• Macromolecular Research
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• v.14 no.2
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• pp.205-208
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• 2006

A polymeric film of a biodegradable poly(1,5-dioxepan-2-one) (PDXO) was formed on a gold surface by a combination of the formation of self-assembled monolayers (SAMs) presenting hydroxyl groups and the surface-initiated, ring-opening polymerization (SI-ROP) of 1,5-dioxepan-2-one (DXO). The SI-ROP of DXO was achieved by heating a mixture of $Sn(Oct)_2$, DXO, and the SAM-coated substrate in anhydrous toluene at $55^{\circ}C$. The resulting PDXO film was quite uniform. The PDXO film was characterized by polarized infrared external reflectance spectroscopy, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, atomic force microscopy, ellipsometry, and contact angle goniometry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.384-384
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• 2010

The surface reaction characteristics of Zinc Oxide (ZnO) in $Cl_2/BCl_3$/Ar gas ratio using inductively coupled plasma system were investigated. It was found that ZnO etch rate shows a non-monotonic behavior with increasing both Ar fraction in $Cl_2/BCl_3$ plasma, RF power, and gas pressure. The maximum ZnO etch rate of 53 nm/min was obtained for $Cl_2$(3 sccm)/$BCl_3$(16 sccm) /Ar(4 sccm) gas mixture. The chemical state of etched surfaces was investigated with X-ray diffraction (XRD) and the etched surface was investigated to the rms by atomic force microscopy (AFM). From these data, the suggestions on the ZnO etch mechanism were made by secondary ion mass spectrometery (SIMS).

• Journal of the Korean Solar Energy Society
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• v.34 no.4
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• pp.39-44
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• 2014

The elemental composition of electro-deposited black Cr solar selective coatings before and after heating in air by using secondary ion mass spectrometry (SIMS) was investigated for optical property analysis. In addition, black Cr selective coating exposed by solar radiation for 5 months was compared with heated sample. SIMS investigation shows that $OH^+$ bearing ions were related to a near surface region of CrOH and CrO compound. The optical degradation of this coating after heating at $500^{\circ}C$ reveals that diffusion of the Cu and Ni elements in substrate material, the chemical interactions adjacent to the interface, and the interface width broadening.

• ETRI Journal
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• v.11 no.4
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• pp.75-83
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• 1989

The diffusion mechanism of Si in GaAs was investigated using different diffusion sources based on the Si-Ga-As ternary phase equilibria. The Si profiles are measured with secondary ion mass spectrometry and differ significantly for sources taken from the different phase fields in the ternary phase diagram. Neutral As vacancy diffusion is proposed for acceptor Si diffusion anneals using a Ga - Si - GaAs source. Donor Si diffusion using As - rich sources and a Si -GaAs tie line source shows concentration dependent diffusion behavior. Concentration dependent diffusion coefficients of donor Si for As - rich source diffusion were found to be related to net ionized donor concentration and showed three regimes of different behavior: saturation regime, intermediate regime,and intrinsic regime. Ga vacancies are proposed to be responsible for donor Si diffusionin GaAs: $Si_Ga^+V_Ga^-$ (donor Si -acceptor Gavacancy) complex for the extrinsic regime and neutral $V_G$a, for the intrinsic regime.The Si - GaAs tie line source resulted in two branch profiles, intermediate between the As - rich and the Ga - rich source diffusion cases.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1589-1595
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• 2000

레이저 텍스쳐와 미케니칼 텍스쳐 컴퓨터 하드디스크의 마찰과 마코 매카니즘이 Contact Start/Stop test 실행후의 특성들에 대해 연구되었다. 다양한 분석적이고 기계적인 테스트 기술들이 이용되었다. 형상, 조도, 화학적 조성, 기계적 성질, CSS 로부터 기인된 코팅의 마찰특성들에 대해 그 변화들을 조사하였다. 즉, AFM(Atomic Force Microscopy), Nano-Indentation, Nano-Scratch, TOF-SIMS(Time of Flight Secondary Ion Mass Spectroscopy), AES(Auger Electronic Spectroscopy)등이 이 연구에 적용되었다. 레이저 텍스쳐 범프의 표면조도와 미케니칼 텍스쳐 지역의 표면조도는 각각 대략적으로 4nm 와 7nm 감소되었다. 탄성계수와 경도값은 CSS test후에 증가하였고 가장 바깥쪽의 코팅층의 변형강화가 생겨났다. 자성층과 Ni-P 층 사이에 점착성의 문제가 확인되었다. TOF-SIMS 분석은 C 와 $C_2F_5$의 세기에 있어서 감소를 드러냈고 이것은 코팅 표면에 윤활제 요소의 마모를 확실시 할수 있는 결과로 나타났다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.81-81
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• 1999

