Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Development of Aspheric Surface Profilometry using 2nd Derivative

형상의 이차미분을 이용한 비구면 형상측정기술 개발

  • 김병창 (경남대학교 기계자동화공학부)
  • Received : 2011.03.09
  • Accepted : 2011.04.11
  • Published : 2011.04.30
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Abstract

I present a method of aspheric surface profile measurement using 2nd derivative of local area profile. This method is based on the principle of curvature sensor which measures the local 2nd derivative under test along a line. The profile is then reconstructed from the data on the each point. Unlike subaperture-stiching method and slope detection method, 2nd derivative method has strong points from a geometric point of view in measuring the aspheric surface profile. The second derivative terms of surface profile is an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.

Keywords

References

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