• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.129-134
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• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• Transactions of Materials Processing
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• v.15 no.4 s.85
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• pp.311-318
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• 2006

One of the most important quality problems in flat plate leveled from hot rolled coils in cut-to-Iength lines is bowing and cambering when they are cut in small width parts. It is verified analytically and experimentally that residual stress remained in plate is th ε source of the problem. In order to produce low residual stress flat plate from hot rolled coils, the proper conditions of leveling are studied and two things are implemented. One is proper plastic deformation area ratio to reduce residual stress within customer requirement by applying suitable plastic deformation and maintain leveling load within structural strength limit of leveler. The other is maintaining uniform plastic deformation along the width of the plate during leveling. Customer requirement for residual stress is met by applying above 70% of plastic deformation area ratio and uniform deformation along width of coil by adjusting back up rolls according to deformation analysis of work roll and back up roll assembly and leveling tests.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.98-103
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• 2008

This paper is to discuss distribution of welding residual stresses of a ferritic low alloy steel nozzle with dissimilar metal weld using Alloy 82/182. Two dimensional (2D) thermo-mechanical finite element analyses are carried out to simulate multi-pass welding process on the basis of the detailed and fabrication data. On performing the welding analysis generally, the characteristics on the heat input and heat transfer of weld are affected on the weld residual stress analyses. Thermal analyses in the welding heat cycle process is very important process in weld residual stress analyses. Therefore, heat is rapidly input to the weld pass material, using internal volumetric heat generation, at a rate which raises the peak weld metal temperature to $2200^{\circ}C$ and the base metal adjacent to the weld to about $1400^{\circ}C$. These are approximately the temperature that the weld metal and surrounding base materials reach during welding. Also, According to the various ways of appling the weld heat source, the predicted residual stress results are compared with measured axial, hoop and radial through-wall profiles in the heat affected zone of test component. Also, those results are compared with those of full 3-dimensional simulation.

• Journal of Welding and Joining
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• v.13 no.1
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• pp.138-144
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• 1995

Recently, as the industrial structure tends to become large, the thickness of structural plate becomes thicker. Therefore, the thicker the plate of welded structure is, the larger the shape of welded joint. The effect of large heat input makes large heat affected zone(HAZ). These bring to complict welding residual stress and to weaken material, which may cause extremely harm to the safety of structures. Nevertheless, welding is design is regulated by the KS, JIS or standard in the resister of shipping such as KR, ABS or LR. However, these rules are based on rather experimental than theoretical. In this study, the computer program of heat conduction, considering un-steady state and quasi-steady state, is developed for optimizing(minimizing) a shape of welded joint. The characteristics of heat on the welded joints with various shapes are clarified by the results of the analyses.

• International Journal of Quality Innovation
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• v.4 no.1
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• pp.148-159
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• 2003

Variation is the archenemy of quality. To reduce or control the variation in a complex production unit, firstly we need to identify the location of the root cause of the variation. This paper discusses the detection of variability and the techniques used for reduction of variation for a production unit consisting of many processes. In the first part of this paper, the background of variability detection in production systems is introduced which is then followed by a weighted network corresponding to correlation matrix of all processes. Based on the network and clustering criterion of maximum spanning tree, a classification of all processes is derived. Furthermore, the variation of each process in a class is determined by residual analysis. In the last part, the use of methods of robust design for the processes with a larger variability is discussed.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.662_663
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• 2009

Motor bus transfer involves the process of transferring a bus that has several critical motors to an alternate source of power when the main normal power source feeding them is interrupted. Bus transfer is a time-critical application in which the transfer progress depends on various parameters such as the type of motor, load on the motor at the time of transfer, inertia of the motor, and the combined open-circuit time constant of various motors present on the bus at the time of transfer. This paper present the result of modeling and simulation of nuclear power motor bus using ETAP(Electrical Transient Analyzing Program) program for motor and motor bus residual voltage decay characteristics.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.21 no.2
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• pp.417-426
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• 1996

The end-to-end service clock recovery is a critical issue in providing constandt bit rate service through ATM network. The Synchronous Residual Time Stamp(SRTS) algorithm is used to recovery the source clock using time stamp of transmitter. In thispaper, we propose a Differential Residual Time Stamp (DRTS) transmission mechanism to effectively deliver the timing information of source clock in SRTS algorithm. The RTS transmission method simple in its hardware. From the results of field trial of DS3 rate interactive video communication system through B-ISDN testbed, it can be identified that DRTS method is superior to the RTS method.

• Journal of the Optical Society of Korea
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• v.3 no.2
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• pp.80-85
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• 1999

We propose and demonstrate a new scheme for suppression of output distortion in an open-loop gyroscope employing an erbium-doped fiber amplifier/source (FAS). In addition to the main modulation for the rotation rate measurement, a small auxiliary modulation at a different frequency is used to extract an error signal, which is necessary for keeping the quasi-dc component of the feedback signal power at a constant level for varying rotation rate. By active tracking of the optimum modulation condition using this two-frequency modulation scheme, we obtain stable gyro output with suppressed distortion as well as stable FAS characteristics. We also calculate the distortion in the gyro response due to the feedback effect, from which we estimate the FAS gyro output distortion due to the residual ac feedback effect when the dc feedback effect is removed by the proposed scheme. The measured residual deviation agrees reasonably with the estimation.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.1
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• pp.87-95
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• 2012

In recent years, laser-arc hybrid welding has begun to be adopted for assembly welding of automotive bodies and parts, because the hybrid welding process can weld lapped steel sheets having a larger gap than is possible with laser welding. In this paper, to predict the twist deformation by the hybrid welding when brackets are welded in B pillar of a passenger car, the residual stress using CAE is analyzed and the deformation result of CAE is compared with the measured deformation. First of all, after modeling heat source as intended to be expressed with laser-arc hybrid welding method, heat source fitting is done with welding conditions and a section of welding part obtained through specimen test. In case of heat source functions, laser used conical source and arc used double ellipsoid source. Through the local model analysis, elements which are located in the center of the model are selected. The elements are called WME(Welding Macro Element). This WME is extruded in the welding lines and welding phenomenon of complex parts is accomplished. The deformation amount after hybrid welding is got through a simulation, the validity of simulation is verified by measuring the panel and comparing with the simulation result.