The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment

진공증착중합법에 의해 제조된 폴리이미드 박막의 플라즈마 처리에 의한 표면의 변화

  • 김형권 (나고야 대학교 공학부 전기공학과) ;
  • 이붕주 (인하대학교 공과대학 전기공학과) ;
  • 김종택 (인하대학교 공과대학 전기공학과) ;
  • 김영봉 (인하공업전문대학 전기과) ;
  • 이덕출 (인하대학교 공과대학 전기공학과)
  • Published : 1998.05.01

Abstract

In this study, we intended to investigate aging effect of polyimide prepared by VDPD(vapor deposition polymerized method). The prepared polymide was treated by the oxygen and argon gas plasma. And we evaluated the polyimide treated by plasma from contact angle, surface leakage current, FT-IR and SEM. We know that the structure of polyimide at surface are changed to amide structure by plasma treating. It seems that strong energy of plasma causes breaking the molecular chin of the polyimide. And surface roughness increases with plasma treating time increased and sequentially the wettability and leakage current increases.

Keywords

References

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