• Title/Summary/Keyword: sheet deposition

검색결과 288건 처리시간 0.027초

Optimization of the Phosphorus Doped BSF Doping Profile and Formation Method for N-type Bifacial Solar Cells

  • Cui, Jian;Ahn, Shihyun;Balaji, Nagarajan;Park, Cheolmin;Yi, Junsin
    • Current Photovoltaic Research
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    • 제4권2호
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    • pp.31-41
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    • 2016
  • n-type PERT (passivated emitter, rear totally diffused) bifacial solar cells with boron and phosphorus diffusion as p+ emitter and n+ BSF (back surface field) have attracted significant research interest recently. In this work, the influences of wafer thickness, bulk lifetime, emitter, BSF on the photovoltaic characteristics of solar cells are discussed. The performance of the solar cell is determined by using one-dimensional solar cell simulation software PC1D. The simulation results show that the key role of the BSF is to decrease the surface doping concentration reducing the recombination and thus, increasing the cell efficiency. A lightly phosphorus doped BSF (LD BSF) was experimentally optimized to get low surface dopant concentration for n type bifacial solar cells. Pre-oxidation combined with a multi-plateau drive-in, using limited source diffusion was carried out before pre-deposition. It could reduce the surface dopant concentration with minimal impact on the sheet resistance.

PECVD PSG의 유전 및 보호막특성에 관한 연구 (Dielectric and Passivation-Related Properties of Pecvd PSG)

  • 유현규;강영일
    • 대한전자공학회논문지
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    • 제22권2호
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    • pp.90-96
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    • 1985
  • PECVD장비를 사용하여 PSG를 증착하고 막의 유전 및 보호막 특성을 조사하였다. X-선 형광분석으로 PSG내의 인 농도를 분석한 결과 약 8m/o에서 포화되었다. 인 함량에 대한 PSC의 적외선 홉수율, 식각속도 및 시트저항등의 변화도 비교하였다. APCVD와 PECV각에 대한 유전특성, 스텝 커버리지, 크랙저항과 게터링효과를 검토하였다. PECVD산화막은 비중 2.4g/㎤, 굴절율 1.53, 항복전장 11-13MV/cm의 값을 가졌고 크랙저항도 APCVD산화막 보다 우수하였다 2m/o의 인을 포함하는 PECVD PSG의 경우 양호한 스텝 커버리지와 게터링효과를 보였다. 공정변수에 대한 일련의 실험을 통하여 PECVD PSC 공정으로 보다 개선된 특성의 보초막을 얻을 수 있었다.

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스퍼터링 증착 조건에 따른 금속 박막의 습식 식각율 (The Wet Etching Rate of Metal Thin Film by Sputtering Deposition Condition)

  • 허창우
    • 한국정보통신학회논문지
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    • 제14권6호
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    • pp.1465-1468
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    • 2010
  • 습식 식각은 식각용액으로서 화학용액을 사용하는 공정으로 반응물이 기판표면에서 화학반응을 일으켜 표면을 식각하는 과정이다. 습식 식각 시 수${\mu}m$의 해상도를 얻기 위해서는 그 부식액의 조성이나, 에칭시간, 부식액의 온도 등을 고려하여야 한다. 본 실험에서 사용한 금속은 Cr, Al, ITO 로 모두 DC sputter 방법을 사용해서 증착하여 사용하였다. Cr박막은 $1300{\AA}$ 정도의 두께를 사용하였고, ITO (Indium Tin Oxide) 박막은 가시광 영역에서 투명하고 (80% 이상의 transmittance), 저저항 (Sheet Resistance : $50\;{\Omega}/sq$ 이하) 인 박막을 사용하였으며, 신호선으로 주로 사용되는 Al등의 증착조건에 따른 wet etching 특성을 조사하였다.

