• Journal of Power Electronics
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• v.4 no.4
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• pp.228-236
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• 2004

This paper describes the optimal current-control of a permanent magnet synchronous motor by the use of robust and simple current controllers, based upon the analytical procedure known as the inverse LQ (ILQ) design method. The ILQ design method is a strategy for finding the optimal gains based on pole assignment without solving the Riccati equation. It is very important to keep the motor in robust servo-lock. By experiments and simulations, we will show that the ILQ optimal servo-system with servo-lock is more insensitive at low speeds to variations in armature inductance than the standard PI servo-system. Variations in armature inductance have the greatest influence on the responses of a servo-system.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.8 no.8
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• pp.1685-1691
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• 2004

The objective of this study is aimed at reducing the contour error of AC Servo derives by improving the interpolation error of each axis through variable structure control system. The errors in machining process by AC Servo motor are due to many elements, such as the delay of the servo drivers, friction and the gain mismatch between x axis and y axis motors and so on. Sliding mode control system is applied to a AC servo drive as a numerical example in this paper. The experiment results which are compared with those of typical PI scheme show the validity of improvement in circular interpolation error of the system.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.45-56
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• 2002

A pneumatic servo system requiring a fine gap control in a photo-electric sensor which is used for a LCD array detection device is introduced. The gap controlled by the pneumatic servo system remains within around 50~80 ${\mu}{\textrm}{m}$, and the system possesses an effect to eliminate undesirable particles on the LCD plate by blowing air out. The air flow rate is initially controlled by a servo valve and expanded by a booster valve, thus the controlled air pressure contributes to maintaining an appropriate gap between the LCD plate and photo-electric sensor An air floating plate of two degrees of freedom is designed and fabricated, and a fine tilting motion control is also implemented by assigning different gap commands. The pressure control and direct gap control are proposed, and each performance is verified experimentally.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.253-261
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• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• 제어로봇시스템학회:학술대회논문집
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• 1989.10a
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• pp.276-281
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• 1989

Comparison 3-port servo system with 4-port is made to obtain optimal design for heavy and unidirectional hydraulic system, It is concluded that 3-port servo system it more adequate than 4-port for the heavy load system which is usually operated at lower frequencies. High performance electro-hydraulic position controller is designed using 3-port servo valve. It includes dynamic pressure feedback as a inner loop and position feedback as a outer loop.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.368-371
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• 1996

This paper describes a study on the developments of the high power brushless DC(BLDC) servo system for electric gun/turret drive system. The servo control unit including the DSP based digital servo unit, power amplifier, signal conditioning circuit, internal power circuit is designed and implemented for driving the 10hp BLDC servo system. The developed system is applied to the gun/turret drive & stabilization simulator system and the control performance is verfied through the experiments.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.2
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• pp.121-126
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• 2000

In the fast sampling limit the delta operator model tends to the analog system model. This fundamental property of the delta operator model unifies continuous and discrete time control system. In this paper we study robust linear optimal model following servo system in the presence of disturbances and parameter perturbations. A technique to directly design the generalized differential operator based unified control system that covers both differential operator based continuous time and delta operator based discrete time case is presented. The quadratic criterion function for a linear system is used to design the robust unified servo control system The characteristics of the proposed servo system are analysed and simulated to verify the robustness.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.48 no.6
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• pp.747-752
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• 1999

In the fast sampling limit, the delta operator model tends to the analog system model. This fundamental property of the delta operator model unifies continuous and discrete time control system. In this paper, we study robust linear optimal model following servo system in the presence of disturbances and parameter perturbations. A technique to directly design the generalized differential operator based unified control system that convers both differential operator based continuous time and delta operator based discrete time case is presented. The quadratic criterion function for a linear system is used to design the robust unified servo control. The characteristics of the proposed servo system are analysed and simulated to verify the robustness.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.4
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• pp.277-283
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• 2003

Recently, near-field recording (NFR) disk drive schemes have been proposed with a view to increasing recording densities of hard disk drives. Compared with hard disk drives. NFR disk drives have narrower track pitches and are exposed to more severe periodic disturbances resulting from eccentric rotation of the disk. It is difficult to meet servo system design specifications for NFR disk drives with conventional VCM actuators in that the servo system for an NFR disk drive generally requires a feater gain and higher bandwidth. To tackle the problem various dual-stage actuator systems composed of a microactuator mounted on top of a conventional VCM actuator have been proposed. This article deals with the problem of designing a tracking servo system far an NFR disk drive adopting a dual-stage actuator. We summarize design constraints pertaining to the dual-stage servo system and present a new servo scheme using iterative teaming control. We design feedback compensators and an iterative teaming controller for a target plant and verify the validity of the proposed control scheme through a computer simulation.