• Journal of Institute of Control, Robotics and Systems
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• v.21 no.9
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• pp.875-880
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• 2015

Traditional semiconductor process control has been performed through statistical process control techniques in a constant process-recipe conditions. However, the complexity of the interior of the etching apparatus plasma physics, quantitative modeling of process conditions due to the many difficult features constraints apply simple SISO control scheme. The introduction of the Advanced Process Control (APC) as a way to overcome the limits has been using the APC process control methodology run-to-run, wafer-to-wafer, or the yield of the semiconductor manufacturing process to the real-time process control, performance, it is possible to improve production. In addition, it is possible to establish a hierarchical structure of the process control made by the process control unit and associated algorithms and etching apparatus, the process unit, the overall process. In this study, the research focused on the methodology and monitoring improvements in performance needed to consider the process management of future developments in the semiconductor manufacturing process in accordance with the age of the APC analysis in real applications of the semiconductor manufacturing process and process fault diagnosis and control techniques in progress.

• Journal of The Korean Association For Science Education
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• v.40 no.5
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• pp.463-471
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• 2020

The purpose of this study is to analyze application status about the process-centered assessment in elementary school science classes. For this purpose, a survey was conducted with 133 teachers and 2,089 students in elementary schools, and in-depth interviews with eight teachers were conducted. Elementary school teachers had a positive attitude toward the adoption of the process-centered assessment of 2015 revised science curriculum. After applying 2015 revised science curriculum, teachers used more performance assessments and less traditional ones in science classes. Elementary school students recognized that they receive feedbacks from their teachers more often with the implementation of the 2015 revised science curriculum. Through in-depth interviews, it was possible to confirm the difficulty of applying the process-centered assessment of elementary school teachers, such as lack of understanding of process-centered assessment and lack of time for its application. Based on the results of the study, the necessity for improving teacher understanding of process-centered assessment and the need to disseminate process-centered assessment materials are suggested.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.79-80
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• 2007

Copper has been used as an interconnect material in the fabrication of semiconductor devices, because of its higher electrical conductivity and superior electro-migration resistance. Chemical mechanical polishing (CMP) technique is required to planarize the overburden Cu film in an interconnect process. Various problems such as dishing, erosion, and delamination are caused by the high pressure and chemical effects in the Cu CMP process. But these problems have to be solved for the fabrication of the next generation semiconductor devices. Therefore, new process which is electro-chemical mechanical planarization/polishing (ECMP) or electro-chemical mechanical planarization was introduced to solve the. technical difficulties and problems in CMP process. In the ECMP process, Cu ions are dissolved electrochemically by the applying an anodic potential energy on the Cu surface in an electrolyte. And then, Cu complex layer are mechanically removed by the mechanical effects between pad and abrasive. This paper focuses on the manufacturing of ECMP system and its process. ECMP equipment which has better performance and stability was manufactured for the planarization process.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.34 no.1
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• pp.60-66
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• 2011

This study looks at a company which introduced SAP program, one type of ERP systems, and how the firm copes with the problems which happen in business process. The research tried to solve the problem by IDEAL method of process software improvement methodology. As a result, receipt account program for credit sales could be developed; the program was applied to the actual business work and operated.

• Journal of the Korean School Mathematics Society
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• v.17 no.4
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• pp.697-716
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• 2014

The purpose of this paper is to investigate high school students' learning characteristics which revealed in their learning process of limit using GeoGebra. And we are going to analyze effects of teaching of limit using GeoGebra to high school students' interesting and attitudes for mathematics learning. To do this, we selected three high school students as participants and ask them performing limit learning using GeoGebra. We recorded their problem solving process. Through analyzing their problem solving process relate to their solution, we found the followings: First, students did not logically approach based on mathematical properties or given materials, rather showing tendency decide with self-conscious and intuition. Second, it is possible that former reasoning strategies disturb following reasoning in the process of high school students' mathematics learning. Third, learning process of limit using GeoGebra help high school students to identify and correct their errors relate to limit learning. Forth, learning process of limit using GeoGebra positively effects to high school students' interesting and attitudes for mathematics learning.

