• 제목/요약/키워드: sensitive detection

검색결과 1,717건 처리시간 0.027초

가변 Threshold를 이용한 Wafer Align Mark 중점 검출 정밀도 향상 연구 (A Study on Improving the Accuracy of Wafer Align Mark Center Detection Using Variable Thresholds)

  • 김현규;이학준;박재현
    • 반도체디스플레이기술학회지
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    • 제22권4호
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    • pp.108-112
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    • 2023
  • Precision manufacturing technology is rapidly developing due to the extreme miniaturization of semiconductor processes to comply with Moore's Law. Accurate and precise alignment, which is one of the key elements of the semiconductor pre-process and post-process, is very important in the semiconductor process. The center detection of wafer align marks plays a key role in improving yield by reducing defects and research on accurate detection methods for this is necessary. Methods for accurate alignment using traditional image sensors can cause problems due to changes in image brightness and noise. To solve this problem, engineers must go directly into the line and perform maintenance work. This paper emphasizes that the development of AI technology can provide innovative solutions in the semiconductor process as high-resolution image and image processing technology also develops. This study proposes a new wafer center detection method through variable thresholding. And this study introduces a method for detecting the center that is less sensitive to the brightness of LEDs by utilizing a high-performance object detection model such as YOLOv8 without relying on existing algorithms. Through this, we aim to enable precise wafer focus detection using artificial intelligence.

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화약물질 현장검출시약 EXPRAY$^{(R)}$를 이용한 토양내 화약물질 스크리닝 및 준정량화 가능성 (Screening and Possibility of Semi-quantitative Analysis of Explosive Compounds in Soil Using EXPRAY$^{(R)}$ Explosives Field Detection Kit)

  • 배범한;조정현
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제14권2호
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    • pp.45-53
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    • 2009
  • 환경 시료 (토양 및 수질)내 화약물질을 신속하고 간편하게 검출할 수 있다면, 현장조사에서 오염도 조사를 위한 스키리닝 단계로 이용하여 불필요한 시료의 갯수와 고가의 실험실 정량분석비용을 줄일 수 있다. 상용 EXPRAY$^{(R)}$ Explosives Field Detection Kit(EXPRAY)를 이용하여 14종의 화약물질을 대상으로 화약물질 표준용액에 대한 최저검출농도를 결정 하고 및 준정량화 가능성을 확인하기 위한 실험을 실시하였다. 실험결과 EXPRAY는 14종의 화약물질 중에서, TNT, RDX, HMX, Tetryl및 TNB등 5종의 화약물질을 검출할 수 있었다. Nitramine계열인 HMX와 RDX에 대한 최저검출농도는 모두 14ng/mm$^2$이었다 EXPRAY는 nitroaromatic계열에는 더욱 민감하게 반응하여, Tetryl, TNB및 TNT에 대한 단위면적당(mm$^2$)최저 검출량이 각각 3ng, 3ng및 0.3ng이었다. 실험이 통제되는 조건에서 화약물질 표준용액에 EXPRAY를 적용하였을 경우에는 발색 강도의 비교를 통해 10배 단위의 준정량화가 가능하였다. 그러나 오염토양으로 실험한 경우에는 화약물질의 존재여부 및 종류만을 확인할 수 있었다. EXPRAY Explosives Detection Kit$^{(R)}$가 화약물질을 검출할 수 있는 경제적이고 민감한 방법이지만, 현장시료의 스크리닝 단계에만 적용할 수 있는 방법이다.

돼지 생식기호흡기증후군 바이러스항체 검색에 있어 간접형광항체법(IFA) 과 효소면역법(ELISA)의 진단효율 비교 (Comparison between indirect immunofluorescent antibody (IFA) test and enzyme-linked immunosorbent assay (ELISA) for the detection of antibody to porcine reproductive and respiratory syndrome virus(PRRSV))

  • 박최규;류영수;이창희;정종욱
    • 대한수의학회지
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    • 제38권2호
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    • pp.314-318
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    • 1998
  • An establishment of effective control measures to PRRSV infection in swine industry depends on a sensitive and specific diagnosis to detect either viral antigen and/or antibodies to PRRSV. Several diagnostic methods are available to detect antibodies against PRRSV, including IPMA, IFA and ELISA tests have been successfully developed. Sensitivity of the indirect immunofluorescent assay in MA-104 cells using Korean field isolate PL96-1 was superior to that of VR-2332 and field isolate PL96-2. Sensitivity and specificity of the IFA test with PL96-1 were comparable to those of commercial ELISA test kit but ELISA test was more sensitive for the detection of declining antibodies to PRRSV in finishing pigs. In this study we concluded that IFA and ELISA test could be utilized to detect antibodies to PRRSV and the results generated from these two tests were comparable and there were no significant difference between these two tests.