Preparation of Carbon Nanofibers by Catalytic CVD and Their Purification

  • Lim, Jae-Seok;Lee, Seong-Young;Park, Sei-Min;Kim, Myung-Soo
    • Carbon letters
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    • 제6권1호
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    • pp.31-40
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    • 2005
  • The carbon nanofibers (CNFs) were synthesized through the catalytic decomposition of hydrocarbons in a quartz tube reactor. The CNFs prepared from $C_3H_8$ at $550^{\circ}C$ was selected as the purification sample due to the higher content of impurity than that prepared from other conditions. In this study, we carried out the purification of CNFs by oxidation in air or carbon dioxide after acid treatment, and investigated the influence of purification parameters such as kind of acid, concentration, oxidation time, and oxidation temperature on the structure of CNFs. The metal catalysts could be easily eliminated from the prepared CNFs by liquid phase purification with various acids and it was verified by ICP analysis, in which, for example, Ni content decreased from 2.51% to 0.18% with 8% nitric acid. However, the particulate carbon and heterogeneous fibers were not removed from the prepared CNFs by thermal oxidation in air and carbon dioxide. This result can be explained by that the direction of graphene sheet in CNFs is vertical to the fiber axis and the CNFs are oxidized at about the similar rate with the impurity carbon.

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Multi- effect air gap membrane distillation process for pesticide wastewater treatment

  • Pangarkar, Bhausaheb L.;Deshmukh, Samir K.;Thorat, Prashant V.
    • Membrane and Water Treatment
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    • 제8권6호
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    • pp.529-541
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    • 2017
  • A multi-effect air gap membrane distillation (ME-AGMD) module for pesticide wastewater treatment is studied with internal heat recovery, sensible heat of brine recovery, number of stages and the use of fresh feed as cooling water in a single module is implemented in this study. A flat sheet polytetrafluroethylene (PTFE) membrane was used in the 4-stage ME-AGMD module. The maximum value of permeate flux could reach $38.62L/m^2h$ at feed -coolant water temperature difference about $52^{\circ}C$. The performance parameter of the module like, specific energy consumption and gain output ratio (GOR) was investigated for the module with and without heat recovery. Also, the module performance was characterized with respect to the separation efficiency of several important water quality parameters. The removal efficiency of the module was found to be >98.8% irrespective water quality parameters. During the experiment the membrane fouling was caused due to the deposition of the salt/crystal on the membrane surface. The membrane fouling was controlled by membrane module washing cycle 9 h and also by acidification of the feed water (pH=4) using 0.1M HCl solution.

Phase change properties of BN doped GeSbTe films

  • 장문형;박성진;박승종;정광식;조만호
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.226-226
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    • 2010
  • Boron Nitride (BN) doped GeSbTe films were grown by the ion beam sputtering deposition (IBSD). The in-situ sheet resistance data and the x-ray diffraction patterns showed the crystallization is suppressed due to the BN incorporation. The phase change speed in BN doped GeSbTe films were investigated using the static tester equipped with nanosecond pulsed laser. The phase change speed for BN doped GST films become faster than the corresponding values for an undoped GST film. The Johnson-Mehl-Avrami(JMA) plot and Avrami coefficient for laser crystallization showed that the change in growth mode during the laser crystallization is a most important factor for the phase change speed in the BN doped GST films. The JMA results and the atomic force microscopy (AFM) images indicate that the origin of the change in the crystalline growth mode is due to an increase in the number of initial nucleation sites which is produced by the incorporated BN. In addition, the retension properties for the laser writing/erasing are remarkably improved in BN doped GeSbTe films owing to the stability of the incorporated BN.

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Control the Work Function and Plasmon Effect on Graphene Surface Using Metal Nanoparticles for High Performance Optoelectronics

  • Park, Si Jin;Kang, Seong Jun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.166.1-166.1
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    • 2014
  • We have controlled the graphene surface in two ways to improve the device performance of optoelectronics based on graphene transparent conductive films. We controlled multilayer graphene (MLG) work function and localized surface plasmon resonance wavelength using a silver nanoparticles formed on graphene surface. Graphene substrates were prepared using a chemical vapor deposition and transfer process. Various size of silver nanoparticles were prepared using a thermal evaporator and post annealing process on graphene surface. Silver nanoparticles were confirmed by using scanning electron microscopy (SEM). Work functions of graphene surface with various sizes of Ag nanoparticles were measured using ultraviolet photoelectron spectroscopy (UPS). The result shows that the work functions of MLG could be controlled from 4.39 eV to 4.55 eV by coating different amounts of silver nanoparticles while minimal changes in the sheet resistance and transmittance. Also the Localized surface plasmon resonance (LSPR) wavelength was investigated according to various sizes of silver nanoparticles. LSPR wavelength was measured using the absorbance spectrum, and we confirmed that the resonance wavelength could be controlled from 396nm to 425nm according to the size of silver nanoparticles on graphene surface. To confirm improvement of the device performance, we fabricated the organic solar cell based on MLG electrode. The results show that the work function and plasmon resonance wavelength could be controlled to improve the performance of optoelectronics device.

