• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Progress in Medical Physics
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• v.35 no.2
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• pp.21-35
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• 2024

Herein, we provide a concise review of the critical role of motion management in radiation therapy, with a focus on photon radiation therapy, real-time control of respiratory motion, and image-guided radiation therapy (IGRT) in lung stereotactic body radiation therapy (SBRT). The dynamic nature of human anatomy, particularly in regions prone to movement such as the thoracic and abdominal areas, poses significant challenges in accurately targeting tumors during radiation therapy. This review explores the implications of organ and tumor motion, emphasizing the necessity for precise treatment delivery. We assess the advancements in four-dimensional (4D) imaging techniques such as 4D computed tomography, which provide time-resolved images for enhanced treatment planning. The review highlights various motion management strategies, including motion-encompassing methods, respiratory-gating, breath-hold techniques, and real-time tumor tracking, discussing their implementation and impact on treatment efficacy. The role of IGRT in lung SBRT is particularly emphasized, showcasing how real-time imaging and advanced targeting techniques enhance the precision of high-dose radiation delivery while minimizing exposure to surrounding healthy tissues. This comprehensive review aims to underscore the significance of integrating motion management in radiation therapy, highlighting its pivotal role in improving treatment accuracy, reducing toxicity, and ultimately enhancing patient outcomes in cancer care.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.604-609
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• 2005

This paper presents an experimental study for optimizing the acceleration of AC servomotor using finite jerk (the first derivative of acceleration). The acceleration optimization with finite jerk aims at generating the smooth velocity profile of AC servomotor by experimentally minimizing vibration resulted from the initial friction of servomotor. The stick-slip motion of AC servomotor induced by initial friction can result in the positional errors that are not good for high-precision devices such as the assembly robot arms to be used in a 300mm wafer or a LCD (Liquid Crystal Display) stocker system. In this paper, experiments were made by using a PM (Permanent Magnet) type AC servomotor with MMC(R) (Multi Motion Controller) programmed in Visual C++(R). The experiments have been performed for finding the optimal duration time of finite jerk in terms of the minimization of vibration displacements when both the magnitude of velocity and the allowable acceleration are given. We have compared the proposed control with the conventional control with trapezoidal velocity profile by measuring vibration displacements. The effectiveness of the proposed control has been verified in that the experimental results showed the decrease of vibration displacement by about 24%.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.8
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• pp.79-87
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• 1999

In this study, a new type of flow control valve which is SMA actuated flow control valve is presented. The flow control valve is actuated by a small motion of shape memory alloy. The performance of this valve as a position control component is analyzed by computer simulation. A variable structure control technique is applied for the position control by the flow control valve. The position control performance of the valve is evaluated on the step responses of a PID control by a electrohydraulic servo valve. For the simulation study, first, the mathematical model of a hydraulic system, which is consisted of the flow control valve and a hydraulic cylinder, is formulated. This mathematical model and the designed variable structure control algorithm are then combined by the MATLAB software. The same sequence of work is carried out for the PID position control system with a electrohydraulic servo valve. The simulation results show the validity of the new type of flow control valve as a variable position control component.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.28 no.7C
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• pp.726-732
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• 2003

The paper proposes a motion estimation (ME) technique to reduce computational complexity. It is achieved by skipping ME process for macro-blocks decided to be in no need of the operation. Thus, it is called ME skipping technique(MEST). In general, the ME is composed of integer pixel precision ME (IME) followed by half pixel precision ME (HME). The MEST is performed just before an IME process and makes a decision on skipping the IME process according to a criterion based on ME errors of adjacent macro-blocks (MBs) already encoded. When the IME process for a MB is decided to be skipped, which is called ME skip mode, the IME process is skipped and the integer pixel precision motion vector of the MB is just replaced by a predicted vector and used as the input of HME. On the other hands, the IME processes for MBs in ME non-skip mode are not skipped but normally performed. Accordingly, the MEST is very effective to reduce computational complexity when MBs in ME skip mode is abundant. In addition, when the MEST is applied to video encoder, it contributes to more accurate rate control and more robusaess for channel errors. It is experimentally shown that the MEST has the above advantages while maintaining good reconstructed image quality.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.40 no.2
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• pp.213-220
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• 2016

