• 제목/요약/키워드: reactive co-evaporation

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IBAD-MgO 기판을 이용한 GdBCO 초전도 박막선재의 제조 (Fabrication of GdBCO Coated conductor using IBAD-MgO substrate)

  • 하홍수;이정훈;오재근;고락길;김호섭;하동우;오상수;김호겸;양주생;정승욱;문승현;박찬;유상임;염도준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.44-44
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    • 2008
  • GdBCO coated conductor have been fabricated using reactive co-evaporation. The batch type co-deposition system was specially designed and was named EDDC (evaporation using drum in dual chamber) that is possible to deposit superconducting layer with optimum composition ratio of materials at temperature over $700^{\circ}C$ and several mTorr of oxygen. The IBAD-MgO substrate with the architecture of LaMnO3(LMO)/IBAD-MgO/Hastelloy was used for coated conductor. In this study, GdBCO superconducting layer was deposited on IBAD-MgO substrate at optimal oxygen partial pressure (pO2) and deposition temperature. After fabrication of GdBCO coated conductor, critical current density was measured by 4-probe method. Surface morphology and texture of GdBCO coated conductors were analyzed by the SEM and XRD, respectively.

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스퍼터링에 의해 제도된 PZT 박막에 있어서 Ta 첨가 효과 (Effects of Ta Doping in Sputter-deposited PZT Thin Films)

  • 길덕신;주재현;주승기
    • 한국세라믹학회지
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    • 제31권8호
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    • pp.920-926
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    • 1994
  • Ta doped PZT thin films were prepared by a reactive sputtering method with a 3-gun magnetron co-sputter, and effects of Ta doping on physical and electrical properties of the films were studied. Within the doping range of 0 to 3.6 at%, Ta doping enhanced the crystallographic orientation of (110), but reduced that of (100). Ta doped PZT had a larger grain size of about 20 ${\mu}{\textrm}{m}$ compared with that of 5 ${\mu}{\textrm}{m}$ for un-doped PZT. Pits and holes of PZT films which used to appear with annealing at high temperature due to evaporation of PbO were much suppressed with addition of Ta. The leakage current could be reduced down to 1.27$\times$10-8 A/$\textrm{cm}^2$ and the charge storge density as large as 25.8$\mu$C/$\textrm{cm}^2$ was obtained.

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SmBCO 초전도 선재 특성에 대한 Sm:Ba:Cu 조성비의 영향 (Effects of Sm:Ba:Cu Composition Ratio on the Superconducting Properties of SmBCO Coated Conductor Prepared by using a Composition Gradient Method)

  • 김호섭;오상수;장세훈;민창훈;하홍수;하동우;고락길;염도준;문승현;정국채
    • Progress in Superconductivity
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    • 제13권1호
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    • pp.7-11
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    • 2011
  • 조성경사법을 이용하여 LMO/IBAD-MgO template 상에 EDDC 증착법을 이용하여 $Sm_{1+x}Ba_{2-x}Cu_{3+y}O_{7-d}$ 초전도 박막을 증착하였다. 테이프 형상의 기판상에 길이방향으로 $Sm_{1+x}Ba_{2-x}Cu_{3+y}O_{7-d}$ 박막의 조성비가 연속적으로 변하는 샘플을 얻을 수 있었고, 비접촉 Hallprobe를 이용하여 임계전류를 측정한 결과 조성비에 대응하는 연속적인 임계전류분포를 측정할 수 있었다. 본 조성비 영역 중 Sm:Ba:Cu = 1.01:1.99 :4.87의 조성비에서 최대의 임계전류를 보였다. 이 조성비에서 SmBCO 박막표면에 전체적으로 roof tile 형상의 결정립들이 관찰되었으며 국소적으로 2차상들이 관찰되었다. 조성 경사법을 이용하면 광범위한 조성비영역에서 신뢰도 높은 초전도특성, 결정배향성, 박막표면 형상 등을 조사할 수 있을 것으로 예상된다.

