• Title/Summary/Keyword: process control techniques

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A Semiconductor Etching Process Monitoring System Development using OES Sensor (OES 센서를 이용한 반도체 식각 공정 모니터링 시스템 개발)

  • Kim, Sang-Chul
    • Journal of the Korea Society of Computer and Information
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    • v.18 no.3
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    • pp.107-118
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    • 2013
  • In this paper, we developed the semiconductor monitoring system for the etching process. Around the world, expert companies are competing fiercely since the semiconductor industry is a leading value-added industry that produces the essential components of electronic products. As a result, many researches have been conducted in order to improve the quality, productivity, and characteristics of semiconductor products. Process monitoring techniques has an important role to give an equivalent quality and productivity to produce semiconductor. In fact, since the etching process to form a semiconductor circuit causes great damage to the semiconductors, it is very necessary to develop a system for monitoring the process. The proposed monitoring system is mainly focused on the dry etching process using plasma and it provides the detailed observation, analysis and feedback to managers. It has the functionality of setting scenarios to match the process control automatically. In addition, it maximizes the efficiency of process automation. The result can be immediately reflected to the system since it performs real-time monitoring. UI (User Interface) provides managers with diagnosis of the current state in the process. The monitoring system has diverse functionalities to control the process according to the scenario written in advance, to stop the process efficiently and finally to increase production efficiency.

Uncertainty Analysis of Quantitative Radar Rainfall Estimation Using the Maximum Entropy (Maximum Entropy를 이용한 정량적 레이더 강우추정 불확실성 분석)

  • Lee, Jae-Kyoung
    • Atmosphere
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    • v.25 no.3
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    • pp.511-520
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    • 2015
  • Existing studies on radar rainfall uncertainties were performed to reduce the uncertainty for each stage by using bias correction during the quantitative radar rainfall estimation process. However, the studies do not provide quantitative comparison with the uncertainties for all stages. Consequently, this study proposes a suitable approach that can quantify the uncertainties at each stage of the quantitative radar rainfall estimation process. First, the new approach can present initial and final uncertainties, increasing or decreasing the uncertainty, and the uncertainty percentage at each stage. Furthermore, Maximum Entropy (ME) was applied to quantify the uncertainty in the entire process. Second, for the uncertainty quantification of radar rainfall estimation at each stage, this study used two quality control algorithms, two rainfall estimation relations, and two bias correction techniques as post-processing and progressed through all stages of the radar rainfall estimation. For the proposed approach, the final uncertainty (ME = 3.81) from the ME of the bias correction stage was the smallest while the uncertainty of the rainfall estimation stage was higher because of the use of an unsuitable relation. Additionally, the ME of the quality control was at 4.28 (112.34%), while that of the rainfall estimation was at 4.53 (118.90%), and that of the bias correction at 3.81 (100%). However, this study also determined that selecting the appropriate method for each stage would gradually reduce the uncertainty at each stage. Finally, the uncertainty due to natural variability was 93.70% of the final uncertainty. Thus, the results indicate that this new approach can contribute significantly to the field of uncertainty estimation and help with estimating more accurate radar rainfall.

Characteristics of Symmetric-Shape Parts Shearing on Micro NCT (마이크로 NCT에 의한 대칭형상구멍의 전단특성)

  • Hong N. P.;Kim B. H.;Chang I. B.;Kim H. Y.;Oh S. I.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2002.02a
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    • pp.285-291
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    • 2002
  • The shearing process for the sheet metal is normally used in the precision elements such as a frame of TFT-LCD or lead frame of If chips. In these precision elements, the burr formation prevents the system assembly and needs the additional burr removing process. In this paper, we developed the small size NC punching system which has an aligning kinematics between the rectangular shaped punch and die. The punch is driven by an ai cylinder and the sheet metal is moving on the X-Y table system which is driven by two stewing motors. The microprocessor control the whole system and communicate with the monitoring PC by RS232C serial communication protocol. The graphic user interface program in PC monitors nil control the punching system. The cross shaped joint hinge supports the punching die and positioned by two differential screws, whose are installed in perpendicular directions. The aligning between the punch and die is performed using the sheets of half thickness(0.1mm Brass) of the real process for the frame of the TFT-LCD. Using half thickness Brass, the burr formation is magnified and we can decide the aligning direction more easily then using the real thickness(0.2mm) Aluminum. In this paper, the aligning results are measured manually using the SEM photographs and we hope to make the automated aligning procedures using some kinds of image processing techniques.

