• Title/Summary/Keyword: poly-crystallization

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Excimer-Laser Annealing for Low-Temperature Poly-Si TFTs

  • Kim, Hyun-Jae
    • Journal of Information Display
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    • v.4 no.4
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    • pp.1-3
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    • 2003
  • For excimer laser annealing (ELA), energy density, number of pulses, beam uniformity, and condition of initial amorphous Si (a-Si) films are significant factors contributing to the final microstructure and the performance of low-temperature polycrystalline Si (LTPS) TFTs. Although the process and equipment have been significantly improved, the environmental factors associated with initial amorphous Si (a-Si) films and process conditions are yet to be optimized.

SELAX Technology for Poly-Si TFTs Integrated with Amorphous-Si TFTs

  • Kaitoh, Takuo;Miyazawa, Toshio;Miyake, Hidekazu;Noda, Takeshi;Sakai, Takeshi;Owaku, Yoshiharu;Saitoh, Terunori
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.903-906
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    • 2008
  • We developed the advanced LTPS (A-LTPS) manufacturing process. The a-Si TFT process was combined with selectively enlarging laser crystallization (SELAX) technology to improve the carrier mobility in the region where the peripheral circuits are to be fabricated. A 2.4-inch IPS-pro LCD panel for personal digital assistant use was successfully fabricated using the developed technology.

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Crystallization and Properties of Poly(ethylene terephthalate) in Supercritical Carbon Dioxide (초임계이산화탄소에서의 폴리에틸렌테레프탈레이트의 결정화와 성질)

  • 정용채;조재환
    • Proceedings of the Korean Fiber Society Conference
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    • 2001.10a
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    • pp.171-174
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    • 2001
  • 초임계유체(supercritical fluid, SCF)는 친환경적 용매로서 고분자 합성과 기능화를 비롯하여 RESS(rapid expansion of supercritical solution)와 초임계염색 등의 섬유공정 분야에서 연구자들의 흥미로운 관심을 받아 오고 있다. 초임계유체는 기체와 액체의 중간적인 특성을 가지면서도 가스와 같이 우수한 확산력을 가지며 또한 아주 낮은 점도를 갖는다. SCF 중에서 비교적 온화한 조건(31.1℃의 임계온도, 73.8기압의 임계압력, Figure 1)에서 초임계상태를 가질 수 있는 이산화탄소가 가장 많이 이용되고 있는데 이는 자원이 풍부하며 쉽게 회수하여 사용할 수 있어 응용 면에서 유리하다. (중략)

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Formation of Buffer Layer on Mica for Application to Flexible Thin Film Transistors

  • Oh, Joon-Seok;Lee, Seung-Ryul;Lee, Jin-Ho;Ahn, Byung-Tae
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.749-751
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    • 2007
  • A buffer layer consisting of $SiO_x/Ta/Ti$ has been developed in order to overcome the adhesion and stress problems between poly-Si film and mica. Polycrystalline silicon thin film transistor was successfully fabricated on the mica and transferred to a flexible plastic substrate.

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Transfer Characteristics of Poly-Si TFTs with Laser Energy Change

  • You, Jae-Sung;Kim, Young-Joo;Jung, Yun-Ho;Seo, Hyun-Sik;Kang, Ho-Chul;Lim, Kyong-Moon;Kim, Chang-Dong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.401-404
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    • 2004
  • Transfer characteristics of poly-Si TFTs within process window of laser energy are investigated. In terms of surface morphology and transfer characteristics, process window of laser crystallization is evaluated. While maximum mobility exists in lower edge of process window in n-channel TFTs, maximum mobility exists in higher edge of process window in p-channel TFTs.

