Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 1 : Design and Analysis of Static and Dynamic Properties

주사 현미경용 평면 스캐너 Part 1 :설계 및 정 · 동특성 해석

  • Published : 2005.06.01
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Abstract

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

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References

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Cited by

  1. Pure Nano-Rotation Scanner vol.4, pp.1687-8140, 2012, https://doi.org/10.1155/2012/962439
  2. An education model of a nano-positioning system for mechanical engineers vol.20, pp.10, 2006, https://doi.org/10.1007/BF02916274