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RTP를 사용한 타이타늄 실리사이드 형성의 공정 조절 (Process Control of Titanium Silicide Formation Using RTP)

  • 이용재
    • 한국통신학회논문지
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    • 제15권5호
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    • pp.399-405
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    • 1990
  • 急速 熱處理 공정을 高融點 타이타늄 실리사이드 형성을 위한 反應率의 연구와 정확한 形成 調節에 이용하였다. 試料는 n형 실리콘과 다결정 웨이퍼이며, 타이타늄을 스퍼터로 증착시켰다. 工程은 질소와 아르곤 가스 분위기 下에 실리사이드 형성을 정확하게 조절하기 위해 急速 時間 溫度 분포의 行列로 수행하였다. 반응된 박막은 面抵抗 측정과 전자현미경 사진, 自動分 抛抵抗 측정, X-선 回折 등으로 分析하였다. 結果는 실리사이드의 抵抗度는 20$\mu$$\Omega$-cm이하 이고, 박막 두께는 타이타늄 燕着 의 두께보다 약 2배로 나타났다. 실리사이드 形成 분위기는 아르곤과 窒素가 同一한 溫度 時間 조건에서 形成되었다.

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전기화학적 전착에 의한 태양전지용 저가 유연 금속 메쉬 제작 (Preparation of Low-cost and Flexible Metal Mesh Electrode Used in the Hybrid Solar Cell by Simple Electrochemical Depositon)

  • 이주열;이상열;이주영;김만
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.123.1-123.1
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    • 2017
  • Hybrid solar cells have intensively studied in recent years due to their advantages such as cost effectiveness and possibility of applications in flexible and transparent devices. It is critical to fabricate individual layer composed of organic and inorganic materials in the hybrid solar cell at low cost. Therefore, it is required to manufacture cheaply and enhance the photon-to-electricity conversion efficiency of each layer in the flexible solar cell industry. In this research, we fabricated pure Cu metal mesh electrode prepared by using electroplating and/or electroless plating on the Ni mold which was manufacture through photolithography, electroforming, and polishing process. Copper mesh was formed on the surface of nickel metal working master when pulsed electrolytic copper deposition were performed at various plating parameters such as plating time, current density, and so on. After electrodeposition at 2ASD for 5~30seconds, the line/pitch/thickness of copper mesh sheet was $1.8{\sim}2.0/298/0.5{\mu}m$.

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Volcaniclastic Sedimentation of the Sejong Formation (Late Paleocene-Eocene), Barton Peninsula, King George Island, Antarctica

  • Yoo, Chan-Min;Choe, Moon-Young;Jo, Hyung-Rae;Kim, Yae-Dong;Kim, Ki-Hyune
    • Ocean and Polar Research
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    • 제23권2호
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    • pp.97-107
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    • 2001
  • The Sejong Formation of Late Paleocene to Eocene is a lower volcaniclastic sequence unconformably overlain by upper volcanic sequence, and distributed along the southern and southeastern cliffs of the Barton Peninsula. The Sejong Formation is divided into five sedimentary facies; disorganized matrix-supported conglomerate (Facies A), disorganized clast-supported conglomerate (Facies B), stratified clast-supported conglomerate (Facies C), thin-bedded sandstone (Facies D), and lapilli tuff (Facies E), based on sedimentary textures, primary sedimentary structures and bed geometries. Individual sedimentary facies is characterized by distinct sedimentary process such as gravel-bearing mudflows or muddy debris flows (Facies A), cohesionless debris flows (Facies B),unconfined or poorly confined hyperconcentrated flood flows and sheet floods (Facies C), subordinate streamflows (Facies D), and pyroclastic flows (Facies E). Deposition of the Sejong Formation was closely related to volcanic activity which occurred around the sedimentary basin. Four different phases of sediment filling were identified from constituting sedimentary facies. Thick conglomerate and sandstone were deposited during inter-eruptive phases (stages 1, 3 and 4), whereas lapilli tuff was formed by pyroclastic flows during active volcanism (stage 2). These records indicate that active volcanism occurred around the Barton Peninsula during Late Paleocene to Eocene.

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