• Proceedings of the Korean Geotechical Society Conference
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• 2005.03a
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• pp.1126-1133
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• 2005

The effects of mean particle size and uniformity coefficient of dredged soils to the liquefaction resistance strength and dynamic characteristics are experimentally studied in this paper. Representative 4 mean particle sizes and 3 uniformity coefficients were selected and 12 representative particle size distribution curves which have different mean particle sizes and uniformity coefficients, were artificially manufactured using the real dredged river soil. Cyclic triaxial tests and torsional shear tests were carried out to analyze the effect of mean particle size and uniformity coefficient to the liquefaction resistance strength and dynamic characteristics of soils.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Journal of the Korean Geotechnical Society
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• v.21 no.7
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• pp.13-20
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• 2005

For experimental study on the effect of particle size distribution on the liquefaction resistance strength, particle size distribution curves of the dredged soil were investigated. In this process, four mean particle sizes and three uniformity coefficients were defined representatively and twelve representative particle size distribution curves which have different mean particle size and uniformity coefficient, were defined and manufactured by using the real dredged river soil. Cyclic triaxial tests and resonant column tests were carried out to analyze the effect of mean particle size and uniformity coefficient on the liquefaction resistance strength and dynamic characteristics.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.1
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.50-56
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• 2022

In order to process a vast amount of data, there is demand for a new system with higher processing speed and lower energy consumption. To prevent 'memory wall' in von Neumann architecture, RRAM, which is a neuromorphic device, has been researched. In this paper, we summarize the features of RRAM and propose the device structure for characteristic improvement. RRAM operates as a synapse device using a change of resistance. In general, the resistance characteristics of RRAM are nonlinear and random. As synapse device, linearity and uniformity improvement of RRAM is important to improve learning recognition rate because high linearity and uniformity characteristics can achieve high recognition rate. There are many method, such as TEL, barrier layer, NC, high oxidation properties, to improve linearity and uniformity. We proposed a new device structure of TiN/Al doped TaO_x/AlO_x/Pt that will achieve high recognition rate. Also, with simulation, we prove that the improved properties show a high learning recognition rate.

• Current Photovoltaic Research
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• v.2 no.4
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• pp.147-151
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• 2014

A boron doping process using a boron tri-bromide ($BBr_3$) as a boron source was applied to form a $p^+$ emitter layer on an n-type mono-crystalline CZ substrate. Nitrogen ($N_2$) gas as an additive of the diffusion process was varied in order to study the variations in sheet resistance and the uniformity of doped layer. The flow rate of $N_2$ gas flow was changed in the range 3 slm~10 slm. The sheet resistance uniformity however was found to be variable with the variation of the $N_2$ flow rate. The optimal flow rate for $N_2$ gas was found to be 4 slm, resulting in a sheet resistance value of $50{\Omega}/sq$ and having a uniformity of less than 10%. The process temperature was also varied in order to study its influence on the sheet resistance and minority carrier lifetimes. A higher lifetime value of $1727.72{\mu}s$ was achieved for the emitter having $51.74{\Omega}/sq$ sheet resistances. The thickness of the boron rich layer (BRL) was found to increase with the increase in the process temperature and a decrease in the sheet resistance was observed with the increase in the process temperature. Furthermore, a passivated emitter solar cell (PESC) type solar cell structure comprised of a boron doped emitter and phosphorus doped back surface field (BSF) having Ni/Cu contacts yielding 15.32% efficiency is fabricated.

• Transactions of the Korean hydrogen and new energy society
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• v.33 no.5
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• pp.550-556
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• 2022

In this study, the flow uniformity was analyzed by performing numerical analysis on the 1 kWe internal manifold type solid oxide fuel cell stack according to the channel height of the separator. Also, it was examined by varying the fuel utilization rate and oxygen utilization rate. From the calculation results, we found that as the channel height of the separator decreased, the pressure drop increased exponentially. In addition, it was found that as the channel height of the separator decreased, the gas flow resistance inside the unit cell increased, and the flow resistance increased the pressure drop, thereby improving the flow uniformity inside the stack. Finally, the calculation results showed that as the fuel and oxygen utilization increased, the flow uniformity also improved.

• The Journal of the Acoustical Society of Korea
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• v.16 no.1
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• pp.54-59
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• 1997

The vehicle vibrations result from the exciting forces which are caused by air resistance, engine firing, tire mass unbalance and tire uniformity. Especially, the shake and shimmy phenomena in the steering system are closely related to the vehicle vibration, the tire unbalance, and the tire uniformity. This study presents the shimmy phenomena due to the tire mass unbalance and the tire uniformity in order to investigate their effects.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.2
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• pp.101-106
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• 1999

The main consideration factor to design a magnetron of the sputtering system for TFT-LCD metallization is high sheet resistance (Rs) uniformity which is provided by the high target erosion and high current efficiency. The present study has developed a rectangular magnetron for TFT-LCD to bve considered full target erosion and high film uniformity. After an aluminum-2 at.% and alloy target was installed in a magnetron source and the film was deposited on the glass of 600${\times}$720 mm, the Rs uniformity of the deposited film was measured as functions of the magnet tilt and magnet scanning configuration. And the target erosion profile was observed with the target voltage. When sputtered at 4mtorr and 10kW, the magnet tilt for the high Rs uniformity of 8.38% was 7mm. The plasma voltage at the dwell home and end for full-face target erosion, when scanned the magnetron was 120% compared to the mean voltage of the other area.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.554-557
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• 2008

In this study, two types of central flow distributor designs are presented and compared to obtain the optimal compact design which has the least flow resistance and the uniform flow distribution in a vehicular fuel cell stack. For effective and reliable prediction on the thermo-flow characteristics of the reactants flow over the entire fuel cell stack domain, open channel flow in the bipolar plates of the power generating cells were simulated by applying a simplified flow resistance model with an empirical porous concept. A number of case studies were performed to figure out an optimal configuration of a central flow distributor device in terms of the time-dependent thermo-flow behavior and load-dependent flow distribution. The results showed that the stable and load-independent thermo-flow uniformity is very design specific, which is closely associated with the design of central manifolding devices in order to achieve the enhanced volumetric power density and the reliable long-lasting operating of fuel cells.