• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.82-90
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.7
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• pp.1234-1242
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• 2003

In this paper we present a simple and efficient robust optimal design formulation for MEMS structures and its application to a resonant-type micro probe. The basic idea is to use the gradient index (GI) to improve robustness of the objective and constraint functions. In the robust optimal design procedure, a deterministic optimization for performance of MEMS structures is followed by design sensitivity analysis with respect to uncertainties such as fabrication errors and change of operating conditions. During the process of deterministic optimization and sensitivity analysis, dominant performance and uncertain variables are identified to define GI. The GI is incorporated as a term of objective and constraint functions in the robust optimal design formulation to make both performance and robustness improved. While most previous approaches for robust optimal design require statistical information on design variations, the proposed GI based method needs no such information and therefore is cost-effective and easily applicable to early design stages. For the micro probe example, robust optimums are obtained to satisfy the targets for the measurement sensitivity and they are compared in terms of robustness and production yield with the deterministic optimums through the Monte Carlo simulation. This method, although shown for MEMS structures, may as well be easily applied to conventional mechanical structures where information on uncertainties is lacking but robustness is highly important.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.2
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• pp.89-96
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• 2007

The bobbin probe examination is basic and the important method among other ECT techniques for the steam generator tube integrity assesment that is practiced during each plant outage. The bobbin probe is one of the essential components which consist of the whole ECT examination system, and provides us a decisive data for the evaluation of tube integrity in compliance with acceptance criteria described in specific procedures. The selection of examination probe is especially important because the quality of acquired ECT data is determined by the probe design characteristics, such as geometry and operation frequency, and has enormous effects on examination results. In this study, An optimal differential bobbin probe is designed for the steam generator tube inspection in nuclear power plants(NPPs). Based on the test results for electrical and ECT signal characteristics, the prototype bobbin probe satisfies all the criteria.

• Journal of Microbiology and Biotechnology
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• v.16 no.5
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• pp.740-747
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• 2006

Amplification by universal consensus sequences in pathogenic bacterial DNA would allow rapid identification of pathogenic bacteria, and amplification of genus-specific and species-specific sequences of pathogenic bacterial DNA might be used for genotyping at the genus and species levels. For design of probes for molecular diagnostics, several tools are available as stand-alone programs or as Web application. However, since most programs can design only a few probe sets at one time, they are not suitable for large-scale and automatic probes design. Therefore, for high-throughput design of specific probes in diagnostic array development, an automated design tool is necessary. Thus, we developed a Web-based automatic system for design of genus-specific and species-specific probes for pathogen detection. The system is available at http://www.miprobe.com.

• Journal of ILASS-Korea
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• v.20 no.4
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• pp.230-235
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• 2015

The demands for reliable particle cloud temperature measurement exist in many process industries and scientific researches. Particle cloud temperature measurements depend on radiation thermometry at two or more color bands. In this study, we developed a sensitive, fast response and compact online infrared two-color probe to measure the temperature of a particle cloud in a phase of two field flow (solid-gas). The probe employs a detector contained two InGaAs photodiodes with different spectral responses in the same optical path, which allowed a compact probe design. The probe was designed to suit temperature measurements in harsh environments with the advantage of durability. The developed two-color probe is capable of detecting particle cloud temperature as low as $300^{\circ}C$, under dynamic conditions.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.6
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• pp.403-410
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• 2006

Eddy current testing (ECT) signals produced by a differential bobbin coil probe vary according to probe design parameters such as the number of turns, geometry and coil gap size. In the present study, the characteristics of a differential bobbin coil probe signals are investigated by numerical simulation in order to determine the optimum coil gap. For verification of numerical simulation accuracy, a specially designed bobbin probe of which the coil gap can be adjusted is fabricated and a series of experiments to acquire signals from two kinds of standard tubes with the variation in coil gap is performed. Then, the experimental signals are compared to the simulation results. Based on this investigation, a decision on the optimum range of coil gap is made. The theoretically predicted signals agree very well to the experimental signals. In fact, this excellent agreement demonstrates a high potential of the simulation as a design optimization tool for ECT bobbin probes.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1730-1733
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• 2007

As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

• Bulletin of the Korean Chemical Society
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• v.34 no.3
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• pp.823-826
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• 2013

A low-${\varepsilon}$ solid-state NMR(Nuclear Magnetic Resonance) probe was developed for the spectroscopic analysis of two-dimensional $^{15}N-^1H$ heteronuclear dipolar coupling in dilute membrane proteins oriented in hydrated and dielectrically lossy lipid environments. The system employed a 800 MHz narrow-bore magnet. A solenoid coil strip shield was used to reduce deleterious RF sample heating by minimizing the conservative electric fields generated by the double-tuned resonator at high magnetic fields. The probe's design, construction, and performance in solid-state NMR experiments at high magnetic fields are described here. Such high-resolution solid-state NMR spectroscopic analysis of static oriented samples in hydrated phospholipid bilayers or bicelles could aid the structural analysis of dilute biological membrane proteins.

• International Journal of Aeronautical and Space Sciences
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• v.14 no.1
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• pp.99-104
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• 2013

Configuration design, analysis, and wind tunnel test of a vane-type multi-function air data probe (MFP) was described. First, numerical analysis was conducted for the initial configuration of the MFP in order to investigate aerodynamic characteristics. Then, the design was modified to improve static and dynamic stability for better response characteristics. The modified configuration design was verified through wind tunnel tests. The test results are also used to verify the accuracy of the analytical method. The analytically estimated aerodynamic damping provided by the Navier-Stokes equation solver correlated well with the wind tunnel test results. According to the calculation, the damping coefficient estimated from ramp motion analysis yielded a better correlation with the wind tunnel test than pitch oscillation analysis.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.