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Thin-Beam Directional X'tallization Technology for Fabrication of Low Temperature Poly-Si Transistors

  • Park, Ji-Yong;Knowles, David S.;Burfeindt, Bernd
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1108-1111
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    • 2005
  • We propose an improved laser crystallization method based on a directional lateral growth technique. To assess the feasibility of this technique, we have developed an experimental prototype using a 351 nm XeF excimer laser and special optics to produce a long and extremely sharp, narrow beam without need for a photo type mask pattern. Using this system, we have demonstrated very uniform directional laterally grown poly-Si films without any grain boundary protrusions. We believe this method can meet the high performance and uniformity requirements needed for future TFTs in System On Panel (SOP) and OLED applications, as well as providing high process throughput for mass production.

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Characteristics of Surface Roughness as a Film Thickness and Planarization of SLS Poly-Si Films

  • Sohn, Choong-Yong;Kim, Yong-Hae;Ko, Young-Wook;Chung, Choong-Heui;Hwang, Chi-Sun;Song, Yoon-Song;Lee, Jin-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.683-685
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    • 2003
  • We report on a surface planarization process that produces more planar surface than previous sequential lateral solidification crystallized poly silicon films. By applying the single shot laser irradiation with optimum energy density ($(817mJ/cm^{2})$ on the ridge area after SLS crystallization, the ridge height can be decreased.

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The Characterization of Poly-Si Thin Film Transistor Crystallized by a New Alignment SLS Process

  • Lee, Sang-Jin;Yang, Joon-Young;Hwang, Kwang-Sik;Yang, Myoung-Su;Kang, In-Byeong
    • Journal of Information Display
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    • v.8 no.4
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    • pp.15-18
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    • 2007
  • In this paper, we investigated the SLS process to control grain boundary(GB) location in TFT channel region, and it has been found to be applicable for locating the GB at the same location in the channel region of each TFT. We fabricated TFT by applying a new alignment SLS process and compared the TFT characteristics with a normal SLS method and the grain boundary location controlled SLS method. Also, we have analysed degradation phenomena under hot carrier stress conditions for n-type LDD MOSFETs.

Enhancement of Thermomechanical Properties of Poly(D, L-lactic-co-glycolic acid) and Graphene Oxide Composite Films for Scaffolds

  • Yoon, Ok-Ja;Sohn, Il-Yung;Kim, Duck-Jin;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.548-548
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    • 2012
  • Thermomechanical and surface chemical properties of composite films of poly(D, L-lactic-co-glycolic acid) (PLGA) were significantly improved by the addition of graphene oxide (GO) nanosheets as nanoscale fillers to the PLGA polymer matrix. Enhanced thermomechanical properties of the PLGA/GO (2 wt.%) composite film, including an increase in the crystallization temperature and reduction in the weight loss, were observed. The tensile modulus of a composite film with increased GO fraction was presumably enhanced due to strong chemical bonding between the GO nanosheets and PLGA matrix. Enhanced hydrophilicity of the composite film due to embedded GO nanosheets also improved the biocompatibility of the composite film. Improved thermomechanical properties and biocompatibility of the PLGA composite films embedded with GO nanosheets may be applicable to biomedical applications such as scaffolds.

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Thermomechanical Properties of Poly(D, L-actic-co-glycolic acid) and Graphene Oxide Nanocomposite for Scaffolds

  • Sohn, Il-Yung;Yoon, Ok-Ja;Kim, Duck-Jin;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.478-478
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    • 2011
  • The thermomechanical and surface chemical properties of nanocomposite of poly( D, L-actic-co-glycolic acid) (PLGA) were improved significant due to concentration of graphene oxide (GO) nanosheets as nanoscale fillers to PLGA film. Thermomechanical properties of the PLGA/GO (2wt.-%.) nanocomposite were decreased crystallization and melting temperature, weight loss. The storage and loss moduli of the nanocomposite were enhanced by chemical bonding between the oxygenated functional groups of the GO nanosheets and the polymer chains in the PLGA matrix. Enhanced hydrophilicity of nanocomposite caused by embedded GO nanosheets also improved for good biocompatibility. Our findings indicate that thermomechanical properties and biocompatibility of nanocomposite embedded with GO nanosheets are attractive candidates for use in biomedical applications such as scaffolds.

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