• 한국정밀공학회지
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• 제17권1호
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Current Optics and Photonics
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• 제6권4호
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• pp.381-391
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• 2022

Two-photon-polymerization additive-manufacturing systems feature high resolution and precision. However, there are few reports on specific methods and possible problems concerning the use of small lasers to independently build such platforms. In this paper, a femtosecond-laser two-photon-polymerization additive-manufacturing system containing an optical unit, control unit, monitoring unit, and testing unit is built using a miniature femtosecond laser, with a detailed building process and corresponding control software that is developed independently. This system has integrated functions of light-spot detection, interface searching, micro-/nanomanufacturing, and performance testing. In addition, possible problems in the processes of platform establishment, resin preparation, and actual polymerization for two-photon-polymerization additive manufacturing are explained specifically, and the causes of these problems analyzed. Moreover, the impacts of different power levels and scanning speeds on the degree of polymerization are compared, and the influence of the magnification of the object lens on the linewidth is analyzed in detail. A qualitative analysis model is established, and the concepts of the threshold broadening and focus narrowing effects are proposed, with their influences and cooperative relation discussed. Besides, a linear structure with micrometer accuracy is manufactured at the millimeter scale.

• 설비공학논문집
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• 제27권10호
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• pp.552-557
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• 2015

The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

• Journal of Periodontal and Implant Science
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• 제23권3호
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• pp.564-576
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• 1993

The purpose of this study was to evaluate the effects of Nd:YAG laser treatment on removal of smear layer and exposure of dentinal tubules. The experimental specimens were obtained from root planed surface of 30 human teeth which were extracted due to severe periodontal disease. The specimens were assigned randomly of three groups: root planed group, Tetracycline HCl(100mg/ml, 5min) group, and Nd:YAG laser ($Laser-35^{TM}$, U.S.A. 5 seconds )group. Nd:YAG laser group was divided into 4 subgroups according to 3.0W, 3.5W, 4.0W, 4.5W of power. The surface change of specimens were evaluated by scanning electron microscopy. The number of exposed dentinal tubules and percentage of area occupied by dentinal tubule orifices per unit area between each group was statistically analyzed by paired Student t-test. The results were as follows: 1. By root planing only, dentinal tubule was not exposed, but scale-like smear layer and parallel instrument tracks were resulted. 2. Tetracycline HCl treated surfaces exhibited the small number of partially exposed dentinal tubules with long orifices. The number($3.80{\pm}0.79$) of exposed dentinal tubules on Tetracycline HCl group was significantly less than that in laser groups above 3.5W of power(P<0.001), and the percentage ($0.68{\pm}0.19$) of area occufied by dentinal tubule orifices per unit area($192\;{\mu}m^2$) was significantly lower than that of any laser group(P<0.001). 3. The laser group irradiated with 4.5W of power showed both the most number($10.60{\pm}0.97$) of exposed dentinal tubules among the experimental groups, and the highest percentage($3.75{\pm}0.55\;%$) of area occupied by dentinal tubule orifices. 4. Energy Surge during laser pulsing and overlapping passes of the fiber resulted in melted and resolidified surface textures with lava-like appearance.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.150-151
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• 2006

Laser pyrolysis is a very suitable method for the synthesis of a wide range of nanoparticles. A pilot unit based on this process has been recently developed at CEA. This paper reports results showing the possibility to produce SiC and $TiO_2$ nanoparticles at rates of respectively 1 and 0.2 kg/h and also the possibility to adjust the mean grain size of the particles and their structure by changing the laser intensity and reactants flow rates. First tests of liquid recovery have been also successfully performed to limit the risks of nanoparticles dissemination in the environement during their recovery.

• 조명전기설비학회논문지
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• 제27권8호
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• pp.75-82
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• 2013

We propose a fiber grating sensor system for condition monitoring of large scale wind turbine blades. For the feasibility test of the proposed sensor system, a down-scaled wind turbine has been constructed and experimented. Fiber grating sensors were attached on a blade surface for distributed strain and temperature measurements. An optical rotary joint was used to transmit optical signals between the FBG sensor array and the signal processing unit. Instead of broadband light source, we used a wavelength-swept fiber laser to obtain high output power density. A spectrometer demodulation is used to alleviate the nonlinear wavelength tuning problem of the laser source. With the proposed sensor system we could measure dynamic strain and temperature profiles at multi-positions of rotating wind turbine blades.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.773-776
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• 2005

In this paper, For improving the positioning accuracy of hydrostatic table, relationship between temperature of atmosphere and thermal characteristics of hydrostatic table is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimentally. From the experimental results, it is confirmed that positioning error and repeatability is $0.21{\mu}m\;and\;0.18{\mu}m$ when the laser scale which has $0.01{\mu}m$ of resolution is used as feed-back unit. and also confirmed that thermal deformation of scale and supporter, which occurs by the temperature variation of atmosphere, works as limit of repeatability in long time operation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.37-41
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• 2002

Thermal characteristics of hydrostatic guideway is largely depended on the temperature of supplied oil. For improving the positioning accuracy of hydrostatic guideway, relationship between setting temperature of oil cooler and thermal characteristics is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimental1y in this paper. Laser scale which has 0.01 $\mu\textrm{m}$ of resolution is used as feed-back unit. From the experimental results, it is confirmed that positioning error and repeatability is minimize upto 0.21 $\mu\textrm{m}$ and 0.18 $\mu\textrm{m}$ when the temperature of supplied oil is setting equal to temperature of atmosphere, and also confirmed that thermal deformation, which occurs by the temperature deviation between table and rail or scale supporter, works as limit of repeatability in long time operation.

• 한국정밀공학회지
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• 제21권7호
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• pp.101-106
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• 2004

Measurements of linear motion accuracy for one axis of NC lathe have achieved with laser interferometer system, but measurement of plane motion accuracy for two axes on zx-plane of NC lathe have not achieved with the above system. Therefore in this study, measuring unit system is organized using two optical linear scales in order to acquire error. data during of plane motion of ATC(Automatic Tool Change.) of NC lathe by reading zx-plane coordinates. Two optical linear scales of measuring unit are fixed on zx-plane of NC lathe, and moving part of the scales are fixed to the ATC and then error motion data of z, x-coordinates of the ATC are received from the scales through the PC counter card inserted in computer at constant time intervals using tick pulses coming out from computer. And then, error motion data files acquired from measuring are saved in computer memory and the aspect of plane motion are modeled to plots, and range of the error data, means. average deviations, and standard deviations etc. are calculated by means of statistical treatments using computer programs.

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
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• pp.6-11
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• 2001

More than ten kinds of oxide thin films and their heterostructure have been successfully fabricated on SrTiO$_3$(001) substrates by laser molecular beam epitaxy (laser MBE). Measurements of atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM) and X-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect. The electrical and optical properties of BaTiO$_3$-x thin films and BaTiO$_3$/SrTiO$_3$ (BTO/STO) superlattices were examined. The all-perovskite oxide P-N junctions have been successfully fabricated and the better I-V curves were observed.