• Title/Summary/Keyword: reduction atmosphere

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Vacuum Packaging of MEMS (Microelectromechanical System) Devices using LTCC (Low Temperature Co-fired Ceramic) Technology (LTCC 기술을 이용한 MEMS 소자 진공 패키징)

  • 전종인;최혜정;김광성;이영범;김무영;임채임;황건탁;문제도;최원재
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.1
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    • pp.31-38
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    • 2003
  • In the current electronic technology atmosphere, MEMS (Microelectromechanical System) technology is regarded as one of promising device manufacturing technologies to realize market-demanding device properties. In the packaging of MEMS devices, the packaged structure must maintain hermeticity to protect the devices from a hostile atmosphere during their operations. For such MEMS device vacuum packaging, we introduce the LTCC (Low temperature Cofired Ceramic) packaging technology, in which embedded passive components such as resistors, capacitors and inductors can be realized inside the package. The technology has also the advantages of the shortened length of inner and surface traces, reduced signal delay time due to the multilayer structure and cost reduction by more simplified packaging processes owing to the realization of embedded passives which in turn enhances the electrical performance and increases the reliability of the packages. In this paper, the leakage rate of the LTCC package having several interfaces was measured and the possibility of LTCC technology application to MEMS devices vacuum packaging was investigated and it was verified that improved hermetic sealing can be achieved for various model structures having different types of interfaces (leak rate: stacked via; $4.1{\pm}1.11{\times}10^{-12}$/ Torrl/sec, LTCC/AgPd/solder/Cu-tube; $3.4{\pm}0.33{\times}10^{-12}$/ Torrl/sec). In real application of the LTCC technology, the technology can be successfully applied to the vacuum packaging of the Infrared Sensor Array and the images of light-up lamp through the sensor way in LTCC package structure was presented.

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Quality Maintenance and Suppression of Chilling Injury of 'Akihime' Plum Fruits Stored under Controlled Atmosphere (CA 저장을 이용한 자두 '추희'의 품질유지 및 저온장해 발생 억제)

  • Lee, Eun Jin;Choi, Sunyoung;Cho, MiAe;Hong, YoonPyo;Choi, JiWeon;Chung, DaeSung
    • Horticultural Science & Technology
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    • v.31 no.6
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    • pp.732-739
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    • 2013
  • 'Akihime' plums picked at mature stage (50-70% red coloration of the fruit skin) were stored at $1^{\circ}C$ under air or controlled atmosphere (CA) storage regime as following 3% $O_2$ + 1, 3, 5, and 7% $CO_2$ for 50 days for the purpose of assessing the effect of CA storage on the maintenance of fruit quality and the reduction of chilling injury. Fruits stored under CA storage regime showed reduced respiration as well as ethylene production rates compared to the fruits stored in air. Quality attributes including weight loss, Hunter 'a' values, soluble solids content, titratable acidity, and firmness showed smallest changes in fruits stored under CA conditions except for 3% $O_2$ + 7% $CO_2$. High incidence of physiological disorders including chilling injury, flesh browning, and decay were found in fruits stored under both air and CA of 3% $O_2$ + 7% $CO_2$. In our study, the CA storage regime of 3% $O_2$ + 5% $CO_2$ was found the most effective for maintaining overall fruit qualities of 'Akihime' plums produced in Korea, also delayed the development of chilling injury including lack of juiciness and flesh browning. From the results, storage at 3% $O_2$ + 5% $CO_2$ was selected as an optimal condition of 'Akihime' plum for extending storage life up to 50 days at $1^{\circ}C$.

Synthesis of Fe3O4-δ Using FeC2O4·2H2O by Thermal Decomposition in N2 Atmosphere (N2분위기에서 FeC2O4·2H2O의 열분해에 의한 Fe3O4-δ합성)

