• Title/Summary/Keyword: process measurement

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System calibration method for Silicon wafer warpage measurement (실리콘 웨이퍼 휨형상 측정 정밀도 향상을 위한 시스템변수 보정법)

  • Kim, ByoungChang
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.13 no.6
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    • pp.139-144
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    • 2014
  • As a result of a mismatch of the residual stress between both sides of the silicon wafer, which warps and distorts during the patterning process. The accuracy of the warpage measurement is related to the calibration. A CCD camera was used for the calibration. Performing optimization of the error function constructed with phase values measured at each pixel on the CCD camera, the coordinates of each light source can be precisely determined. Measurement results after calibration was performed to determine the warpage of the silicon wafer demonstrate that the maximum discrepancy is $5.6{\mu}m$ with a standard deviation of $1.5{\mu}m$ in comparison with the test results obtained by using a Form TalySurf instrument.

In-process Measurement of Surface Profile using CCD (CCD를 이용한 인프로세스 표면형상의 계측)

  • 이기용;강명창;김정석;조인순
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.255-258
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    • 1995
  • Surface profile is an important paramerer to evaluate accuracy of machined worpiece. It is necessary to acquire this data by in-process measurement. Recent researchers have introduced Machine Vision technique to achieve it. But it is difficult to apply it to industry field yet. In this study, in-process measuring system of surface profile is developed using CCD camera. The effect of illuminance according to incident angle is investigated and surface profile from surface tester and illuminance graph are compared experimentally.

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A manufacturability measurement for design for manufacturing in net shape process

  • Lee, Chang-Ho
    • Proceedings of the Korean Operations and Management Science Society Conference
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    • 1994.04a
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    • pp.467-477
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    • 1994
  • The objective of this research is to develop a manufacturability measurement model for process and material screening. The process and material screening is the key requirement for implementing the Design for Manufacturability (Concurrent Engineering). A computerized system realizing this model then is developed to aid designers. Identification of the key factors which influence technical manufacturability, decision variables and their characteristics, conceptual framework for implementing the model are suggested. Manufacturability measure for quantifying the consistency of between the product requirements and the manufacturing capability is important contribution of this research. The focus is on net shape manufacturing process such as diecasting, forging, metal forming and injection molding.

Selection and Verification of Press Forming Pipe Model using Pipefitting (피팅용 프레스 포밍 파이프 성형 모델 선정 및 검증)

  • Kim, TaeGual;Kim, TaeHo;Park, JoonHong;Park, YoungChul
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.14 no.3
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    • pp.43-49
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    • 2015
  • This paper describes the design of a forged fitting form to acquire a method of product design measurement by target measurement standards. The pipefitting connects each pipe and combines seals and nipples with the pipes normally. Therefore, the section combined with the fitting pipe was measured by a 3D scanner, and the acquired measurement and the design measurement were obtained after modification of the forged fitting pipe by that standard. Moreover, the accuracy of the model was verified through leakage testing of the oil and verification of the design measurement for accuracy decisions on the design measurement after modification of the product.

Development of Vehicle Clutch Discs Cushion Variation Measurement Device Using a Variable Load Electric Press (하중 가변형 전동 프레스를 이용한 차량용 클러치 디스크 쿠션 변위량 측정 장치 개발)

  • Park, Seung-Gyu;Choi, Hae-Woon
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.15 no.6
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    • pp.64-69
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    • 2016
  • Vehicle clutch measurement for disc cushion variation was developed for the production of high quality Dual clutch transmissions. The developed device is composed of load cells for load measurement and LVDT for measuring the distance variation measurement in cushion variation. The servo motor-driven electric press for flexible loads that was developed was controlled by a PC-based HMI system, LabVIEW, and the device was able to continuously record real time measurement data with the accuracies of ${\pm}0.1\;kgf$ load and ${\pm}5{\mu}m$ cushion amount, which is far above the requirements of commercial vehicle standards.