• JSTS:Journal of Semiconductor Technology and Science
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• v.15 no.5
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• pp.563-569
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• 2015

For some low-frequency applications such as power-related circuits, NEM relays have been known to show better performance than MOSFETs. For example, in a step-down charge pump circuit, the NEM relays showed much smaller layout area and better energy efficiency than MOSFETs. However, severe process variations of NEM relays hinder them from being widely used in various low-frequency applications. To mitigate the process-variation problems of NEM relays, in this paper, a new NEM-relay charge pump circuit with the self-adjustment is proposed. By self-adjusting a pulse amplitude voltage according to process variations, the power consumption can be saved by 4.6%, compared to the conventional scheme without the self-adjustment. This power saving can also be helpful in improving the power efficiency of the proposed scheme. From the circuit simulation of NEM-relay charge pump circuit, the efficiency of the proposed scheme is improved better by 4.1% than the conventional.

• Korean journal of food and cookery science
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• v.31 no.3
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• pp.360-369
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• 2015

The objective of this study was to develop remedies to improve sanitary quality of school meals. To analyze the usage of potentially hazardous foods, menus from 180 school foodservice establishments were collected through school websites. Statistical analyses were conducted using the SPSS package program (ver. 20.0). The results of this study are as follows: analysis of the foodservice production process revealed that the following were employed: heating process (70.5%), non-heating process (16.3%), and after-heating process (13.2%). In addition, the cooking methods used for side dishes were: stir-frying (22.1%), saengchae (21.3%), sukchae (15.2%), jorim (12.4%), deep-frying (10.2%), and grilling (9.5%). Overall, 64 menu items known to pose potential microbiological hazards were offered a total of 2,671 times. The usage frequency was high for bibimbap, pork-bulgogi, cucumber-saenchae, seasoned bean sprouts namul, seasoned spinach-namul, and korean cabbage-geotjeori. In conclusion, in order to increase the sanitary quality of school meals, menus or foods that contain microbiological hazards should prepared very carefully with respect to time and temperature management during food production. Also, school foodservice employees must possess proper food safety knowledge and techniques for applying the HACCP system to prevent foodborne illness.

• Journal of Information Technology Services
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• v.18 no.3
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• pp.143-154
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• 2019

The purpose of this study is to explore innovative adaptation of IT systems worldwide to support process-focus assessment. To this end, the study presents four cases from Australia, Singapore, the U.S.A., and Korea to inform educational policy and technology researchers and practitioners. Based on comparing the four chosen cases as benchmarks, the study concluded that IT systems and technologies can expedite and improve school interventions to enhance student learning in terms of time and quality. Also, educational big data and learning analytics can be used to systematically monitor and communicate individual student's progress among school stakeholders (i.e., teachers, students, parents, and administrators). Lastly, the study made some suggestions to support process-focused assessment in schools as following : 1) A more evidence-based, systems approach is needed to integrate the curriculum, instruction, and assessment to bridge the gap between educational policy and school practice; 2) It is critical to create ICT-friendly school environments so that meaningful data could be collected, analyzed, and stored from individual students and school units; 3) Teacher professional development is another area that needs special considerations and support to successfully implement process-focused assessment in schools.

• Journal of Educational Research in Mathematics
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• v.22 no.3
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• pp.401-427
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• 2012

The recent Korean mathematics curriculum stresses to teach mathematics focusing on mathematical process composed of problem solving, reasoning and communication. To be successful in applying the rationale of the process-focused mathematics education, the assessment practice in classrooms should be also centered on mathematical process. In this study we conducted a large-scale survey on teachers' perspectives about the process-focused mathematics assessment. First, we surveyed teachers' opinion on current assessment practices in school mathematics related to regular school exams and performance assessments. Second, we investigated teachers' perception on mathematical process components such as problem solving, reasoning, and communication regarding how they should be assessed. Finally, we examined the difference of teachers' opinion according to their teaching experience, city size, and the type of school. Based on the results, we discussed implications for mathematics assessment and process-focused mathematical assessment.

• Journal of The Korean Digital Architecture Interior Association
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• v.12 no.4
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• pp.5-12
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• 2012

In this study, a digital design process by utilizing the program's database functionality in BIM, public education facilities master plan presented an alternative model to the layout of the design process. First of all, public education facilities master plan design process with digital design process and how to use the database of BIM in the process for review of the possibility of. Secondly, public educational facility planning the placement as needed for the switch to digital design limits, and the basic plan design at various elementary school planning alternatives in a school building and the school site is required to investigate. Thirdly, as a way of using the database features of GDL BIM lnn and teachers on how to create a variable by setting up a number of different alternatives so that you can choose the architect thought to have to organize and visualize the possibility of quick. A quantitative way the basic plan design that repeats some of the measures that can be used for digital design change as a process of continuous research is needed.