Investigation on the electromechanical properties of RCE-DR GdBCO CC tapes under transversely applied load

  • Gorospe, Alking B.;Shin, Hyung-Seop
    • 한국초전도ㆍ저온공학회논문지
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    • 제16권4호
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    • pp.49-52
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    • 2014
  • REBCO coated conductor (CC) tapes with superior mechanical and electromechanical properties are preferable in applications such as superconducting coils and magnets. The CC tapes should withstand factors that can affect their performance during fabrication and operation of its applications. In coil applications, CC tapes experience different mechanical constraints such as tensile or compressive stresses. Recently, the critical current ($I_c$) degradation of CC tapes used in coil applications due to delamination were already reported. Thermal cycling, coefficient of thermal expansion mismatch among constituent layers, screening current, etc. can induce excessive transverse tensile stresses that might lead to the degradation of $I_c$ in the CC tapes. Also, CC tapes might be subjected to very high magnetic fields that induce strong Lorentz force which possibly affects its performance in coil applications. Hence, investigation on the delamination mechanism of the CC tapes is very important in coiling, cooling, operation and design of prospect applications. In this study, the electromechanical properties of REBCO CC tapes fabricated by reactive co-evaporation by deposition and reaction (RCE-DR) under transversely applied loading were investigated. Delamination strength of the CC tape was determined using the anvil test. The $I_c$ degraded earlier under transverse tensile stress as compared to that under compressive one.

전기-수력학적 분무(Electro-Hydrodynamic Spray)를 이용한 MOCVD에 의한 BaO, SrO, $TiO_2$ 박막의 특성 연구

  • 이영섭;박용균;정광진;이태수;조동율;천희곤
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2000년도 추계학술발표회 초록집
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    • pp.22-22
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    • 2000
  • DRAM의 고접적화에 따라 기존의 반도체 공정에서 사용중인 여러 가지 기술들이 대부분 그 한계를 보이고 었으며, 대표적인 것이 캐퍼시터 형성기술이다. 따라서 1G DRAM급 이상의 초고집적 회로를 실용화하기 위해서 유전율이 높은 BST ($BrSrTiO_3$) 박막을 이용하여 캐패시터를 제조하려는 기술도 반드시 해결되어야 현재 활발히 실용화 연구가 진행중에 있다. BST 박막을 제조하는 방법은 RF magnetron sputtering, Ion beam reactive co-evaporation, LSM (Liquid Source Misted) CVD, MOCVD 등의 법으로 제조되고 있다. 본 연구에서는 전기-수력 학적 분무(Electro-Hydrodynamic Spray)현상을 이용한 MOCVD에 BaO, SrO, $TiO_2$ 박막을 증착 하여 전기장세기, 기판온도, 시간 등에 따른 특성을 조사하였다. 전기수력학적 분무를 이용한 증착법은 원료를 함유하는 용액을 이용함으로써 이송관의 가열이 필요 없이 장치를 간단하게 할 수 있고, 용액의 유량과 전기장의 세기에 따라 초미세 입자제어도 가능하며, 박막의 조성을 출발 용액으로 부터 조절하는 등의 특징을 가지고 있다. 증착한 박막의 표면, 단면 형상 및 조성을 분석하였고 결정화 여부 및 우선 배향성을 조사하였다. 현재는 개별 박막의 표현 형상과 조성에 대한 연구 결과를 얻었으며, 계속해서 박 막의 여러 특성에 대하 연구할 계획이다.

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2단 분류층 가스화기에서 합성가스 생성을 위한 석탄 슬러리 가스화에 대한 수치 해석적 연구 (Numerical simulation of gasification of coal-water slurry for production of synthesis gas in a two stage entrained gasifier)

  • 서동균;이선기;송순호;황정호
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2007년도 추계학술대회 논문집
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    • pp.417-423
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    • 2007
  • Oxy-gasification or oxygen-blown gasification, enables a clean and efficient use of coal and opens a promising way to CO2 capture. The coal gasification process of a slurry feed type, entrained-flow coal gasifier was numerically predicted in this paper. The purposes of this study are to develop an evaluation technique for design and performance optimization of coal gasifiers using a numerical simulation technique, and to confirm the validity of the model. By dividing the complicated coal gasification process into several simplified stages such as slurry evaporation, coal devolatilization, mixture fraction model and two-phase reactions coupled with turbulent flow and two-phase heat transfer, a comprehensive numerical model was constructed to simulate the coal gasification process. The influence of turbulence on the gas properties was taken into account by the PDF (Probability Density Function) model. A numerical simulation with the coal gasification model is performed on the Conoco-Philips type gasifier for IGCC plant. Gas temperature distribution and product gas composition are also presented. Numerical computations were performed to assess the effect of variation in oxygen to coal ratio and steam to coal ratio on reactive flow field. The concentration of major products, CO and H2 were calculated with varying oxygen to coal ratio (0.2-1.5) and steam to coal ratio(0.3-0.7). To verify the validity of predictions, predicted values of CO and H2 concentrations at the exit of the gasifier were compared with previous work of the same geometry and operating points. Predictions showed that the CO and H2 concentration increased gradually to its maximum value with increasing oxygen-coal and hydrogen-coal ratio and decreased. When the oxygen-coal ratio was between 0.8 and 1.2, and the steam-coal ratio was between 0.4 and 0.5, high values of CO and H2 were obtained. This study also deals with the comparison of CFD (Computational Flow Dynamics) and STATNJAN results which consider the objective gasifier as chemical equilibrium to know the effect of flow on objective gasifier compared to equilibrium. This study makes objective gasifier divided into a few ranges to study the evolution of the gasification locally. By this method, we can find that there are characteristics in the each scope divided.

