• 제목/요약/키워드: plasma polymerization method

검색결과 48건 처리시간 0.018초

Surface Characterization of the Activated Carbon Fibers After Plasma Polymerization of Allylamine

  • Lu, Na;Tang, Shen;Ryu, Seung-Kon;Choi, Ho-Suk
    • Carbon letters
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    • 제6권4호
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    • pp.243-247
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    • 2005
  • Plasma polymerization of allylamine subsequently after plasma pre-treatment was conducted on the activated carbon fibers (ACFs) for the immobilization of amine groups in the surface of ACFs. The change of structural properties of ACFs with respect to different polymerization conditions was investigated through BET method. The change of surface morphologies of ACFs with respect to different plasma polymerization power was also studied through AFM. It was found that the structural properties such as specific surface area and micropore volume could be optimized under certain plasma deposition conditions. It was reckoned that treatment and deposition showed adverse effect on plasma polymerization, in which the former developed the micro-structures of the ACFs and the latter tended to block the micro pores. The Fourier transform infrared spectroscopy (FTIR) revealed that the poly(allylamine) was successfully immobilized on the surface of ACFs and the amount of the deposited polymer layer was related to the plasma polymerization power. SEM results showed that the plasma deposited polymer layer were small and homogenously distributed. The size and the distribution of particles deposited were closely related to the plasma polymerization power, too.

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플라즈마중합법에 의한 폴리스티렌의 분자구조 제에 및 레지스트 특성 조사 (Resist characteristics and molecular structure control of polystyrene by plasma polymerization method)

  • 박종관;김영봉;김보열;임응춘;이덕출
    • 대한전기학회논문지
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    • 제45권3호
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    • pp.438-443
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    • 1996
  • The effect of plasma polymerization conditions on the structure of the plasma polymerized styrene were investigated by using Fourier Transform Infrared Ray(FT-IR), Differential Scanning Calorimetry (DSC), Gel Permeation Chromatography(GPC). Plasma polymerized thin film was prepared using an interelectrode inductively coupled gas-flow-type reactor. We show that polymerization parameters of thin film affect sensitivity and etching resistance of plasma polymerized styrene is 1.41~3.93, and deposition rate of that are 32~383[.angs./min] with discharge power. Swelling and etching resistance becomes more improved with increasing discharge power during plasma polymerization. (author). 11 refs., 10 figs., 1 tab.

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ENVELOPE METHOD를 이용한 플라즈마 중합 유기박막의 광학특성 (Optical Properties for Plasma Polymerization Thin Films Using Envelope Method By Spectrophotometry)

  • 유득찬;박구범;이덕출;황보창권;진권휘
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 하계학술대회 논문집
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    • pp.183-186
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    • 1991
  • In order to prepare the functional organic optic meterials, the capacitive coupled gas flow type plasma polymerization apparatus was designed and manufactured. Styrene and para-Xylene monomer were adopt as organic materisl. Optical constant, refrative index, extinction coefficient of organic thin films by the gas flow type plasma polymerization appratus were determined by envelope method using spectrophotometry. The refractive index of plasma polymerized thin films was decreased in accordance to increase of wave length and discharge time. The extinction coefficient was very small compared with refractive index. From the experimental result of optical constant and film thickness, it was considered that the films which had required optical properties and thickness can be prepared by control of polymerization condition.

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진공증착중합법에 의해 제조된 폴리이미드 박막의 플라즈마 처리에 의한 표면의 변화 (The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment)

  • 김형권;이붕주;김종택;김영봉;이덕출
    • 한국전기전자재료학회논문지
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    • 제11권5호
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    • pp.340-346
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    • 1998
  • In this study, we intended to investigate aging effect of polyimide prepared by VDPD(vapor deposition polymerized method). The prepared polymide was treated by the oxygen and argon gas plasma. And we evaluated the polyimide treated by plasma from contact angle, surface leakage current, FT-IR and SEM. We know that the structure of polyimide at surface are changed to amide structure by plasma treating. It seems that strong energy of plasma causes breaking the molecular chin of the polyimide. And surface roughness increases with plasma treating time increased and sequentially the wettability and leakage current increases.

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스트레인 게이지법을 이용한 복합레진과 컴포머의 중합수축 평가에 관한 연구 (A STUDY ON THE EVALUATION OF POLYMERIZATION SHRINKAGE OF COMPOSITE AND COMPOMER USING STRAIN GAUGE METHOD)

  • 김윤철;김종수;권순원;김용기
    • 대한소아치과학회지
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    • 제29권1호
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    • pp.19-29
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    • 2002
  • 본 연구의 목적은 다양한 중합과정에 따른 복합레진과 컴포머의 수축 양상을 스트레인 게이지법(strain gauge method)을 이용하여 평가해보고자 하는 것이었다. 광중합기는 기존의 할로겐 시스템인 XL 3000(3M, USA)과 최근 소개된 plasma arc curing 시스템인 Flipo(LOKKI, France)를 사용하였고, 충전 재료는 복합레진인 Z-100(3M, USA)과 컴포머인 Dyract AP(Dentsply, Germany)를 사용하였다. 주형과 치아 와동 내에 충전된 실험재료의 중합수축을 각각 측정하였으며, 만능시험기를 이용하여 압축강도를 측정하였다. 중합수축 측정 결과 모두 중합초기에는 일시적인 재료의 팽창을 나타냈고, 그 후 약 1분간은 수축량이 급격히 증가하다가 증가의 폭이 점차 감소하는 양상을 보였다. 전반적으로 컴포머를 사용한 군에 비해 복합레진을 사용한 군에서 중합수축이 크게 나타났으며 plasma arc curing 시스템을 사용한 군에 비해 기존의 광조사 시스템 군에서 더 큰 중합수축을 보였다. 압축 강도의 측정결과는 컴포머 군에 비해 복합레진 군에서 크게 나타났다. 이상의 결과를 종합해 볼 때, plasma arc curing unit와 컴포머의 사용은 시술시간의 단축과 항우식 효과를 감안한다면 소아치과 영역에서의 사용이 긍정적으로 고려될 수 있다고 생각된다.

