• Title/Summary/Keyword: sapphire

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380-nm Ultraviolet Light-Emitting Diodes with InGaN/AlGaN MQW Structure

  • Bae, Sung-Bum;Kim, Sung-Bok;Kim, Dong-Churl;Nam, Eun Soo;Lim, Sung-Mook;Son, Jeong-Hwan;Jo, Yi-Sang
    • ETRI Journal
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    • v.35 no.4
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    • pp.566-570
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    • 2013
  • In this paper, we demonstrate the capabilities of 380-nm ultraviolet (UV) light-emitting diodes (LEDs) using metal organic chemical vapor deposition. The epi-structure of these LEDs consists of InGaN/AlGaN multiple quantum wells on a patterned sapphire substrate, and the devices are fabricated using a conventional LED process. The LEDs are packaged with a type of surface mount device with Al-metal. A UV LED can emit light at 383.3 nm, and its maximum output power is 118.4 mW at 350 mA.

Characteristics analysis and fabrication of SAW filter for micro-wave using Undoped-GaN thin film (Undoped-GaN 압전 박막을 이용한 RF용 SAW 필터의 제조 및 특성분석)

  • 장철영;박민정;정은자;고성용;최현철;이정희;이용현
    • Proceedings of the IEEK Conference
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    • 2002.06a
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    • pp.423-426
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    • 2002
  • Undoped-GaN thin film is deposited on Sapphire substrate by MOCVD. SAW velocity is measured with tile center frequency by HP8753C. Center frequency is 266.52 MHz and SAW velocity is 5330㎧ when wavelength was 20 Um. insertion loss, Q factor and side love attenuation is 41.265 dB, 257.41 and over 23 dB. k'i is calculated from tile measured data. k2'is from 1 % to 4 %. TCF is -61.817pp/m/$^{\circ}C$.

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Deposition of GaN by Chloride VPE and its Thermodynamic Analysis

  • Park, Chinho;Deoksun Yoon;Lee, Soonae;Shin, Moo-Whan
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1998.09a
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    • pp.47-51
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    • 1998
  • The GaN thick films were deposited on sapphire substrates by the chloride vapor phase epitaxy (CVPE) technique suing the GaCl3-NH3-N2 chemistry. Thermodynamic simulations were carried out to predict the optimum process windows, and the results were compared with the experiments. A large difference in the growth temperature was observed between the calculation an the experiment, and it indicated that the growth of GaN by the CVPE technique is kinetically limited.

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Characteristics of Hydrogenation and Electronic Properties of Thin Film Y-Hx

  • Cho, Young-Sin;Jee, Chan-Soo;Kim, Sun-Hee;Yoon, Jong-Hwan
    • Transactions of the Korean hydrogen and new energy society
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    • v.3 no.2
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    • pp.35-43
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    • 1992
  • Thin Film yttrium, 500 nm thick, was prepared by electron beam evaportion on sapphire substrate. Film was hydrogenated at room temperature upto 1 bar hydorgen pressure without any activation process. Electrical resistivity was measured by four-point DC method in the temperature range between room temperature and 30 K for various hydorgen concentration x = 0 to 2.924 of $YH_x$ sample. Temperature dependent resistance of $YH_{2\;924}$ shows low temperature minmum at 105K ($36{\mu}{\Omega}cm$ deep), the metal-semiconductor transition at 260K, and a hysteresis, which are similar behavior to bulk $YH_x$(x>2) experimental results.

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UV and visible emission intensity control of ZnO thin films for light emitting device applications (발광소자 응용을 위한 ZnO 박막의 자외선 및 가시광 발광 세기 제어)

  • 강홍성;심은섭;강정석;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.108-111
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    • 2001
  • ZnO thin films on (001) sapphire substrates knave been deposited by pulsed laser deposition(PLD) technique for light emitting device applications. We have controlled the emission intensity of UV and visible light, depending on film thickness and various post-annealing time. UV emission became strong as the thickness of ZnO thin films increased. The intensity of visible light was strong as post-annealing temperature increased. The optical properties of the ZnO thin films were characterized by PL(photoluminescence) and the structural properties of the ZnO were characterized by XRD for the application of ZnO light emission device.