  • Park, Won-Shik;Oh, Kyoung-Hwan;An, Suk-Jin;Suhr, Dong-Soo
    • Korean Journal of Materials Research
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    • v.22 no.5
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    • pp.253-258
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    • 2012
  • Activated magnetite ($Fe_3O_{4-{\delta}}$) was applied to reducing $CO_2$ gas emissions to avoid greenhouse effects. Wet and dry methods were developed as a $CO_2$ removal process. One of the typical dry methods is $CO_2$ decomposition using activated magnetite ($Fe_3O_{4-{\delta}}$). Generally, $Fe_3O_{4-{\delta}}$ is manufactured by reduction of $Fe_3O_4$ by $H_2$ gas. This process has an explosion risk. Therefore, a non-explosive process to make $Fe_3O_{4-{\delta}}$ was studied using $FeC_2O_4{\cdot}2H_2O$ and $N_2$. $FeSO_4{\cdot}7H_2O$ and $(NH_4)_2C_2O_4{\cdot}H_2O$ were used as starting materials. So, ${\alpha}-FeC_2O_4{\cdot}2H_2O$ was synthesized by precipitation method. During the calcination process, $FeC_2O_4{\cdot}2H_2O$ was decomposed to $Fe_3O_4$, CO, and $CO_2$. The specific surface area of the activated magnetite varied with the calcination temperature from 15.43 $m^2/g$ to 9.32 $m^2/g$. The densities of $FeC_2O_4{\cdot}2H_2O$ and $Fe_3O_4$ were 2.28 g/$cm^3$ and 5.2 g/$cm^3$, respectively. Also, the $Fe_3O_4$ was reduced to $Fe_3O_{4-{\delta}}$ by CO. From the TGA results in air of the specimen that was calcined at $450^{\circ}C$ for three hours in $N_2$ atmosphere, the ${\delta}$-value of $Fe_3O_{4-{\delta}}$ was estimated. The ${\delta}$-value of $Fe_3O_{4-{\delta}}$ was 0.3170 when the sample was heat treated at $400^{\circ}C$ for 3 hours and 0.6583 when the sample was heat treated at $450^{\circ}C$ for 3 hours. $Fe_3O_{4-{\delta}}$ was oxidized to $Fe_3O_4$ when $Fe_3O_{4-{\delta}}$ was reacted with $CO_2$ because $CO_2$ is decomposed to C and $O_2$.

Preparation of $BaTiO_3$ powder in solid reaction and basic study on dielectrics of $CeAIO_3-BaTiO_3$system ($BaTiO_3$ 분말합성조건 및 $CeAIO_3-BaTiO_3$계 유전체의 기초적 연구)

  • Lim, Dae-Young;Kim, Jong-Ock;Lee, Chae-hyun;Park, Won-Kyu
    • The Journal of Natural Sciences
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    • v.8 no.1
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    • pp.61-69
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    • 1995
  • It is hard to synthesize pure $BaTiO_3$ from $BaCO_3$ and $TiO_2$ in solid reaction for the activity of BaO and secondary phase. For this reason, the wet chemical techniques have been studied. Starting material which was used in these methods were expensive and the properties of powder which was synthesized in same defined. So, some process have been studying again to improve soild reaction method. This study which was one of those was to defin the forming mechanism of $Ba_2TiO_4$ and to control some condition of $Ba_2TiO_4$. The synthesis temperature of $BaTiO_3$ in solid reaction was near $1120^{\circ}C$. The quantity and forming temperature of $Ba_2TiO_4$ could be controlled by atmosphere heat treatment. $Ba_2TiO_4$ was related to expansion in Ba-rich region of $BaTiO_3$. $BaTiO_2O_5$ and $BaTiO_3O_7$ was reason to expand in Ti-rich region. The dielectrics of $CeAIO_3$ which was synthesized and sintered in reduction atmosphere and $BaTiO_3$ system were affected by $CeO_2$ which was formed for the decomposition of $CeAIO_3$ heat treatment in air.

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Transition of 12CaO·7Al2O3 electrical insulator to the permanent semiconductor using via thermo-chemical reduction treatment (열 화학적 환원 처리를 이용한 절연체 12CaO·7Al2O3의 전도체로의 전환)

  • Chung, Jun-Ho;Eun, Jong-Won;Oh, Dong-Keun;Kim, Kwang-Jin;Hong, Tae-Ui;Jeong, Seong-Min;Choe, Bong-Geun;Shim, Kwang-Bo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.4
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    • pp.178-184
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    • 2010
  • The $12CaO{\cdot}7Al_2O_3$(C12A7) powders were successfully synthesized using combustion method with microwave-assistant and C12A7:H were fabricated by post-annealed process in Ar/H atmosphere. X-ray diffraction patterns and TGDSC were used for investigating to the precursors of crystalline and reaction depending on temperature. C12A7:H that was treated post-annealed process were investigated TG-MS and Hall-measurement for confirming H ions doping and checking electrical resistivity of C12A7:H. H ion substituted to $O^{2-}$ ions in the C12A7 cages were confirmed at $289.5^{\circ}C$ by TG-MS and C12A7:H calcined at $1000^{\circ}C$ in Ar/H=8:2 atmosphere for 8~10 h has low electrical resistivity about $10^2{\Omega}{\cdot}cm$ at room temperature.

