• Title/Summary/Keyword: pores structure

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Development of Microstructure Pad and Its Performances in STI CMP (미세 표면 구조물을 갖는 패드의 제작 및 STI CMP 특성 연구)

  • Jeong, Suk-Hoon;Jung, Jae-Woo;Park, Ki-Hyun;Seo, Heon-Deok;Park, Jae-Hong;Park, Boum-Young;Joo, Suk-Bae;Choi, Jae-Young;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.3
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    • pp.203-207
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    • 2008
  • Chemical mechanical polishing (CMP) allows the planarization of wafers with two or more materials. There are many elements such as slurry, polishing pad, process parameters and conditioning in CMP process. Especially, polishing pad is considered as one of the most important consumables because this affects its performances such as WIWNU(within wafer non-uniformity) and MRR(material removal rate). In polishing pad, grooves and pores on its surface affect distribution of slurry, flow and profile of MRR on wafer. A subject of this investigation is to apply CMP for planarization of shallow trench isolation structure using microstructure(MS) pad. MS pad is designed to have uniform structure on its surface and manufactured by micro-molding technology. And then STI CMP performances such as pattern selectivity, erosion and comer rounding are evaluated.

Cross-linkable and water-soluble phospholipid polymer as artificial extracellular matrix

  • Maeta, Eri;Ishihara, Kazuhiko
    • Biomaterials and Biomechanics in Bioengineering
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    • v.1 no.3
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    • pp.163-174
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    • 2014
  • The objective of this study is to prepare an artificial extracellular matrix (ECM) for cell culture by using polymer hydrogels. The polymer used is a cytocompatible water-soluble phospholipid polymer: poly[2-methacryloyloxyethyl phosphorylcholine (MPC)-n-butyl methacrylate-p-nitrophenyloxycarbonyl poly(ethylene oxide) methacrylate (MEONP)] (PMBN). The hydrogels are prepared using a cross-linking reaction between PMBN and diamine compounds, which can easily react to the MEONP moiety under mild conditions. The most favorable diamine is the bis(3-aminopropyl) poly(ethylene oxide) (APEO). The effects of cross-linking density and the chemical structure of cross-linking molecules on the mechanical properties of the hydrogel are evaluated. The storage modulus of the hydrogel is tailored by tuning the PMBN concentration and the MEONP/amino group ratio. The porous structure of the hydrogel networks depends not only on these parameters but also on the reaction temperature. We prepare a hydrogel with $40-50{\mu}m$ diameter pores and more than 90 wt% swelling. The permeation of proteins through the hydrogel increases dramatically with an increase in pore size. To induce cell adhesion, the cell-attaching oligopeptide, RGDS, is immobilized onto the hydrogel using MEONP residue. Bovine pulmonary artery endothelial cells (BPAECs) are cultured on the hydrogel matrix and are able to migrate into the artificial matrix. Hence, the RGDS-modified PMBN hydrogel matrix with cross-linked APEO functions as an artificial ECM for growing cells for applications in tissue engineering.

A Study on Characteristics of Al-Pb Strips and Its Sintering Behavior (Al-Pb계 합금분말의 성형 및 소결 특성에 관한 연구)

  • Moon, Jong-Tai;Lee, Young-Kun;Lee, Yong-Ho;Cho, Sung-Suk
    • Journal of Korea Foundry Society
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    • v.10 no.5
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    • pp.435-443
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    • 1990
  • By using the centrifugal atomization, which is one of the rapid solidification processes, Al-5,10wt%Pb alloys which are monotectic alloys were melted at 150K over two liquid phase line in the phase diagram. The melted alloy was poured on the rotating disk, being made into atomized powders, and then the solidified microstructure and morphology of the powder were investigated. This study converted the produced powders into strips by strained powder rolling. According to sintering temperature, the microstructure and hardness were investigated. The solidified structure of the powders were almost cellular dendritic structure. Pb particles ($2.0-3.0{\mu}m$) were fairl distributed in the Al matrix. Powder shapes were irregular. Rolling property and the compacting was good, respectively, because of increasing mechanical interlocking and surface area in the small size powders. With increasing temperature, the boundarys of powders were in porous form due to the diffusion. Pb particles which were surrounding the pores were inverse-segregated at the surface of the powders. With increasing of sintering temperature, the hardness of the powders and the strips decreased. In particular rolling-strip, the hardness abruptly decreased due to the release of work-hardening.