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AWGN Removal using Pixel Noise Characteristics of Image (영상의 잡음 특성 추정을 이용한 AWGN 제거)

  • Cheon, Bong-Won;Kim, Nam-Ho
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.23 no.12
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    • pp.1551-1557
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    • 2019
  • In modern society, a variety of video media have been widely spread in line with the fourth industrial revolution and the development of IoT technology; in accordance with this trend, numerous researches have been performed to remove noise generated in image and data communications. However, the conventional Additive White Gaussian Noise (AWGN) cancellation techniques are likely to induce a blurring phenomenon in the noise removal process, thus impairing the information of the image. In this study, we propose an algorithm for minimizing the loss of image information in the removal process of AWGN. The proposed algorithm can apply weights according to the characteristics of noise by predicting AWGN in the image, where the output is calculated based on adding and subtracting the outputs of the high pass filter and the low pass filter. Compared to the existing method, the noise reduction using the proposed algorithm exhibited less blurring issues and better noise reduction properties in the AWGN removal process.

A Study on the Importance Analysis of Reliability, Security, Economic Efficiency Factors that Companies Should Determine When Adopting Cloud Computing Services (클라우드 컴퓨팅 서비스 채택 시 기업이 판단해야 하는 신뢰성, 보안성, 경제성 요인의 중요도 분석)

  • Kang, Da-Yeon
    • Journal of Digital Convergence
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    • v.19 no.9
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    • pp.75-81
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    • 2021
  • The purpose of this research is to derive and evaluate priorities for critical factors that must be determined before an enterprise adopts a cloud computing service. AHP analysis techniques were used to reflect decisions made by experts as research methods. AHP is a decision-making technique that expresses complex decision-making problems hierarchically and derives the best alternatives through pairwise comparison between the items of the hierarchy. Compared to the existing statistical decision making techniques, the decision making process is systematic and simple, making it easy to understand. In addition, the procedure is also reasonable by providing an indicator to determine the consistency of the decision maker in the analysis process. The analysis results of this research showed that security was the first priority, reliability was the second priority, and economic efficiency was the third priority. Among the factors in the first-priority security items, the access control rights and the safety factors of external threats are the most important factors. Research results can be used as a guideline in future practice, and it is necessary to evaluate, compare and analyze the satisfaction of companies that have adopted cloud computing services in the future.

An Aggregate Detection of Event Correlation using Fuzzy Control (퍼지제어를 이용한 관련성 통합탐지)

  • 김용민
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.13 no.3
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    • pp.135-144
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    • 2003
  • An intrusion detection system shows different result over overall detection area according to its detection characteristics of inner detection algorithms or techniques. To expand detection areas, we requires an integrated detection which can be archived both by deploying a few detection systems which detect different detection areas and by combining their results. In addition to expand detection areas, we need to decrease the workload of security managers by false alarms and improve the correctness by minimizing false alerts which happen during the process of integration. In this paper, a method for aggregation detection use fuzzy inference to integrate a vague detection results which imply the characteristics of detection systems. Their analyzed detection characteristics are expressed as fuzzy membership functions and fuzzy rule bases which are applied through the process of fuzzy control. And, it integrate a vague decision results and minimize the number of false alerts by reflecting the characteristics of detection systems. Also it does minimize inference objects by applying thresholds decided through several experiments.

The effect of film morphology by bar-coating process for large area perovskite solar modules

  • Ju, Yeonkyeong;Kim, Byeong Jo;Lee, Sang Myeong;Yoon, Jungjin;Jung, Hyun Suk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.416-416
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    • 2016
  • Organic-inorganic metal halide perovskite solar cells have received attention because it has a number of advantages with excellent light harvesting, high carrier mobility, and facile solution processability and also recorded recently power conversion efficiency (PCEs) of over 20%. The major issue on perovskite solar cells have been reached the limit of small area laboratory scale devices produced using fabrication techniques such as spin coating and physical vapor deposition which are incompatible with low-cost and large area fabrication of perovskite solar cells using printing and coating techniques. To solution these problems, we have investigated the feasibility of achieving fully printable perovskite solar cells by the blade-coating technique. The blade-coating fabrication has been widely used to fabricate organic solar cells (OSCs) and is proven to be a simple, environment-friendly, and low-cost method for the solution-processed photovoltaic. Moreover, the film morphology control in the blade-coating method is much easier than the spray coating and roll-to-roll printing; high-quality photoactive layers with controllable thickness can be performed by using a precisely polished blade with low surface roughness and coating gap control between blade and coating substrate[1]. In order to fabricate perovskite devices with good efficiency, one of the main factors in printed electronic processing is the fabrication of thin films with controlled morphology, high surface coverage and minimum pinholes for high performance, printed thin film perovskite solar cells. Charge dissociation efficiency, charge transport and diffusion length of charge species are dependent on the crystallinity of the film [2]. We fabricated the printed perovskite solar cells with large area and flexible by the bar-coating. The morphology of printed film could be closely related with the condition of the bar-coating technique such as coating speed, concentration and amount of solution, drying condition, and suitable film thickness was also studied by using the optical analysis with SEM. Electrical performance of printed devices is gives hysteresis and efficiency distribution.