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Light emission properties of ZnO thin films grown by pulsed laser deposition (펄스 레이저 증착법으로 제작한 ZnO 박막의 발광 특성)

  • 배상혁;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.539-542
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    • 2000
  • ZnO thin films for light emission device have been deposited on sapphire and silicon substrates by pulsed laser deposition technique(PLD). A Nd:YAG laser was used with the wavelength of 355 nm. In order to investigate the emission properties of ZnO thin films, PL measurements with an Ar ion laser as a light source using an excitation wavelength of 351 nm and a power of 100 mW are used. All spectra were taken at room temperature by using a grating spectrometer and a photomultiplier detector. ZnO exhibited PL bands centered around 390, 510 and 640 nm, labeled near ultra-violet (UV), green and orange bands. Structural properties of ZnO thin films are analized with X-ray diffraction (XRD).

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Annealing Effect on the structural and optical properties of ZnO thin films prepared by Pulsed Laser Deposition (펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구)

  • Kim, Jae-Hong;Lee, Cheon
    • Proceedings of the KIEE Conference
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    • 2004.11a
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    • pp.54-57
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    • 2004
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 m. During deposition, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $400^{\circ}C$ and flow rate of 350 sccm, films have been annealed at various substrate temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by diffraction (XRD), SEM and the optical of the ZnO were characterized by photoluminescence (PL).

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Controlled Ga-doped ZnO NWs Synthesized by PLD in Furnace (PLD in Furnace 장비에 의한 Ga-Doped ZnO 나노선 합성 제어)

  • Song, Yong-Won;Lee, Sang-Gyu;Chang, Seong-Pil;Son, Chang-Wan;Leem, Jae-Hyeon;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 2007.11a
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    • pp.112-113
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    • 2007
  • We synthesize ZnO nanowires (NWs) doped with 3 wt% Ga on sapphire substrate using a hot-walled pulsed laser deposition (PLD) system named PLD in Furnace. A proprietary target rotating system is employed in the furnace to ensure the homogeneity of the deposition. The kinetic energy of the laser-ablazed ZnO is controlled for the optimization of NW formation. The physical properties of the resultant NWs are presented.

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Characteristics of rapid-thermal-annealed $YBa_2Cu_3O_{7-x}$ high $T_c$, superconducting thin-films (급속 열처리에 의한 $YBa_2Cu_3O_{7-x}$ 고온 초전도체 박막의 특성)

  • Shin, Hyun-Yong;Park, Chang-Yub;Kim, Kyu-Soo
    • Proceedings of the KIEE Conference
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    • 1993.07b
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    • pp.1137-1139
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    • 1993
  • The superconducting thin films of $YBa_2Cu_3O_{7-x}$ were deposited on (100) sapphire substrates at low temperature by rf magnetron sputtering and annealed at $895^{\circ}C$ for 60 sec. using rapid-thermal-annealing(RTA) technique. The films were characterized by SEM, four-point probe resistivity measurement, XRD, and AES. The RTA processed HTS films had a preferential structure with c-axis normal to the substrate surface.

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The study of UV emission in ZnO thin films fabricated by Pulsed Laser Deposition (레이저 증착법에 의해 제작된 ZnO 박막의 UV 발광특성연구)

  • 배상혁;이상렬;진범준;우현수;임성일
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.95-98
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    • 1999
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. In order to investigate the effect of the deposition conditions on the properties of ZnO thin films at an oxygen pressure of 350 mTorr, the experiment has been Performed at various substrate temperatures in the range of 20$0^{\circ}C$ to $700^{\circ}C$. According to XRD, (002) textured ZnO films of high crystalline quality have been obtained and the intensity of UV emission was the highest at 40$0^{\circ}C$ substrate temperature.

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