Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Annealing Effect on the structural and optical properties of ZnO thin films prepared by Pulsed Laser Deposition

펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구

  • Kim, Jae-Hong (Department of Electrical Engineering Inha University) ;
  • Lee, Cheon (Department of Electrical Engineering Inha University)
  • 김재홍 (인하대학교 전기공학과 레이저연구실) ;
  • 이천 (인하대학교 전기공학과 레이저연구실)
  • Published : 2004.11.05
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Abstract

ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 m. During deposition, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $400^{\circ}C$ and flow rate of 350 sccm, films have been annealed at various substrate temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by diffraction (XRD), SEM and the optical of the ZnO were characterized by photoluminescence (PL).

Keywords