• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.2
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• pp.104-109
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• 2011

I present a method of aspheric surface profile measurement using 2nd derivative of local area profile. This method is based on the principle of curvature sensor which measures the local 2nd derivative under test along a line. The profile is then reconstructed from the data on the each point. Unlike subaperture-stiching method and slope detection method, 2nd derivative method has strong points from a geometric point of view in measuring the aspheric surface profile. The second derivative terms of surface profile is an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.666-670
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• 2004

VLSI 소자에서 design rule(D/R)이 작아져 각 단위 Pattern의 size가 작아짐에 따라 aspect ratio가 커지게 되었다. 산화막 contact etch를 하는데 있어 산화막 측벽을 보호하는데, 이러한 보호막은 주로 fluoro-carbon 계열의 polymer precursor들이 사용된다. Aspect ratio(A/R)가 5 이하일 때에는 측벽의 보호막에 의한 바닥 변형이 문제가 되지 않으나, 10 이상의 A/R를 가진 contact에서는 크기가 줄고, 모양이 불균형하게 변하는 바닥 변형을 쉴게 관찰할 수 있다. 이러한 바닥 변형이 커지면 contact 저항이 높아지는 것은 물론이고, 심하게는 하부 pattern과 overlap 불량을 유발할 수 있다. 본 논문에서는 바닥변형을 일으키는 원인을 분석하고 fluoro-carbon 계열의 polymer precursor의 종류$(C_4_F6\;vs.\;C_3F_8)$에 따른 polymer증착 상태 확인 및 pattern비대칭에 따른 바닥 변형의 고찰과 plasma etching 시 H/W 변형을 통해 바닥 변형이 거의 없는 조건을 찾아낼 수 있었다.

• The Journal of the Korea institute of electronic communication sciences
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• v.9 no.11
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• pp.1227-1232
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• 2014

This paper relates 10% shrink from $0.13{\mu}m$ design for core devices as well as input and output (I/O) devices different from previous poly length shrink size only. We analyzed body effect with different channel length and doping profile simulation. After fixing the gate oxide module process, LDD implant conditions were optimized such as decoupled plasma nitridation of gate oxide, TEOS oxide $100{\AA}$ before LDD implant and 22o tilt-angle(45o twist-angle) LDD implant respectively to match the spice DC parameters of pre-shrink and finally matched them within 5%.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.433-436
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• 2002

Retardation liquid crystal films with a profiled titled optic axis (splay films) of both nematic and discotic types are used as compensation films for twisted nematic displays (TN-LCD). A new method is developed to characterize retardation vs. inclination (retardation profile) of splay films by three parameters: "full retardation" $d^{\ast}{\triangle}n$, "inplane retardation" $R_0$ and "retardation difference" $R_d$ . Splay films with the same retardation profile but with different tilt profile (retardation invariants) are discovered. Splay films with different structure parameters but belong to the same retardation invariant have the same compensation opportunities for TN-LCD.

• Journal of the Optical Society of Korea
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• v.18 no.2
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• pp.156-161
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• 2014

Anisotropy profile of a rubbed polyimide film is investigated using both a modified ultra high precision transmission ellipsometer and the analysis software previously developed to determine the optic axis distribution of discotic liquid crystals in the wide view film. The distorted sinusoidal variation of the ellipsometric constants obtained at an oblique angle of incidence indicates that the optic axis varies from $14.7^{\circ}$ to $40.6^{\circ}$ from the sample plane. The magnitude and distribution of anisotropy is expressed in terms of no, ne, and the cosine-shaped tilt angle distribution of the optic axis in a rubbed polyimide film.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.2
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• pp.101-106
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• 1999

The main consideration factor to design a magnetron of the sputtering system for TFT-LCD metallization is high sheet resistance (Rs) uniformity which is provided by the high target erosion and high current efficiency. The present study has developed a rectangular magnetron for TFT-LCD to bve considered full target erosion and high film uniformity. After an aluminum-2 at.% and alloy target was installed in a magnetron source and the film was deposited on the glass of 600${\times}$720 mm, the Rs uniformity of the deposited film was measured as functions of the magnet tilt and magnet scanning configuration. And the target erosion profile was observed with the target voltage. When sputtered at 4mtorr and 10kW, the magnet tilt for the high Rs uniformity of 8.38% was 7mm. The plasma voltage at the dwell home and end for full-face target erosion, when scanned the magnetron was 120% compared to the mean voltage of the other area.

• Journal of Power System Engineering
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• v.20 no.3
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• pp.64-73
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• 2016

In this research work, an algorithm development on tracking end-point of aerial work platform with jib profile and bend-linked boom was carried out to find the X, Y and Z direction value using coordinate transformation matrix. This matrix consists of device status value(length and angle) based on camera position axis, which are sent from device controller PLUS+1 by CAN protocol. These values are used to measure the distance and angle from the camera to the end-point. Using these distance and angle value, monitoring system controls FAN/TILT/ZOOM status of camera to get an adequate scene of workplace. This program was written in Java, C# and C for mobile device. These results provide the information to the aerial work device for secure operation.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.10a
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• pp.26-31
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• 1998

The effect of tool angles on the surface roughness in face milling is studied. First, the relation between tool angles and rotation angles is identified. Using this relationship, it is obtained that the projection of insert nose shape on cutting profile, which is a part of ellipse. The effect of spindle tilt is also considered for the tool angles. It si shown that tool angles along with nose radius and feed rate have an effect on surface roughness.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.05a
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• pp.240-244
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• 1999

This paper deals with the establishment of the cutting direction on inclined plane by using ball end mill. Ball-end milling is widely used for free form surface die and mold. In these machining, the cutting parts vary because the tool tip is hemisphere shaped. The cutting characteristics, such as cutting force, surface roughness and surface profile are varied according to the variation of cutting directions. The effective tool diameter was calculated on different tilt angles and tool-path. Tool life and cutting characteristics were estimated on variation of cutting directions in the same cutting speed. In this paper, the optimal cutting direction which can be applied 3-D sculpture surface cutting is suggested.

• Journal of the Korea institute for structural maintenance and inspection
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• v.15 no.3
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• pp.116-124
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• 2011

In this study, a new method to estimate the bridge deflection is developed by using Wireless Tilt Sensor. Most of evaluations of structural integrity, it is very important to measure the geometric profile, which is a major factor representing the global behavior of civil structure, especially bridges. In the past, Because of the lack of appropriate methods to measure the deflection curve of bridges on site, the measurement of deflection had been done restrictly within just a few discrete points along the bridge. Also the measurement point could be limited to locations installed with displacement transducers. So, in this study, the deflection of the structure was measured by wireless tilt sensor instead of LVDT(Linear Variable Differential Transformer). Angle change of tilt sensor shows structural behavior by the change of the resistor values which is presented to voltage. Moreover, the maximum deflection was calculated by changing the deflection angle which was calculated as V(measured voltage) ${\times}$F(factor) to deflection. The experimental tests were carried out to verify the developed deflection estimation techniques. Because the base of tilt measuring is the gravity, uniform measurement is possible independent of a measuring point. Also, measuring values were showed very high accuracy.