• Title/Summary/Keyword: scaling effects

Search Result 348, Processing Time 0.03 seconds

Investigation of Vanadium-based Thin Interlayer for Cu Diffusion Barrier

  • Han, Dong-Seok;Park, Jong-Wan;Mun, Dae-Yong;Park, Jae-Hyeong;Mun, Yeon-Geon;Kim, Ung-Seon;Sin, Sae-Yeong
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2011.05a
    • /
    • pp.41.2-41.2
    • /
    • 2011
  • Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

  • PDF

The Impact of Environmental Health Factors on Extreme-heat Vulnerability Assessment in a Metropolitan City (환경보건적 요소가 도시 내 폭염 취약성 평가 결과에 미치는 영향 분석)

  • Lee, Won-Jung;Kang, Jae-Eun;Kim, Yoo-Keun
    • Journal of Environmental Health Sciences
    • /
    • v.39 no.6
    • /
    • pp.492-504
    • /
    • 2013
  • Objectives: This analysis seeks to evaluate the impact of environmental health factors (EHF; e.g. hospital beds per capita, employees of medical institutions) on extreme-heat vulnerability assessment in Busan Metropolitan City during 2006-2010. Methods: According to the vulnerability concept suggested by the Intergovernmental Panel on Climate Change (IPCC), extreme-heat vulnerability is comprised of the categories of Exposure, Sensitivity, and Adaptive Capacity (including EHF). The indexes of the Exposure and Sensitivity categories indicate positive effects, while the Adaptive capacity index indicates a negative effect on extreme-heat vulnerability. Variables of each category were standardized by the re-scaling method, and then each regional relative vulnerability was computed with the vulnerability index calculation formula. Results: The extreme-heat vulnerability index (EVI) excepting EHF was much higher in urban areas than in suburban areas within the metropolitan area. When EHF was considered, the difference in the EVI between the two areas was reduced due to the increase of the Adaptive capacity index in urban areas. The low EVI in suburban areas was induced by a dominant effect of natural environmental factors (e.g. green area) within the Adaptive capacity category. Conclusions: To reduce the vulnerability to extreme heat in urban areas, which were more frequently exposed to extreme heat than others areas, public health and natural environments need to be improved in sensitive areas.

The effect of pretreating resorbable blast media titanium discs with an ultrasonic scaler or toothbrush on the bacterial removal efficiency of brushing

  • Koh, Minchul;Park, Jun-Beom;Jang, Yun-Ji;Ko, Youngkyung
    • Journal of Periodontal and Implant Science
    • /
    • v.43 no.6
    • /
    • pp.301-307
    • /
    • 2013
  • Purpose: This in vitro study was performed to assess the adherence of Porphyromonas gingivalis to a resorbable blast media (RBM) titanium surface pretreated with an ultrasonic scaler or toothbrush and to evaluate the effects of the treatment of the RBM titanium discs on the bacterial removal efficiency of brushing by crystal violet assay and scanning electron microscopy. Methods: RBM titanium discs were pretreated with one of several ultrasonic scaler tips or cleaned with a toothbrush. Then the titanium discs were incubated with P. gingivalis and the quantity of adherent bacteria was compared. The disc surfaces incubated with bacteria were brushed with a toothbrush with dentifrice. Bacteria remaining on the disc surfaces were quantified. Results: A change in morphology of the surface of the RBM titanium discs after different treatments was noted. There were no significant differences in the adherence of bacteria on the pretreated discs according to the treatment modality. Pretreatment with various instruments did not produce significant differences in the bacterial removal efficiency of brushing with dentifrice. Conclusions: Within the limits of this study, various types of mechanical instrumentation were shown to cause mechanical changes on the RBM titanium surface but did not show a significant influence on the adherence of bacteria and removal efficiency of brushing.

Through-Silicon-Via Filling Process Using Cu Electrodeposition (구리 전해 도금을 이용한 실리콘 관통 비아 채움 공정)

  • Kim, Hoe Chul;Kim, Jae Jeong
    • Korean Chemical Engineering Research
    • /
    • v.54 no.6
    • /
    • pp.723-733
    • /
    • 2016
  • Intensive researches have been focused on the 3-dimensional packaging technology using through silicon via (TSV) to overcome the limitation in Cu interconnection scaling. Void-free filling of TSV by the Cu electrodeposition is required for the fabrication of reliable electronic devices. It is generally known that sufficient inhibition on the top and the sidewall of TSV, accompanying the selective Cu deposition on the bottom, enables the void-free bottom-up filling. Organic additives contained in the electrolyte locally determine the deposition rate of Cu inside the TSV. Investigation on the additive chemistry is essential for understanding the filling mechanisms of TSV based on the effects of additives in the Cu electrodeposition process. In this review, we introduce various filling mechanisms suggested by analyzing the additives effect, research on the three-additive system containing new levelers synthesized to increase efficiency of the filling process, and methods to improve the filling performance by modifying the functional groups of the additives or deposition mode.

