• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.453-455
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• 2004

The effect of rapid thermal annealing (RTA) treatment on the growth characteristics of CNTs was investigated. We observed that Ni catalyst film was agglomerated by RTA treatment, resulting in the formation of Ni nanoparticles. The well aligned CNTs were grown from the Ni nanoparticles by plasma enhanced chemical vapor deposition (PECVD). It is shown that the size and distribution of the nanoparticles depend mainly on the annealing temperature and initial thickness of the metal layer. Also, it was found that CNTs grown through optimal RTA treatment had the more improved field emission characteristics than those of as-grown CNTs.

• Journal of Powder Materials
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• v.27 no.2
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• pp.154-163
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• 2020

Fluorescent nanoparticles are characterized by their unique properties such as luminescence, optical transparency, and sensitivity to various chemical environments. For example, semiconductor nanocrystals (quantum dots), which are nanophosphors doped with transition metal or rare earth ions, can be classified as fluorescent nanoparticles. Tuning their optical and physico-chemical properties can be carried out by considering and taking advantage of nanoscale effects. For instance, quantum confinement causes a much higher fluorescence with nanoparticles than with their bulk counterparts. Recently, various types of fluorescent nanoparticles have been synthesized to extend their applications to other fields. In this study, State-of-the-art fluorescent nanoparticles are reviewed with emphasis on their analytical and anti-counterfeiting applications and synthesis processes. Moreover, the fundamental principles behind the exceptional properties of fluorescent nanoparticles are discussed.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.128-131
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• 2007

As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using scanning mobility particle sizer (SMPS) and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.421.1-421.1
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• 2014

Top-down processes based on photolithography technology have been developed by using light sources with short wavelength, however, the processes are expected to meet their limits in higher integration of semiconductor integrated circuits. To overcome the limits, researches on bottom-up processes have been proceeded. One of those, fabrication of nanodevices by using nanoparticles has been on research. But it is difficult to align nanoparticles at appropriate positions. To resolve this, studies has been proceeded to form nanowires by bonding DNA molecules which have self-assembly property and positive-charged functionalized gold nanoparticles. There are negative-charged phosphates in backbones of DNA molecules. By using the attractive force between the negative charge of the phosphates and the positive charge of gold nanoparticles, the Au-DNA nanowires are made. However, bonding Au nanoparticles only on DNA molecules, not other nanoparticles, is to be solved. So we studied to resolve this problem. In the formation of Au nanoparticles, we changed the charge of Au nanoparticles by adding HCl to control pH of the functionalized nanoparticles, measured zeta potential. Then we bonded the nanoparticles and DNA molecules and made observation by using FE-SEM and AFM.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.21-29
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• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Journal of Industrial and Engineering Chemistry
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• v.67
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• pp.437-447
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• 2018

Visible-light-driven wide bandgap semiconductor photocatalysts were commonly developed via doping or coupling with another narrow bandgap metal oxide. However, these approaches required extra processing. The aim of study was to evaluate the photocatalytic performance of narrow bandgap $WO_x$ nanoparticles. A mixture of $WO_2$ and $WO_3$ nanoparticles were synthesized using solution precipitation technique. The photodegradation of RhB by these nanoparticles more effective in UV light than in visible light. In antibacterial susceptibility assay, $WO_x$ nanoparticles demonstrated good antibacterial against Gram-positive bacteria. The cell wall of bacterial was the main determinant in antibacterial effect other than $W^{4+}/W^{6+}$ ions and ROS.

• Journal of the Korean institute of surface engineering
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• v.49 no.4
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• pp.382-388
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• 2016

NiO nanoparticles were synthesized by hydrothermal method for the application to ethanol gas sensor. They were composited with $Co_3O_4$ nanoparticles to improve the sensitivity to ethanol gas. Scanning electron microscopy revealed that the synthesized NiO nanoparticles were plate-shaped with the approximate size and thickness of 60 - 120 nm and 20 nm, respectively. On the other hand, $Co_3O_4$ nanoparticles mixed with NiO was observed to be spherical with the size range of 30 - 50 nm. The sensitivities of NiO sensors composited with $Co_3O_4$ nanoparticles at an optimal ratio of 8 : 2 were enhanced to approximately 1.44 - 1.79 times as high as those of as-synthesized NiO sensors for the ethanol concentration of 10 - 200 ppm at $200^{\circ}C$. The mechanism of the improved ethanol gas sensing of the NiO sensors composited with $Co_3O_4$ nanoparticles was discussed.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.146-146
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• 2003

If rare earth ions could be activated by electrical means after introducing into an appropriate semiconductor host, it might be possible to achieve the electrically-driven optical amplifier. Futhermore, some groups report that rare earth doped semiconductor nanoparticls show the sensitized emission. In this study, we try to prepare the Er/PbS nanoparticles encaupsulated by phenyl modified silica shell via sol-gel process. Er/PbS nanoparticles were characterized by UV-vis absorption, XRD, FT-IR and TEM etc. Finally we will present the luminescence properties of Er doped PbS nanoencapsulation.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.202-203
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• 2009

Plasma etching was studied to obtain high-efficiency Si solar cells. SiN nanoparticles were observed upon the plasma treatment using SF6 gas. The mechanism of the nanoparticles formation has been studied. A net increase in the current density (Jsc) of the cells of $1.7mA/cm^2$ and in the conversion efficiency ($\eta$) of 2.1% is obtained after the plasma treatment for 10s, thanks to the significant decrease of reflection in the shorter wavelength range.