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감온 페라이트를 이용한 비접촉 온도측정시스템의 감도특성 (Sensitivity of non-contact Temperature Measurement Using Temperature Sensitive Ferrite)

  • 신광호;김영학
    • 한국자기학회지
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    • 제14권1호
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    • pp.1-6
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    • 2004
  • 비접촉 온도측정 시스템을 구현하기 위하여 감온페라이트를 이용하여 제작한 인던턴스소자와 캐피시터를 접속하여 LC공진형 센서를 구성하고, 비접촉 온도계측성능에 대하여 조사하였고, 송수신기 사이의 거리에 대한 측정감도에 대하여 검토하였다. 감온 페라이트가 가지는 투자율의 온도의존성에 의해서 제작한 센서의 인덕턴스와 공진주파수가 변화함을 알 수 있었고, 공진주파수의 변화를 비접촉으로 검출함으로써 비접촉으로 온도를 검출할 수 있음을 알 수 있었다. 또한 비접촉 측정 감도는 송 $.$수신기 사이 거리의 6승에 비례하는 감소하는 것을 알 수 있었다.

압전센서를 이용하는 철로에서의 손상 검색 기술 (Damage Detection of Railroad Tracks Using Piezoelectric Sensors)

  • 윤정방;박승희;다니엘 인만
    • 한국전산구조공학회:학술대회논문집
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    • 한국전산구조공학회 2006년도 정기 학술대회 논문집
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    • pp.240-247
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    • 2006
  • Piezoelectric sensor-based health monitoring technique using a two-step support vector machine (SYM) classifier is discussed for damage identification of a railroad track. An active sensing system composed of two PZT patches was investigated in conjunction with both impedance and guided wave propagation methods to detect two kinds of damage of the railroad track (one is a hole damage of 0.5cm in diameter at web section and the other is a transverse cut damage of 7.5cm in length and 0.5cm in depth at head section). Two damage-sensitive features were extracted one by one from each method; a) feature I: root mean square deviations (RMSD) of impedance signatures and b) feature II: wavelet coefficients for $A_0$ mode of guided waves. By defining damage indices from those damage-sensitive features, a two-dimensional damage feature (2-D DF) space was made. In order to minimize a false-positive indication of the current active sensing system, a two-step SYM classifier was applied to the 2-D DF space. As a result, optimal separable hyper-planes were successfully established by the two-step SYM classifier: Damage detection was accomplished by the first step-SYM, and damage classification was also carried out by the second step-SYM. Finally, the applicability of the proposed two-step SYM classifier has been verified by thirty test patterns.

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TCP와 UDP 플로우 간의 공정성 개선을 위한 새로운 큐 관리 알고리즘 (A New Queue Management Algorithm for Improving Fairness between TCP and UDP Flows)

  • 채현석;최명렬
    • 정보처리학회논문지C
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    • 제11C권1호
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    • pp.89-98
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    • 2004
  • 인터넷의 혼잡상황을 해결하기 위하여 제안된 RED(Random Early Detection)와 같은 능동적 큐 관리(Active Queue Management) 알고리즘들은 TCP 데이터에 대하여 우수한 혼잡제어 효과를 나타낸다. 그러나 TCP와 UDP가 병목 링크를 공유하는 경우 불공정성 문제와 큐에서의 지연시간이 길어지는 문제점을 가지고 있다. 본 논문에서는 공정성을 개선함과 동시에 큐 지연시간을 감소할 수 있는 새로운 큐 관리 알고리즘인 PSRED(Protocol Sensitive RED) 알고리즘을 제안하였다. PSRED 알고리즘은 트래픽의 프로토콜 필드를 이용하여 플로우의 종류를 구분하고 각기 다른 패킷폐기함수를 적용함으로써 공정성을 개선하고 평균 큐 길이를 줄일 수 있다.