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Preparation and Swelling Property of Superporous Hydrogels using Glycol Chitosan (글리콜키토산을 이용한 초다공성 하이드로젤의 제조 및 팽윤거동)

  • Kuang, Jia;Li, Zheng-Zheng;Yun, Chwi-Im;Yuk, Kun-Young;Huh, Kang-Moo
    • Journal of the Korean Applied Science and Technology
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    • v.26 no.3
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    • pp.263-268
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    • 2009
  • Superporous Hydrogels (SPHs) have been extensively investigated for various biomedical applications due to their fast swelling and superabsorbent properties. In this study, glycol chitosan that is one of most abundant natural polymers was used as a cross-linking agent instead of bisacrylamide (BIS), which is a broadly used crosslinking agent for preparation of SPHs. Glycol chitosan was modified to have reactive vinyl groups by chemical conjugation with glycidyl methacrylate (GMA). The vinyl group-containing glycol chitosan (GC-GMA) was characterized by FT-IR and $^1H$-NMR measurements. SPHs have been prepared in various synthetic conditions to establish the optimum synthetic process for making superporous structure, where the inner pores are interconnected to each other to form a open channel structure. Various SPHs with different GC-GMA contents have been successfully prepared and have been observed to show faster swelling properties than other conventional SPHs. From the study on the swelling behavior of SPHs, the GC-GMA content is considered to be an important factor for controlling their swelling properties.

Characteristics of the Catalysts Using Activated Carbon Nanofibers with KOH as the Support of Anode Catalyst for Direct Methanol Fuel Cell

  • Jung, Min-Kyung;Kim, Sang-Kyung;Jung, Doo-Hwan;Peck, Dong-Hyun;Shin, Jung-Hee;Shul, Yong-Gun;Yoon, Seong-Ho
    • Carbon letters
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    • v.8 no.1
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    • pp.37-42
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    • 2007
  • Carbon nanofiber (CNF) grown catalytically was chemically activated with KOH to attain structural change of CNF. The structural changes of CNF through KOH activation were investigated by using BET and SEM. From the results of BET, it was found that KOH activation was effective to develop particular sizes of pores on the CNF surface, increasing the surface area of CNF. Activated CNF was applied as an anode catalyst support of fuel cell. The effects of different activation conditions including the activation temperature and the activation time on the specific surface area of the CNF activated with KOH were investigated to obtain appropriate structure as a catalyst support. The 60 wt% Pt-Ru catalyst prepared was observed by using TEM and XRD.

Research Trend of Metal-Organic Frameworks for Magnetic Refrigeration Materials Application (자기 냉동 재료 응용을 위한 MOF의 연구 동향)

  • Kim, Suhwan;Son, Kwanghyo;Oh, Hyunchul
    • Korean Journal of Materials Research
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    • v.30 no.3
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    • pp.136-141
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    • 2020
  • The magnetocaloric effect (MCE), which is the reversible temperature change of magnetic materials due to an applied magnetic field, occurs largely in the vicinity of the magnetic phase transition temperature. This phenomenon can be used to induce magnetic refrigeration, a viable, energy-efficient solid-state cooling technology. Recently, Metal-organic frameworks (MOFs), due to their structural diversity of tunable crystalline pore structure and chemical functionality, have been studied as good candidates for magnetic refrigeration materials in the cryogenic region. In cryogenic cooling applications, MCE using MOF can have great potential, and is even considered comparable to conventional lanthanum alloys and magnetic nanoparticles. Owing to the presence of large internal pores, however, MOF also exhibits the drawback of low magnetic density. To overcome this problem, therefore, recent reports in literature that achieve high magnetic entropy change using a dense structure formation and ligand tuning are introduced.

Patterned Surfaces in Self-Organized Block Copolymer Films with Hexagonally Ordered Microporous Structures

  • Hayakawa Teruaki;Kouketsu Takayuki;Kakimoto Masa-alki;Yokoyama Hideaki;Horiuchi Shin
    • Macromolecular Research
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    • v.14 no.1
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    • pp.52-58
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    • 2006
  • A novel fabrication of the patterned surfaces in the polymer films was demonstrated by using the self-organizing character of the block copolymers of polystyrene-b-oligothiophenes and polystyrene-b-aromatic amide dendron. Hexagonally arranged open pores with a micrometer-size were spontaneously formed by casting the polymer solutions under a moist air flow. The amphiphilic character of the block copolymers played the crucial role as a surfactant to stabilize the inverse emulsion of water in the organic solvent, and subsequently the aggregated structure of the hydrophilic oligothiophene or aromatic amide dendron segments remained on the interiors of the micropores. The chemical composition on the top of the surface of the microporous films was characterized by energy-filtering transmission electron microscopy (EFTEM) or a time-of-flight secondary ion mass spectrometer (ToF-SIMS). The characterizations clearly indicated that the patterned surfaces in the self-organized block copolymer films with the hexagonally ordered microporous structures were fabricated in a single step.