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Refinement of Gd2O3 inclusions in the GdBa2Cu3O7-δ films fabricated by the RCE-DR process

  • Park, I.;Oh, W.J.;Lee, J.H.;Moon, S.H.;Yoo, S.I.
    • 한국초전도ㆍ저온공학회논문지
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    • 제20권4호
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    • pp.46-49
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    • 2018
  • To improve in-field critical current densities ($J_c$) of $GdBa_2Cu_3O_{7-{\delta}}$ (GdBCO) coated conductors(CCs) fabricated by the reactive co-evaporation by deposition and reaction (RCE-DR) process, employing the nominal composition of Gd:Ba:Cu=1:1:2.5, we tried to refine the $Gd_2O_3$ particles trapped in the GdBCO superconducting matrix. For this purpose, we carefully selected the processing conditions on the stability phase diagram of GdBCO for this composition. By lowering the growth temperature of $Gd_2O_3$ in the liquid, we could refine the average particle size of $Gd_2O_3$ particles trapped in the GdBCO matrix and also achieve the zero-resistive transition temperatures ($T_{c,zero}$) of 92.3~94.2 K. Unfortunately, however, it was unsuccessful to achieve enhanced in-field $J_c$ values from these samples because of an air-contamination of the amorphous precursor film before its conversion into crystalline GdBCO film, suggesting that any exposure of the amorphous precursor film to air is fatal in obtaining high performance GdBCO CCs via the RCE-DR process.

초저온 냉각 트랩을 결합한 비활성기체 동위원소 희석 질량분석 시스템의 제작 (Development of a Noble Gas Isotope Dilution Mass Spectrometric System Combined with a Cryogenic Cold Trap)

  • 홍봉재;신동엽;박기홍;함도식
    • 한국해양학회지:바다
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    • 제27권3호
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    • pp.144-157
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    • 2022
  • 비활성기체는 화학적, 생물학적 반응을 하지 않는 보존적인 특성을 가지고 있어 해양에서 수온과 염분 변화, 기체 주입, 해수의 혼합과 빙하 융해수의 분포와 같은 물리적인 변화의 추적자로 활용되고 있다. Ne, Ar과 Kr을 정밀하게 분석하기 위해 사중극자 질량 분석기, 고진공 전처리 라인, 초저온 냉각 트랩과 동위원소 표준기체로 구성된 분석 시스템을 제작했다. 고진공 라인은 시료의 용존 기체를 추출하여 동위원소 표준기체와 혼합하는 시료추출부, 합금 물질을 이용하여 반응성 기체를 제거하고 초저온 냉각 트랩으로 비활성기체를 기화점에 따라 분별 증류하는 기체 준비부, 비활성기체를 원소별로 측정하는 기체 측정부로 구성하였다. 기체준비부에 결합한 초저온 냉각 트랩은 질량분석기 내 Ar와 CO2의 부분압을 현저히 낮추어 Ne 동위원소 분석의 오차를 감소시켰다. 동위원소 표준기체는 22Ne, 36Ar과 86Kr를 혼합하여 제작하였고, 혼합 표준 기체의 원소별 양은 대기를 반복 측정하여 역동위원소 희석법으로 결정했다. 대기 평형수 반복 분석의 상대 오차는 Ne, Ar과 Kr에 대해 각각 0.7%, 0.7%, 0.4%이었다. 반복 측정한 대기 평형수의 농도와 포화 농도의 차이로 확인한 분석시스템의 정확도는 Ne, Ar, Kr에 대해 각각 0.5%, 1.0%, 1.7%이었다.