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공정압력 및 기판바이어스 인가유무에 따른 PMMA 플라즈마중합박막의 전기적 특성 (Electrical Characteristic of PMMA Thin Film by Plasma Polymerization Method with Process Pressure and RF Substrate Bias Power)

  • 이붕주
    • 한국전자통신학회논문지
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    • 제6권5호
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    • pp.697-702
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    • 2011
  • 본 논문에서는 유기박막트랜지스터용 절연막에 활용코자 플라즈마중합방법을 이용하여 PMMA 절연막을 제작하였다. 기판의 바이어스인가 및 증착중 압력변화에 따른 전기적특성을 파악한 결과, 플라즈마중합법에 의한 MMA절연막의 증착조건 RF100[W], Ar20[sccm], 5[mtorr], RF bias 20[W] 에서 3.4의 유전율, 8.6[nm/min]의 높은 증착율 및 높은 절연특성을 얻을수 있다. 이처럼 얻어진 플라즈마 중합막은 유기트랜지스터 및 유기메모리의 절연막으로 충분히 활용가능함을 알 수 있다.

버퍼층으로서 플라즈마 polythiopheneol 유기EL소자에 미치는 영향 (Effect of plasma polythiophene as a buffer layer inserted on OLEDs)

  • 박상무;이붕주;김형권;임경범;김종택;박수홍;임응춘;이은학;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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    • pp.177-180
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    • 2002
  • The purpose of this thesis is to develope buffer materials by the plasma polymerization method. In this article the buffer materials, plasma poly thiophene(PPTh) is used to study the interface of eter/organic in organic light emitting diodes(OLED). The interface of meter/organic materials is the important and critical objectives in development of OLED. The hole transport layer was N,N'-dipheneyl-N, N'bis-(3-methypheneyl)-1,1'dipheneyl-4,4'-diamine (TPD); the host material of mission layer was 8-tris-hydroxyquinoline aluminium (Alq3). When PPTh was inserted between ITO and TPD, emission efficiency increased.

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플라즈마 공정을 이용한 전자빔 리소그래피 (E-beam Lithography using Plasma Processes)

  • 김성오;이진;이경섭;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.575-577
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    • 1999
  • In this study, the PPPI(Plasma Polymerized Phenyl Isothiocyanate) resist thin film was manufactured in accordance with the plasma polymerization method and after exposing it to an electron beam, a pattern was formed by plasma etching. With the FT-IR(Fourier transform-infrared spectrometry) analysis, it was confirmed that the PI(Phenl Isothiocyanate) monomer was successsfully produced into a thin film by the plasma. The polymerization rate of the thin film was 450~ 1012($\AA$/min) to 100-200(W) discharge power and 120-12($\AA$/min) to 0.1 ~0.4[torr] system pressure.

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플라즈마 표면처리에 따른 유기트랜지스터 특성 (Polymer thin film organic transistor characteristics with plasma treatment of interlayers)

  • 이붕주
    • 한국전자통신학회논문지
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    • 제8권6호
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    • pp.797-803
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    • 2013
  • 본 논문에서는 플라즈마 중합법에 의해 유기절연막을 제작 후 이를 이용한 유기박막트랜지스터의 특성향상을 위해 반도체박막의 표면처리를 하였다. 그 결과 반도체층의 $O_2$ 플라즈마을 활용하여 30 [sec]동안 표면처리시 박막의 표면에너지는 $38mJ/m^2$값에서 $72mJ/m^2$값으로 증가되었으며, 이에 따른 유기트랜지스터의 이동도는 평균값 기준하여 29% 증가된 $0.057cm^2V^{-1}s^{-1}$의 값으로 증가된 값을 얻을 수 있었다. 이로부터 반도체박막 표면개질에 의한 유기트랜지스터의 이동도 특성향상이 가능함을 알았다.

Effect of HF and Plasma Treated Glass Surface on Vapor Phase-Polymerized Poly(3,4-ethylenedioxythiophene) Thin Film : Part I

  • Lee, Joonwoo;Kim, Sungsoo
    • 통합자연과학논문집
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    • 제6권4호
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    • pp.211-214
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    • 2013
  • In this study, in order to investigate how consecutive treatments of glass surface with HF acid and water vapor/Ar plasma affect the quality of 3-aminopropyltriethoxysilane self-assembled monolayer (APS-SAM), poly(3,4-ethylenedioxythiophene) (PEDOT) thin films were vapor phase-polymerized immediately after spin coating of FeCl3 and poly-urethane diol-mixed oxidant solution on the monolayer surfaces prepared at various treatment conditions. For the film characterization, various poweful tools were used, e.g., FE-SEM, an optical microscope, four point probe, and a contact angle analyzer. The characterization revealed that HF treatment is not desirable for the synthesis of a high quality PEDOT thin film via vapor phase polymerization method. Rather, sole treatment with plasma noticeably improved the quality of APS-SAM on glass surface. As a result, a highly dense and smooth PEDOT thin film was grown on uniform oxidant film-coated APS monolayer surface.