Electrical Properties of PZT Thin Films Deposited on the Ru/$RuO_2$ Metal/Oxide Hybrid Electrodes
(Ru/$RuO_2$ 금속/산화물 이중전극 위에 증착한 PZT 박막의 전기적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.4
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- pp.281-288
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- 2001