187 cases of environmental preservation plans (12.4%). It did not significantly deviate from traditional teaching-learning contents being conducted focusing on environmental pollutions of the past. The types of web-based multimedia teaching materials for environmental educations were 934 cases of teaching plans (61.8%), 156 cases of documentaries (10.3%) and 128 cases of e-text information (8.5%). The web-based multimedia teaching materials by school-levels showed that there were 796 for primary schools (35.3%), 588 for middle schools (26.1%) and 320 for high schools (14.2%). It also showed that environmental education with similar contents were provided even in advanced schools. Therefore, it is believed that there needs development of various types of teaching materials while the fields of environmental education contents are covered with connectivity according to school-levels.

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Growth of Epitaxial AlN Thin Films on Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy (플라즈마분자선에피탁시법을 이용한 사파이어 기판 위 질화알루미늄 박막의 에피탁시 성장)

  • Lee, Hyo-Sung;Han, Seok-Kyu;Lim, Dong-Seok;Shin, Eun-Jung;Lim, Se-Hwan;Hong, Soon-Ku;Jeong, Myoung-Ho;Lee, Jeong-Yong;Yao, Takafumi
    • Korean Journal of Materials Research
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    • v.21 no.11
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    • pp.634-638
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    • 2011
  • We report growth of epitaxial AlN thin films on c-plane sapphire substrates by plasma-assisted molecular beam epitaxy. To achieve two-dimensional growth the substrates were nitrided by nitrogen plasma prior to the AlN growth, which resulted in the formation of a two-dimensional single crystalline AlN layer. The formation of the two-dimensional AlN layer by the nitridation process was confirmed by the observation of streaky reflection high energy electron diffraction (RHEED) patterns. The growth of AlN thin films was performed on the nitrided AlN layer by changing the Al beam flux with the fixed nitrogen flux at 860$^{\circ}C$. The growth mode of AlN films was also affected by the beam flux. By increasing the Al beam flux, two-dimensional growth of AlN films was favored, and a very flat surface with a root mean square roughness of 0.196 nm (for the 2 ${\mu}m$ ${\times}$ 2 ${\mu}m$ area) was obtained. Interestingly, additional diffraction lines were observed for the two-dimensionally grown AlN films, which were probably caused by the Al adlayer, which was similar to a report of Ga adlayer in the two-dimensional growth of GaN. Al droplets were observed in the sample grown with a higher Al beam flux after cooling to room temperature, which resulted from the excessive Al flux.

Field and remote acquisition of hyperspectral information for classification of riverside area materials (현장 및 원격 초분광 정보 계측을 통한 하천 수변공간 재료 구분)

  • Shin, Jaehyun;Seong, Hoje;Rhee, Dong Sop
    • Journal of Korea Water Resources Association
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    • v.54 no.12
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    • pp.1265-1274
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    • 2021
  • The analysis of hyperspectral characteristics of materials near the South Han River has been conducted using riverside area measurements by drone installed hyperspectral sensors. Each spectrum reflectance of the riverside materials were compared and analyzed which were consisted of grass, concrete, soil, etc. To verify the drone installed hyperspectral measurements, a ground spectrometer was deployed for field measurements and comparisons for the materials. The comparison results showed that the riverside materials had their unique hyperspectral band characteristics, and the field measurements were similar to the remote sensing data. For the classification of the riverside area, the K-means clustering method and SVM classification method were utilized. The supervised SVM method showed accurate classification of the riverside area than the unsupervised K-means method. Using classification and clustering methods, the inherent spectral characteristic for each material was found to classify the riverside materials of hyperspectral images from drones.

Scientific Investigation and Conservation Treatment of the Three-story Stone Pagoda at Jangha-ri, Buyeo (부여 장하리 삼층석탑의 과학적 조사 및 보존처리)

  • Kim, Joohyung;Han, Minsu
    • Conservation Science in Museum
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    • v.27
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    • pp.103-124
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    • 2022
  • This study examined the properties of the materials used in the three-story pagoda at Jangha-ri, Buyeo. It was performed in order to identify the objective condition of the pagoda and establish an appropriate plan for the conservation treatment of the pagoda. According to the study, the average total magnetic susceptibility was 3.71 (10-3 SI unit), and at least four types of granite with different origins were likely used in the production of the pagoda. The ultrasonic velocity averaged 1,519m/s, and the coefficient of weathering showed an average of grade 4. The thermal gradient between the cement (restoration materials) and original materials was identified through thermal imaging. In some areas, the cement restoration materials required replacement with new stone materials with properties similar to those of the original stone materials. Taking into account these results, a map of weathering damage was prepared and appropriate conservation treatment plans were established based on the findings of previous studies. Since the pagoda had suffered severe biological damage and discoloration, surface contaminants were removed through wet cleaning with distilled water and a brush. The exfoliated areas were reinforced on the site by mixing epoxy resin with powdered stone with the same properties as the original stone materials of the pagoda.

Optimizing Graphene Growth on the Electrolytic Copper Foils by Controlling Surface Condition and Annealing Procedure (전해구리막의 표면 조건과 어닐링 과정을 통한 그래핀 성장 최적화)

  • Woo Jin Lee;Ha Eun Go;Tae Rim Koo;Jae Sung Lee;Joon Woo Lee;Soun Gi Hong;Sang-Ho Kim
    • Journal of Surface Science and Engineering
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    • v.56 no.3
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    • pp.192-200
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    • 2023
  • Graphene, a two-dimensional material, has shown great potential in a variety of applications including microelectronics, optoelectronics, and graphene-based batteries due to its excellent electronic conductivity. However, the production of large-area, high-quality graphene remains a challenge. In this study, we investigated graphene growth on electrolytic copper foil using thermochemical vapor deposition (TCVD) to achieve a similar level of quality to the cold-rolled copper substrate at a lower cost. The combined effects of pre-annealing time, graphenized temperature, and partial pressure of hydrogen on graphene coverage and domain size were analyzed and correlated with the roughness and crystallographic texture of the copper substrate. Our results show that controlling the crystallographic texture of copper substrates through annealing is an effective way to improve graphene growth properties, which will potentially lead to more efficient and cost-effective graphene production. At a hydrogen partial pressure that is disadvantageous in graphene growth, electrolytic copper had an average size of 8.039 ㎛2, whereas rolled copper had a size of 19.092 ㎛2, which was a large difference of 42.1% compared to rolled copper. However, at the proper hydrogen partial pressure, electrolytic copper had an average size of 30.279 ㎛2 and rolled copper had a size of 32.378 ㎛2, showing a much smaller difference of 93.5% than before. This observation suggests this potentially leads the way for more efficient and cost-effective graphene production.