Corrosion and Strength Changes of Agricultural Steel Pipes Elapsed 20 Years under the Greenhouse Environment (온실 환경 하에서 20년 경과된 농업용 강관의 부식 및 강도변화)

  • Nam, Sang-Woon;Ryu, Hee-Ryong;Choi, Man-Kwon;Shin, Hyun-Ho
    • Journal of Bio-Environment Control
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    • v.29 no.2
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    • pp.196-201
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    • 2020
  • In order to increase the durability of the pipe framed greenhouse, galvanized steel pipes with four corrosion protection treatments were installed in the greenhouse. After 20 years, experiments on surface corrosion and strength change were conducted. Control (untreated) pipes exposed in the atmosphere showed a 1.3% reduction in strength, but little difference from other treatments. The strength of heavy protective coating pipes buried in the ground decreased by 0.6%, showing little change, but untreated pipes decreased by 15.7%. And antirust paint and asphalt coating pipes decreased by 4.2~4.4%. Pipes exposed in the atmosphere did not show severe corrosion in all samples. There was no change in heavy protective coating pipes, and no rust was found in antirust painting pipes either and there was only slight discoloration. Asphalt coating pipes discolored black and some rust was found, and untreated pipes were rusted by 20~30% of the surface. However, untreated pipes buried in the ground were completely rusted, and asphalt coating pipes were rusted by 80~90% of the surface. Antirust painting pipes were rusted by 20~30%, and heavy protective coating pipes did not change almost. The heavy protective coating treatment showed a clear corrosion protection effect even in the parts buried in the ground, and the antirust painting treatment also showed some corrosion protection effect. Therefore, it is judged to be applicable to the field of pipe framed greenhouses.

Separation characteristics of separation devices using inlet water mixed with exhalation gases without a compressor (날숨이 혼합된 물을 사용한 압축기없는 용존기체 분리기의 분리 특성)

  • Heo, Pil Woo
    • Journal of Advanced Marine Engineering and Technology
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    • v.40 no.9
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    • pp.842-846
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    • 2016
  • It's possible for a human to breathe under water, but the amount of dissolved oxygen in the water is small and a large amount of water is necessary to obtain sufficient dissolved oxygen from water. So, large separation system with large water pumps, having large surface areas, and large battery sources are needed. Exhalation gases are used to solve this problem. Theses gases contain some oxygen, nitrogen, and carbon dioxide; they contain less oxygen and more carbon dioxide compared to air. Therefore, reduction of the amount of carbon dioxide is necessary. If exhalation gases are employed appropriately, the separation device can be made more compact. Inlet water mixed with exhalation gases is supplied into the separation device, and dissolved gases are separated from the mixed water as it passes through the device. The inlet part of a typical separation system with a water delivery pump before the membrane module has more than one atmosphere. Hence, a compressor is used to mix the exhalation gases. In this study, the pressure at the inlet due to the use of a suction pump after the membrane module was less than one atmosphere; hence, compressors were not required. Separation characteristics were studied using a separation device without a compressor. The use of exhalation gases led to an increase in the amount of dissolved gases being separated. As the amount of inlet exhalation gases was increased, the separation of dissolved gases was increased as well.

Development of the Most Optimized Ionizer for Reduction in the Atmospheric Pressure and Inert Gas Area (감압대기 및 불활성가스 분위기에서 적합한 정전기 제거장치의 개발)

  • Lee, Dong Hoon;Jeong, Phil Hoon;Lee, Su Hwan;Kim, Sanghyo
    • Journal of the Korean Society of Safety
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    • v.31 no.3
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    • pp.42-46
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    • 2016
  • In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.