This research aims to develop core technologies for passive carrier (no power in carrier itself) transfer system. The technologies are passive levitation, propulsion, and guidance, which can be great benefits for semiconductor and display manufacturing industries. Passive maglev carrier is necessary to precise position control for quiet and stable transfer operation. However, the structural characteristics of carrier and the installation errors of gap sensors cause the pitch motion. Hence, the controller design in consideration of pitch motion is required. This study deals with the reduction control of carrier pitch motion. PDA controller and PDA controller with pitch control are proposed to compare the pitch angle analysis. The pitch angle and the levitation precision are measured by experiment. Finally, the optimized design of pitch controller is presented and the effects are discussed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.7
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• pp.756-763
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• 2008

This paper presents an inchworm with three piezoelectric actuators. The dynamic stiffness of the inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The dynamic model of inchworm is identified by curve fitting technique based on the experimental frequency response function. For the precision motion control and low residual vibration of inchworm, driving input signal is designed by using cycloid step input and LQG control technique. Experimental result shows that proposed input shaping method is applicable effectively to the inchworm.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.3
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• pp.254-259
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• 2013

Ball screw system is widely used as a precision mechanical linear actuator that translates rotational motion to linear motion for its high efficiency, great stiffness and long life. Recently, according to the requirements of high accuracy and stiffness, the pre-load on the ball screw which means of remove the backlash in the ball screw is usually used. Because of the preload which means the frictional resistance between the screw and nut, becomes a dominating heat source and it generates thermal deformation of ball screw which is the reason for low accuracy of the positioning decision. There are several methods to solve the problem that includes temperature control, thermal stable design and error compensation. In the past years, researchers focused on the error compensation technique for its ability to correct ball screw error effectively rather than the capabilities of careful machine design and manufacturing. Significant amounts of researches have been done to real-time error compensation. But in this paper, we developed a series of cooling methods to get thermal equilibrium in the ball screw system. So we find the optimum cooling type for improving positioning error which caused by thermal deformation in the ball screw system.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.110-117
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• 2006

This paper presents the acceleration optimization of a high-speed LCD (Liquid Crystal Display) transfer system for the minimization of vibration. To reduce vibration is one of key requirements for the dynamic control of a high-speed LCD transfer system. In this paper, the concept of finite jerk (the first derivative of acceleration) has been introduced for realizing input acceleration. The profile of finite jerk has been optimized using a genetic algorithm so that vibration effect can be minimized. In order to incorporate a genetic algorithm, the dynamic model of a LCD transfer system which is realized by using the ADAMS software has been linked to the simulation system constructed by the MATLAB. The simulation results illustrated that the duration of finite jerk can be optimized so as to minimize the magnitude of vibration. It has been also shown that the acceleration optimization with finite jerk can make the high-speed motion of a LCD transfer system result in low vibration, compared with the conventional motion control with trapezoidal velocity profile.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.141-146
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• 2008

The purpose of this study is to develop the algorithm which can control muscle power assist robot especially for elderly. Recently, wearable robots for power assistance are developed by many researchers, and its application fields are also variable such as for medical or military equipment. However, there are many technical barriers to develop the wearable robot. This study suggest a control method improving performance of a wearable robot system by using a EMG signal of major muscles and a force sensor signal as command signal of system. The result of the robot Prototype efficiency experiment, the case of Maximum Isometric motion it suggest 100% power of muscle, the man need only 66% of MVIC(Maximum Voluntary Isometric Contraction) to lift 5kg dumbbell without robot assist. However the man needs only 52% of MVIC to lift 5kg dumbbell with robot assist. Therefore 20% muscle power increased with robot assist. Also, we designed light weight robot mechanism that extract the command signal verified and drive the wanted motions.