자기진단 CPGFRP의 파괴예측기능 평가를 위한 콘크리트 적용실험 (Evaluation of Fracture Detection Function for the Concrete by Self-Diagnosis CPGFRP)

  • 최현수;박진섭;정민수;강병희
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2003년도 학술.기술논문 발표회
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    • pp.27-31
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    • 2003
  • To maintain serviceability of concrete structure more than proper it is necessary not only predict service life through periodical monitor but also need monitoring system to recognize optimal time and method for repair. Recently, CPGFRP, replacing some GFRP with CF, is developed and used for monitoring concrete fraction. But dramatic resistance change of CPGFRP is showed below 0.5% strain and it is not small strain in terms of monitoring micro crack in concrete. In other word, monitoring with CF is not suitable in low stress hut hight stress. In this study, we accessed applicable possibility and reliability of CPGFRP composite as monitoring sense that is proved very sensitive to stress through domestic and oversea previous study. CPGFRP composite plays a role in specimen like steel and increases flexural strength. CPGFRP composite shows resistance increasement in micro crack. In particular, CPUFRP is more sensitive than strangage in low stress. Resistance change ratio curve is very similar to strain curve so sensitivity and reliability is very excellent to monitor concrete fracture.

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돼지분변에서 PCR에 의한 Lawsonia intracellularis 검색 (Detection of Lawsonia intracellularis in swine feces by polymerase chain reaction)

  • 장성준;김정화;김영태;김기향;김중규;김영욱;최일영
    • 한국동물위생학회지
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    • 제24권1호
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    • pp.43-50
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    • 2001
  • Swine proliferative enteritis(SPE) caused by inかsoma intracellularis is a common enteric disaese of grower and finisher pig. Swine affected with SPE show variable clinical signs including diarrhea, weight loss, aberrant growth and death. The characteristic lesion of ileitis at necropsy is marked thickening of the last section of the small intestine. The inner lining of the thickened intestine proliferates almost like a cancer and curved rod bacteria(L intracellularis) are always seen inside the intestinal wall. Infected swine shed the organism in the feces. Isolation and growth of pure L intracellularis in vitro requires a suitable cell culture. This procedure is difficult and not a practical means of diagnosis, thus the polymerase chain reaction(PCR) test of feces can be used to determine whether a pig is shedding the infective organism. A sensitive assay based on amplification of a 319bp DffA fragment of the L intracellularis of Swine proliferative enteritis was attempted for the detection of the organism in the 62 feces of swine. L intracellularis was identified on three herds and detected in 6 fecal samples, representing a infection rate of 9.7%. The PCR was very sensitive and specific on the individual level. The PCR technique could be very useful for the diagnosis of this disease.

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Easy Detection of Amyloid β-Protein Using Photo-Sensitive Field Effect

  • Kim, Kwan-Soo;Ju, Jong-Il;Song, Ki-Bong
    • 센서학회지
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    • 제21권5호
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    • pp.339-344
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    • 2012
  • This article describes a novel method for the detection of amyloid-${\beta}$($A{\beta}$) peptide that utilizes a photo-sensitive field-effect transistor (p-FET). According to a recent study, $A{\beta}$ protein has been known to play a central role in the pathogenesis of Alzheimer's disease (AD). Accordingly, we investigated the variation of photo current generated from p-FET with and without intracellular magnetic beads conjugated with $A{\beta}$ peptides, which are placed on the p-FET sensing areas. The decrease of photo current was observed due to the presence of the magnetic beads on the channel region. Moreover, a similar characteristic was shown when the Raw 264 cells take in magnetic beads treated with $A{\beta}$ peptide. This means that it is possible to simply detect a certain protein using magnetic beads and a p-FET device. Therefore, in this paper, we suggest that our method could detect tiny amounts of $A{\beta}$ for early diagnosis of AD using the p-FET devices.

자기진단 CPGFRP의 파괴예측기능 평가를 위한 콘크리트 적용실험 (Evaluation of Fracture Detection Function for the Concrete by Self-Diagnosis CPGFRP)

  • 최현수;박진섭;정민수;강병희
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2003년도 학술.기술논문발표회
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    • pp.27-31
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    • 2003
  • To maintain serviceability of concrete structure more than proper it is necessary not only predict service life through periodical monitor but also need monitoring system to recognize optimal time and method for repair. Recently, CPGFRP, replacing some GFRP with CF, is developed and used for monitoring concrete fraction. But dramatic resistance change of CPGFRP is showed below 0.5% strain and it is not small strain in terms of monitoring micro crack in concrete. In other word, monitoring with CF is not suitable in low stress but hight stress. In this study, we accessed applicable possibility and reliability of CPGFRP composite as monitoring sense that is proved very sensitive to stress through domestic and oversea previous study. CPGFRP composite plays a role in specimen like steel and increases flexural strength. CPGFRP composite shows resistance increasement in micro crack. In particular, CPGFRP is more sensitive than strangage in low stress. Resistance change ratio curve is very similar to strain curve so sensitivity and reliability is very excellent to monitor concrete fracture.

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