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Microbial Biotechnology Powered by Genomics, Proteomics, Metabolomics and Bioinformatics

  • Lee, Sang-Yup
    • Proceedings of the Korean Society for Bioinformatics Conference
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    • 2000.11a
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    • pp.13-16
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    • 2000
  • Microorganisms have been widely employed for the production of useful bioproducts including primary metabolites such as ethanol, succinic acid, acetone and butanol, secondary metabolites represented by antibiotics, proteins, polysaccharides, lipids and many others. Since these products can be obtained in small quantities under natural condition, mutation and selection processes have been employed for the improvement of strains. Recently, metabolic engineering strategies have been employed for more efficient production of these bioproducts. Metabolic engineering can be defined as purposeful modification of cellular metabolic pathways by introducing new pathways, deleting or modifying the existing pathways for the enhanced production of a desired product or modified/new product, degradation of xenobiotics, and utilization of inexpensive raw materials. Metabolic flux analysis and metabolic control analysis along with recombinant DNA techniques are three important components in designing optimized metabolic pathways, This powerful technology is being further improved by the genomics, proteomics, metabolomics and bioinformatics. Complete genome sequences are providing us with the possibility of addressing complex biological questions including metabolic control, regulation and flux. In silico analysis of microbial metabolic pathways is possible from the completed genome sequences. Transcriptome analysis by employing ONA chip allows us to examine the global pattern of gene expression at mRNA level. Two dimensional gel electrophoresis of cellular proteins can be used to examine the global proteome content, which provides us with the information on gene expression at protein level. Bioinformatics can help us to understand the results obtained with these new techniques, and further provides us with a wide range of information contained in the genome sequences. The strategies taken in our lab for the production of pharmaceutical proteins, polyhydroxyalkanoate (a family of completely biodegradable polymer), succinic acid and me chemicals by employing metabolic engineering powered by genomics, proteomics, metabolomics and bioinformatics will be presented.

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Implemention of a DTIF Controller for Robust Drive of a 3 Phase Induction Motor in High-Speed Elevator (고속 엘리베이터에서 3상 유도전동기의 강건한 구동을 위한 DTIF 제어기의 구현)

  • 김동진;강창수;한완옥
    • The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.9 no.3
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    • pp.88-96
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    • 1995
  • High speed elevator requires precise drive included in zero speed at start/stop drive for the high stability and controllability. The vector control techniques, which have been used for the precise operation of induction motor, can be divided into two classes; The indirect vector control by slip frequency and the direct vector control by field orientation. The existing direct vector control technique has a robustness against the change of motor parameter and the existing indirect vector control technique has a strength of control ability in the wide speed range comparatively. This study presents the DTIF (Direct Torque Indirect Flux) controller which has robust movement in the transition state and in about zero and low speed using the control technique in which torque is controlled by the direct vector technique and flux is controled by indirect vector technique. The proposed system is verified by simulation and experiment for driving 3 phase induction motor. The process of transition which is from about zero speed and low speed to high speed is compared and measured to specification of phase voltage, phase current and DC link current. It is verified that DTIF controller show robust and stable speed variation.

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Controlled Formation of Surface Wrinkles and Folds on Poly (dimethylsiloxane) Substrates Using Plasma Modification Techniques

  • Nagashima, So;Hasebe, Terumitsu;Hotta, Atsushi;Suzuki, Tetsuya;Lee, Kwang-Ryeol;Moon, Myoung-Woon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.223-223
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    • 2012
  • Surface engineering plays a significant role in fabricating highly functionalized materials applicable to industrial and biomedical fields. Surface wrinkles and folds formed by ion beam or plasma treatment are buckling-induced patterns and controlled formation of those patterns has recently gained considerable attention as a way of creating well-defined surface topographies for a wide range of applications. Surface wrinkles and folds can be observed when a stiff thin layer attached to a compliant substrate undergoes compression and plasma treatment is one of the techniques that can form stiff thin layers on compliant polymeric substrates, such as poly (dimethylsiloxane) (PDMS). Here, we report two effective methods using plasma modification techniques for controlling the formation of surface wrinkles and folds on flat or patterned PDMS substrates. First, we show a method of creating wrinkled diamond-like carbon (DLC) film on grooved PDMS substrates. Grooved PDMS substrates fabricated by a molding method using a grooved master prepared by photolithography and a dry etching process were treated with argon plasma and subsequently coated with DLC film, which resulted in the formation of wrinkled DLC film aligning perpendicular to the steps of the pre-patterned ridges. The wavelength and the amplitude of the wrinkled DLC film exhibited variation in the submicron- to micron-scale range according to the duration of argon plasma pre-treatment. Second, we present a method for controlled formation of folds on flat PDMS substrates treated with oxygen plasma under large compressive strains. Flat PDMS substrates were strained uniaxially and then treated with oxygen plasma, resulting in the formation of surface wrinkles at smaller strain levels, which evolved into surface folds at larger strain levels. Our results demonstrate that we can control the formation and evolution of surface folds simply by controlling the pre-strain applied to the substrates and/or the duration of oxygen plasma treatment.

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