Revision of 22-year Records of Atmospheric Baseline CO2 in South Korea: Application of the WMO X2019 CO2 Scale and a New Baseline Selection Method (NIMS Filter) (지난 22년간 한반도 이산화탄소 배경농도 재산정 연구 - WMO/GAW 척도 변경과 NIMS 온실가스 배경농도 산출기법을 중심으로 -)

  • Seo, Wonick;Lee, Haeyoung;Kim, Yeon-Hee
    • Atmosphere
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    • v.31 no.5
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    • pp.593-606
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    • 2021
  • The Korea Meteorological Administration/National Institute of Meteorological Sciences (KMA/NIMS) has monitored atmospheric CO2 at Anmyeondo (AMY) World Meteorological Organization (WMO) Global Atmosphere Watch Programme (GAW) regional station since 1999, and expanded its observations at Jeju Gosan Suwolbong station (JGS) in the South and at Ulleungdo-Dokdo stations in the East (ULD and DOK) since 2012. Due to a recent WMO CO2 scale update and a new filter (NIMS) to select baseline levels at each station, the 22 years of CO2 data are recalculated. After correction for the new CO2 scale, we confirmed that those corrected records are reasonable within the compatibility goal (±0.1 ppm of CO2) between KMA/NIMS and National Oceanic and Atmosphereic Administration (NOAA) flask-air measurements with the new scale. With the new NIMS filter, CO2 baseline levels are now more representative of the large-scale background compared to previous values, which contained large CO2 enhancements. Atmospheric CO2 observed in South Korea is 4 to 8 ppm greater than the global average while the amplitude of seasonal variation is similar (10~13 ppm) to the amplitude averaged over a comparable latitude zone (30°N-60°N). Variations in CO2 growth rate are also similar, increasing and decreasing similar to global values, as it reflects the net balance between terrestrial respiration and photosynthesis. In 2020, atmospheric CO2 continued increasing despite the COVID-19 pandemic. Even though fossil emission was reduced (around -7% globally), we still emitted large amounts of anthropogenic CO2. Overall, since CO2 has large natural variations and its source was derived from not only fossil fuel but also biomass burning, the small fossil emission reduction could not affect the atmospheric level directly.

The Quantitative Analysis of Cooling Effect by Urban Forests in Summer (여름철 도시 인근 산림에 의한 냉각효과의 정량화에 대한 연구)

  • Lee, Hojin;Cho, Seongsik;Kang, Minseok;Kim, Joon;Lee, Hoontaek;Lee, Minsu;Jeon, Jihyeon;Yi, Chaeyeon;Janicke, Britta;Cho, Changbeom;Kim, Kyu Rang;Kim, Baekjo;Kim, Hyunseok
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.20 no.1
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    • pp.73-87
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    • 2018
  • A variety of micro meteorological variables such as air temperature, wind, solar radiation and latent heat at Gwangneung forests (conifer and broadleaved forests) and AWS (Automated Weather Station) of Pocheon urban area were used to quantify the air temperature reduction effect of forests, which is considered to be an eco-friendly solution for reducing the urban heat island intensity during summer. In June, July and August of 2016 and 2017, the average maximum air temperature differences between above and below canopy of forests, and between the forests and urban areas were $-1.9^{\circ}C$ and $-3.4^{\circ}C$ respectively, and they occurred at 17:00. However, there was no difference between conifer and broadleaved forests. The effect of air temperature reduction by the forests was positively correlated with accumulated evapotranspiration and solar radiation from 14:00 to 17:00 and showed a negative correlation with wind speed. We have developed a model to quantify the effect of air temperature reduction by forests using these variables. The nighttime air temperature reduction effect by forests was due to the generation of cold air from radiative cooling and the air temperature inversion phenomenon that occurs when the generated cold air moves down the side of mountain. The model was evaluated in Seoul by using 28 AWSs. The evaluation shows that the air temperature of each district in Seoul was negatively correlated with the area and size of the surrounding tall vegetation that drives vegetation evapotranspiration during the day. During the night, however, the size of the surrounding tall vegetation and the elevations of nearby mountains were the main influencing factors on the air temperature. Our research emphasizes the importance of the establishment and management of urban forests and the composition of wind roads from mountains for urban air temperature reduction.