Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Experiment for Position Accuracy Using Laser Scale Unit with 10 Nano-Meter Resoultion

10 nano-meter 분해능을 갖는 laser scale을 이용한 위치 결정 실험

  • 임선종 (한국기계연구원, 자동화 연구부) ;
  • 정광조 (한국기계연구원, 자동화연구) ;
  • 최재완 (한국기계연구원, 자동화연구부)
  • Published : 2000.01.01
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Abstract

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

Keywords

References

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