Development of a Measurement System for Curved Ship Hull Plates with Multi-Slit Structured Light (다중 슬릿 구조화 광원을 이용한 곡판 측정장치 개발)

  • Lee, Hyunho;Lee, Don Jin;Huh, Man Joo
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.3
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    • pp.292-299
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    • 2013
  • The measurement in the manufacturing process of curved ship hull plates still depends on wooden templates as a standard instrument. The metrology-enabled automation in the shipbuilding process has been challenged instead of line measurement with wooden templates. The developed measurement system consists of a CCD camera, multiple structured laser sources and 3-DOF motion device. The system carries out measurement of curved profiles for large scale plates by an optical triangulation method. The results of experiment conducted in a manufacturing shop demonstrate the accurate and robust performance.

Case Study on the Compatibility of Measurement Systems with Part-to-part Variations in Automobile Industry

  • Lee, Myung-Duk;Lim, Ik-Sung;Sung, Chun-Ja
    • International Journal of Reliability and Applications
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    • v.9 no.1
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    • pp.17-30
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    • 2008
  • Analysis of measurement systems is important to determine if the measurement process is adequate to measure the part-to-part variability in the process. Control chart techniques provide an effective, and easy-to-use method for performing this analysis. However, application with the real data for the evaluation procedure for multiple measurement systems have not been demonstrated. This research will provide a methodology for the evaluation of part-to-part variation and variation of different measurement systems step by step followed by number of case studies for each methodologies provided.

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Development of a Measurement System Development for On-Line Testing of High Speed Railway (고속철도 시운전시험 계측시스템 개발에 관한 연구)

  • 김석원;김영국;한영재;박찬경;김진환;백광선
    • Journal of the Korean Society for Railway
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    • v.5 no.3
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    • pp.158-166
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    • 2002
  • In this paper, we introduce the software and hardware of the measurement system for on-line testing and evaluation of high speed railway. The test items focus on the verification of the performance and acquirement of the technical data of the high speed railway system. The software controls the hardware of the measurement system, perform the analysis and calculation of measurement data and acts as interface between users and the system hardware. For this purpose, three programs a measuring program, a monitoring program and post-processing program are developed. The detailed test scenario is in the process of development to closely follow the process of development and design of the system.

A Study on the Thermal Effects Measurement and Uncertainty Estimation for High Precision Machine Tools (고정밀 공작기계의 열적효과 측정 및 불확도 추정에 관한 연구)

  • Son, Deok-Soo;Kim, Sang-Hwa;Park, Il-Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.2
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    • pp.107-113
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    • 2013
  • When the main spindle of high precision machine tools are run many hours, heat is generated in bearing parts of the inside of the spindle. Also, headstock is appeared distortion by inside and outside temperature difference of a machine. This paper studies method to measure behavior of machine tool about these thermal effects. In addition, it estimates measurement uncertainty factors which can be appeared in thermal effects measurement. Finding the factor of thermal affect measurement is important for estimation of measurement uncertainty. This paper measures thermal effects of high precision machine tools and evaluates the important factors of uncertainty.

The Evaluation Tool and Process for Effective Education Outcomes Measurement and Analysis of Computer Education

  • Kim, Young-Tak;Sim, Gab-Sig
    • Journal of the Korea Society of Computer and Information
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    • v.21 no.9
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    • pp.149-156
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    • 2016
  • This paper is concerned with education courses operating practices for basic computer literacy training. In this study, we propose an example for students to effectively measure and evaluate the achievement of defined ability in the performance measurement and analysis, learning objectives and learning outcomes set in operation throughout the course. Through research and development use case presents the tools for teaching method and effective and objective measurement of the related subjects. And based on the results, we propose the possibility of utilizing NCS-based course operation and education certification. In this study, the measurement process is based on the association with the objective of the development and operation, and measurement tools, measuring tools for measuring learning outcomes associated with the curriculum design methods for the measurement and evaluation of the case of the operation of the course units of learning outcomes and the method proposed.