• 전기학회논문지P
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• 제51권4호
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• pp.193-197
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• 2002

In this paper, the ultrasonic sensor for gas flowmeter was simulated, fabricated and measured according to the assembly step and the piezoelectric vibrator layers. The simulated resonant frequency and the measured resonant frequency were similar except two layer sensor. The simulated resonant frequency of three layer sensor was 48 kHz and the measured resonant frequency of three layer sensor was 45.2 kHz. From the results, the ultrasonic sensor for gas flowmeter could be designed and expected without fabrication.

• Smart Structures and Systems
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• 제5권3호
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• pp.279-290
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• 2009

Two degrees of freedom resonant systems are employed to improve the resonant property of resonant sensor, as compared to a single degree of freedom resonant system. This paper presents design, development and testing of two degrees of freedom resonant sensor. To measure absolute mass, cantilever shaped two different masses (smaller/absorber mass and bigger/drive mass) with identical resonant frequency are mechanically linked to form 2 - Degree-of-Freedom (DOF) resonator which exhibits higher amplitude of displacement at the smaller mass. The same concept is extended for measuring differential quantity, by having two bigger mass and one smaller mass. The main features of this work are the 3 - DOF resonator for differential detection and the microcontroller based closed loop electronics for resonant sensor with piezoelectric sensing and excitation. The advantage of using microcontroller is that the method can be easily extended for any range of measurand.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
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• pp.131-134
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• 2002

In this paper, the ultrasonic sensor for gas flowmeter was simulated, fabricated and measured with assembly step and piezoelectric vibrator layers. The simulated resonant frequency and the measured resonant frequency were similar except sensor 2. The simulated resonant frequency of sensor 3 was 48 kHz and the measured resonant frequency of sensor 3 was 45.2 kHz. From the results, the ultrasonic sensor for flowmeter could be designed and expected without fabrication.

• 디지털산업정보학회논문지
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• 제10권2호
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• pp.37-45
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• 2014

This paper is a study of the water sensor using a coaxial cavity resonator. This water sensor uses the resonant frequency variation of the coaxial cavity resonator when there is a water drop of the used coaxial cavity resonator. And we made resonant frequencies by controlling the input voltage of the oscillator which will be mainly resonated in the coaxial cavity resonator. First, we made the coaxial cavity resonator by simulating the resonator structure with the proposed size and we expect the resonant frequency from the simulation and then we decide the VCO from the result. Second, we made the water drop detecting sensor circuit and measured the water sensor. We decided the size of the resonator as inner conductor 5mm, outer conductor 14mm, the height of resonator 9.5mm, and the height of the glass 6mm from the simulated result. The simulated resonant frequencies are 3.09GHz and we made the VCO frequency ranges from 2.56GHz to 3.2GHz. The measured resonant frequency is 2.97GHz and the return loss is under -8. 4 dB at the center frequency. When the water is dropped on the glass of the resonator, the voltage has changed from 690mV to 145mV. It shows the proposed water sensor can detect the water by the resonant frequency variation of the resonator.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 한국항만학회지
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• 제12권2호
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• pp.323-328
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• 1998

A quartz crystal analyzer is utilized to monitor the corrosion process of an aluminum surface of a quartz crystal for marine sensor by sea water. A quartz crystal having 2000 $\AA$ of aluminum layer is installed in a specially designed cell and is in contact with sea water imitated electrolyte solution. While a constant potential is applied to the cell, the resonant frequency and resonant resistance are simultaneously measured using the quartz crystal analyzer. In addition, surface topographs are taken with an atomic force microscope(AFM) and the element analysis of the surface is conducted using an energy dispersive X-ray spectrometer(EDX). The simultaneous measurement of resonant frequency and resonant resistance during the corrosion process explains the change of surface structure caused by the corrosion. The variation of resonant frequency addresses the amount surface metal dissolution. As a conclusion, it is found that a simple measurement using the quartz crystal analyzer can replace the complex monitoring employing large equipments in the investigation of a corrosion process of sensor surface.

• Interaction and multiscale mechanics
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• 제3권3호
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• pp.257-266
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• 2010

A novel resonance based proximity DC current sensor is proposed. The sensor consists of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end. When the sensor is placed in proximity to a wire carrying DC current, resonant frequency of the beam changes with change in current. This change in resonant frequency is used to determine the current through the wire. The structure is simulated in micro and meso scale using COMSOL Multi physics software and the sensor is found to be linear with good sensitivity.

• 한국전기전자재료학회논문지
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• 제25권6호
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• pp.445-450
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• 2012

We have developed an implantable wireless sensor for real time pressure monitoring of blood circulation system. MEMS (micro-electro-mechanical system) technology was adopted as a sensor development method. The sensor is composed of photolithographically patterned inductors and a distributed capacitor in gap between the inductors. A resulting LC resonant system produces its resonant frequency in range of 269 to 284 MHz at 740 mmHg. To read the resonant frequency changed by blood pressure variation, we developed a custom readout system based on a network analyzer functionality. The bench-top testing of the pressure sensors showed good mechanical and electrical functionality. A sensor was implanted into tibial artery of farm pig, and interrogated wirelessly with accurate readings of blood pressure. After 45 days, the sensor's electrical response and histopathology were studied with good frequency reading and biocompatibility.

• 한국공작기계학회논문집
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• 제16권1호
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• pp.86-91
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• 2007

A sensor using quartz toning fork is presented for measuring liquid density. It consists of a PZT plate as an actuator for piezoelectric excitation and a quartz tuning fork as a sensor for resonant frequency detection. The resonant frequency is determined from the sensing voltage measured in tuning fork when the excitation frequencies of PZT actuator are swept around the resonant frequencies of tuning fork. The resonant frequency determined the liquid density. The density values of three kinds of organic solvents are measured and compared with the standard values. The experimental results are in agreement with the standard values and the maximum standard deviation is less than 9%.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.412-413
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• 2005

This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is $500{\mu}m$ long, $100{\mu}m$ wide and $1{\mu}m$ thick. Generation of resonant frequency measured by Modal Analysis is resulted in length of cantilever. The length was found to be a dominant factor for the selection of required resonant frequency range. On the other side, the width had influenced very little on either the magnitude of resonant frequency or the sensitivity.