A Cross-Layer Transmission Architecture to Support Power Saving High-Speed Multimedia Services in Mobile Ad-hoc Wireless Sensor Networks (모바일 Ad-hoc 무선 센서 네트워크에서 전력 절약 고속 멀티미디어 서비스를 지원하기 위한 Cross-Layer 전송구조)

  • An, Beongku;Choi, Ginkyu
    • The Journal of the Institute of Internet, Broadcasting and Communication
    • /
    • v.8 no.4
    • /
    • pp.15-24
    • /
    • 2008
  • In this paper, we propose a Cross-Layer Transmission Architecture (CLTA) to support power saving high-speed multimedia services in mobile ad-hoc wireless sensor networks(MAWSN). The main goals of this paper are in showing and proposing how the routing routes are decided on route stability based on mobility of mobile nodes to increase the operational lifetime of routes as well as how the transmit power can be saved in mobile ad-hoc wireless sensor networks. To obtain these goals, we propose a cross-layer architecture strategy which combines network layer technology with physical layer technology to get synergy effects in the view of transmission power saving. We consider a realistic approach, in the points of view of the MAWSN, based on mobile sensor nodes as well as fixed sensor nodes in sensor fields while the conventional research for sensor networks focus on mainly fixed sensor nodes. The performance evaluation of the proposed CLTA is performed via simulation and analysis.

  • PDF

Scalable AlGaN/GaN HEMTGs Model Including Thermal Effect (스케일링이 가능한 AlGaN/GaN HEMT 소자의 열 모델에 관한 연구)

  • 김동기;김성호;오재응;권영우
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.14 no.7
    • /
    • pp.705-711
    • /
    • 2003
  • In this Paper, 2${\times}$100 $\mu\textrm{m}$ AlCaN/GaN HEMT's(on sapphire substrate) large signal model including thermal effect was extracted. An equation based empirical model was employed to make large signal model for convergence and high speed. Pulsed I-V measurement was performed to extract thermal resistance and capacitance. Power amplifiers with 9 mm and 15 mm AlCaN/GaN HEMTS were designed using scaled modeling results of 2${\times}$100 $\mu\textrm{m}$ device respectively. From comparisons between measured and simulated data, the model considering of thermal effects gave better agreement than without one. It demonstrates that thermal modeling must be performed for power amplifier that uses large size transistors.

Experimental Investigation on the Effect of Low-Speed Icing Condition to the Surface Roughness Formation (저속 결빙조건이 표면 조도 형성에 미치는 영향에 관한 실험적 연구)

  • Kang, Yu-Eop;Min, Seungin;Kim, Taeseong;Yee, Kwanjung
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.48 no.2
    • /
    • pp.99-108
    • /
    • 2020
  • In the field of aircraft icing prediction, surface roughness has been considered as critical factor because it enhances convective heat transfer and changes local collection efficiency. For this significance, experimental studies have been conducted to acquire the quantitative data of the formation process. Meanwhile, these experiments was conducted under low-speed condition due to the measurement difficulties. However, it has not been investigated that how the flow characteristic of low-speed will effects to the surface roughness. Therefore, the present study conducted experiment under low-speed icing condition, and analyzed the relation between surface roughness characteristics and icing condition. As an analysis method, the dominant parameters used in the previous high-speed experiments are employed, and roughness characteristics are compared. The size of roughness element was consistent with the previous known tendency, but not the smooth zone width.

Effect of Pomegranate (Punica granatum L.) Peel Powder on the Quality Characteristics, Retrogradation and Antioxidant Activities of Sponge Cake (석류 껍질 분말을 첨가한 스펀지 케이크의 품질 특성, 노화도 분석 및 항산화 활성)