고에너지 이온 주입에 의해 형성되는 결함의 거동을 DLTS(deep level transient spectroscopy)를 통해 조사하였다. 이온 주입에 이용된 기판들은 서로 다른 산소 농도를 가지고 있었으며, B 이온의 주입 농도는 각각 5X10E13 ~ 4X10E14으로 주입 에너지는 1.5MeV였다. 이온 주입에 의해 형성된 buried layer 내의 boron의 농도는 SIMS(secondary ion mass spectroscopy)를 이용하여 측정하였으며, 열처리에 따른 이차 결함의 생성은 TEM(transmission electron microscopy) 및 BMD(bulk micro defect)를 조사함으로써 알 수 있었다. 이온 주입에 의해 형성된 일차 결함의 제거 및 silicon 내부에서의 금속 gettering을 위하여 furnace 및 RTA (rapid thermal annealing)를 이용한 열처리를 행하였다. 이온주입 초기 상태 및 산소의 농도 또는 이온주입의 농도에 따른 결함을 살펴보기 위하여 DLTS를 이용하였으며, 또한 열처리에 따른 이러한 초기 결함들의 거동을 조사하여 TEM 및 BMD 결과와 비교, 분석하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.373-379
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• 2013

Mg-doped zinc tin oxide (ZTO:Mg) thin films were prepared on glasses by rf magnetron sputtering. $O_2$ was introduced into the chamber during the sputtering. The optical properties of the films as a function of oxygen flow rate were studied. The crystal structure, elementary properties, and depth profiles of the films were investigated by X-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and secondary ion mass spectrometry (SIMS), respectively. Bottom-gate transparent thin film transistors were fabricated on $N^+$ Si wafers, and the variation of mobility, threshold voltage etc. with the oxygen flow rate were observed.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.212-212
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• 2014

이트리아 안정화 지그코니아(Yttria-stabilized zirconia, YSZ)는 이트리아의 첨가에 의해 지르코니아에 생성된 산소 빈자리(oxygen vacancy)로 $O^{2-}$ 이온이 전도성을 가지게 되는 특징이 알려지면서 최근 고체산화물 연료전지연구에서 많은 관심을 받고 있다.[1] YSZ를 기반으로한 고체산화물 연료전지의 특성을 개선하기 위해서는 YSZ 내에서의 산소교환 메카니즘을 이해하는 것이 매우 중요하다. 본 연구에서는 $^{18}O2$ 추적 기체(tracer gas) 이용하여 확산된 YSZ박막에서의 산소 확산 거동을 초미세이차이온질량분석기(Nano Secondary Ion Mass Spectrometry, Nano SIMS)를 이용하여 조사하였다. Nano SIMS는 작은 입사 이온빔의 크기를 구현할 수 있고, 다중검출기를 이용하여 높은 질량분해능으로 간섭없이 산소동위원소를 동시에 모두 검출할 수 있는 장점이 있다. 본 발표에서는 Nano SIMS를 이용한 YSZ박막에서의 산소 거동 평가 결과를 상세하게 보일 것이다.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2005.05a
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• pp.50-57
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• 2005

Although the bulk composition of materials is one of the major considerations in extractive metallurgy and environmental science, surface composition and topography (edges and dislocations are preferred sites for physicochemical reactions) control surface reactivity, and consequently play a major role in determining metallurgical phenomena and pollution by heavy metals and organics. An understanding of interaction mechanisms of different chemical species with the mineral surface in an aqueous media is very important in natural environment and metallurgical processing. X-ray photoelectron spectroscopy (XPS) has been used as an ex-situ analytical technique, but the material to be analyzed can be any size from $100{\mu}m$ up to about 1 cm. It can also measure mixed solids powders, but it is impossible to ascertain the original source of resulting x-ray signals where they were emitted from, since it radiates and scans the macro sample surface area.

• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.35-40
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• 2015

Electrospinning method has easy preparation of nanofibers with a simple and versatile technique. Electrospun nanofiber is widely used by the simple approach and have great potentials in the numerous applicaitons of medicine, photonics, catalysts, sensors, etc. including advantage of their specific characteristics such as large surface to volume ratio. This paper focused on the fabrication of cobalt electrospun nanofibrer for applications such as electronic, optical and mechanical devices by metal based material. We fabricated cobalt nanofibers on aluminum foil by an electrospinning method. The electrospinning process was performed at a high voltage, 8 kV. The distance between the needle tip and the solution surface in the bath was 5 cm. The PVB - cobalt based nitrate solution was filled in a 10 mL syringe connected to a 22 gauge needle. We confirmed electrospun cobalt nanofiber after annealing process by SIMS (Secondary Ion Mass Spectrometry) analysis. The concept design, fabrication and results of mapping measurements are reported.