3D porous ceramic scaffolds prepared by the combination of bone cement reaction and rapid prototyping system

  • Yun, Hui-Suk;Park, Ui-Gyun;Im, Ji-Won
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.56.2-56.2
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    • 2012
  • Clinically-favored materials for bone regeneration are mainly based on bioceramics due to their chemical similarity to the mineral phase of bone. A successful scaffold in bone regeneration should have a 3D interconnected pore structure with the proper biodegradability, biocompatibility, bioactivity, and mechanical property. The pore architecture and mechanical properties mainly dependent on the fabrication process. Bioceramics scaffolds are fabricated by polymer sponge method, freeze drying, and melt molding process in general. However, these typical processes have some shortcomings in both the structure and interconnectivity of pores and in controlling the mechanical stability. To overcome this limitation, the rapid prototyping (RP) technique have newly proposed. Researchers have suggested RP system in fabricating bioceramics scaffolds for bone tissue regeneration using selective laser sintering, powder printing with an organic binder to form green bodies prior to sintering. Meanwhile, sintering process in high temperature leads to bad cost performance, unexpected crystallization, unstable mechanical property, and low bio-functional performance. The development of RP process without high thermal treatment is especially important to enhance biofunctional performance of scaffold. The purpose of this study is development of new process to fabricate ceramic scaffold at room temperature. The structural properties of the scaffolds were analyzed by XRD, FE-SEM and TEM studies. The biological performance of the scaffolds was also evaluated by monitoring the cellular activity.

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Modeling of Pore Coarsening in the Rim Region of High Burn-up UO2 Fuel

  • Xiao, Hongxing;Long, Chongsheng
    • Nuclear Engineering and Technology
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    • v.48 no.4
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    • pp.1002-1008
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    • 2016
  • An understanding of the coarsening process of the large fission gas pores in the high burn-up structure (HBS) of irradiated $UO_2$ fuel is very necessary for analyzing the safety and reliability of fuel rods in a reactor. A numerical model for the description of pore coarsening in the HBS based on the Ostwald ripening mechanism, which has successfully explained the coarsening process of precipitates in solids is developed. In this model, the fission gas atoms are treated as the special precipitates in the irradiated $UO_2$ fuel matrix. The calculated results indicate that the significant pore coarsening and mean pore density decrease in the HBS occur upon surpassing a local burn-up of 100 GWd/tM. The capability of this model is successfully validated against irradiation experiments of $UO_2$ fuel, in which the average pore radius, pore density, and porosity are directly measured as functions of local burn-up. Comparisons with experimental data show that, when the local burn-up exceeds 100 GWd/tM, the calculated results agree well with the measured data.

Quality Characteristics of Jeung-Pyun(Korean Rice Cake) According to the Type and Amount of the oligosaccharide Added (올리고당 종류와 첨가량에 따른 증편의 품질 특성)

  • 이은아;우경자
    • Korean journal of food and cookery science
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    • v.17 no.5
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    • pp.431-440
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    • 2001
  • This study was carried out to investigate the effects of oligosaccharide addition on Jeung-Pyun fermentation. Fructooligosaccharide (FOS), isomaltooligosaccharide (IMOS), galactooligosaccharide (GOS) were used at the concentration of 15%, 25% or 35% of the rice in Jeung-Pyun ingredients. The physicochemical properties, sensory evaluation and instrumental characteristics were examined. The internal structure of Jeung-Pyun samples was observed by SEM. The pH of Jeung-Pyun batters was decreased as the fermentation progressed. Compared with the control using sucrose, the specific volume of Jeung-Pyun was higher in the 15% and 25% of oligosaccharide-added samples. The degree of gelatinization decreased more slowly than control as the storage time increased both at 20$\^{C}$ and 4$\^{C}$. In sensory evaluation, Jeung-Pyun with FOS and IMOS at the levels of 25∼35% and GOS at the levels of 25% showed the best scores. In instrumental characteristics, springiness, gumminess, hardness and cohesiveness were similar among all samples during storage at 20$\^{C}$ and 4$\^{C}$. In the internal structure of Jeung-Pyun observed by SEM, Jeung-Pyun substituted with oligosaccharide at the levels of 25% for sucrose showed large and regularly distributed air pores. In conclusion, the replacement of sucrose with oligosaccharide in Jeung-Pyun ingredients appeared acceptable in terms of fermentative aspects.

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