  • Zhang, Yangyang;Song, Ka-Young;O, Hyeonbin;Joung, Ki Youeng;Shin, So Yeon;Kim, Young-Soon
    • The Korean Journal of Food And Nutrition
    • /
    • v.30 no.3
    • /
    • pp.578-590
    • /
    • 2017
  • An agricultural waste, pomegranate (Punica granatum L.) peel is known to be rich in total phenolics, which are flavonoids having strong antioxidant effects. In this study, pomegranate peel sponge cakes were prepared with varying ratios of freeze dried pomegranate peel powder (0, 1, 3, 5, 7% (w/w)) to examine their effect on quality characteristics, retrogradation and antioxidant activities. The specific gravity and moisture contents of 3, 5, and 7% pomegranate peel powder showed higher values than the control and 1% group. Addition of pomegranate peel powder increased the batter yield, while there was a significant decrease in baking loss. Increasing pomegranate peel powder content significantly decreased the lightness (L) (from 75.03 to 57.04) and pH values, whereas redness (a), yellowness (b) and ${\Delta}E$ were increased. Increasing concentration of the peel powder also increased the hardness and chewiness, while the springiness and cohesiveness decreased. Considering the Avrami equation, Avrami exponene (n) decreased from 1.8055 (control) to 0.9199 (7% pomegranate peel powder). Time constant (1/k) was lowest in control (at 17.64) and highest in the 7% group (39.84). Total polyphenol, flavonoid content, DPPH and ABTS radical scavenging activities significantly increased with increments in the content of pomegranate peel powder. A sensory evaluation by the 7-point scaling method showed that the sponge cake containing 7% pomegranate peel powder had the highest scores in color, flavor, sweetness, chewiness and overall acceptability. Hence, it is considered that sponge cake supplemented with 7% pomegranate peel powder is the most appropriate for quality characteristics, retrogradation and antioxidant activities.

Effectiveness of a 5-year Community Oral Health Program for the Elderly in Korea

  • Song, Eun-Joo;Hwang, Soo-Jeong
    • Journal of dental hygiene science
    • /
    • v.17 no.3
    • /
    • pp.202-208
    • /
    • 2017
  • Korea has been running the community oral health program for the elderly, including topical fluoride application and scaling. The aim of this study was to compare the subjective and objective oral health status of 345 participants according to the number of participants in the program and of 37 participants before and after the 5-year program. The survey consisted of an interview questionnaire and oral examinations. Analysis of variance was used to compare the variables of the 345 participants according to the numbers of participants. Paired t-test was used to compare the oral health statuses before and after the 5-year program in 37 subjects. There was no difference in subjective oral health status according to the number of participants in the oral health program in the elderly, including subjective health status, subjective oral health status, satisfaction with oral health, concern about oral health, need of dental treatment, oral pain, tooth sensitivity, subjective periodontal health, and subjective symptoms of periodontitis. The community periodontal index (CPI) of the 1 time participants was significantly higher than that of 3 times, 4 times or 5 times participants in the upper center, lower left, lower center, and lower right areas. There was a significant improvement in CPI from $2.59{\pm}1.14$ to $1.41{\pm}1.54$ (p<0.001) and positive oral behavioral change (daily tooth brushing frequency from $2.27{\pm}0.73$ to $2.54{\pm}0.90$) before and 5 years after the program. However, the program did not prevent tooth loss as the numbers of the remaining teeth significantly reduced from $23.77{\pm}1.84$ to $21.95{\pm}2.03$ over 5 years. We showed that running the community oral health program for the elderly for more than three years might have positive effects on the periodontal health of participants.

Effects of Design Factors of the Instrument Cluster Panel on Consumers' Affection Applying Robust Design (강건 설계기법을 이용한 자동차 게이지 클러스터의 디자인 요소와 고객 감성에 관한 연구)

  • Jung, Ga-Hun;Park, Sung-Joon;Kim, Seong-M.;Jung, Eui-S.
    • Journal of the Ergonomics Society of Korea
    • /
    • v.29 no.1
    • /
    • pp.25-31
    • /
    • 2010
  • It is known from consumer surveys that the interior design of cars greatly influences on consumers' affection. Most notably, the instrument panel which occupies the driver's attention while driving would be one of the main components that affect consumer's affection, but the designer does not often put due importance to this design component. The purpose of this study is to define consumers' affection on the instrument cluster panel in terms of its design factors: color of panel lighting and layout of meters as independent factors. Semantic differentials or affective adjectives that are related to the instrument panel were first derived from surveys, existing studies and the available literature. Then, representative affective factors were drawn using factor analysis and multi-dimensional scaling (MDS). Evaluation of the instrument panel was performed and analyzed by Taguchi's robust design to provide more robust results under various noise factors which are color and material of car interior. Experiment revealed that consumers had five affective factors on the instrument panel and luxurious, charming, and visible affections are grouped into a factor and unique and dynamic affections in another factor. Evaluation of the instrument panel by Taguchi's robust design found that the white color of panel lighting and the panel with four meters was the most preferred design in terms of both the affection of luxury and uniqueness.