• 전기의세계
• /
• v.24 no.1
• /
• pp.75-85
• /
• 1975

In order to develop the commercial frequency (60Hz) plasma torch of small capacity for material cutting, welding and other industrial heating, the A.C plasma jet generator of non-transfered type is made domestically and the electrode configurations of plasma torch are composed of two kinds of electrodes W-C and W-Cu, combined by thermal emission and field emission electrode materials. In this paper, the characteristics of input power, thermal efficiency, electrode consumption, the flame and forms of arc voltage and arc current for A.C plasma torch are investigated in relation to such variables as arc current, argon flow and magnetic field intensity to obtain the basic design data necessary to A.C plasma jet generator. The result are as follows; (1)The input power, thermal efficiency and electrode consumption are influenced greatly by argon flow, magnetic field intensity and nozzle materials. (2)A.C arc voltage and current are non-symmetrial, involving D.C Component. Due to this current of D.C Component, transformer core is saturated and a large abnormal current flows into the primary winding coil. In order to prevent this abnormal current flow, a condenser must be connected in series to the main discharge circuit. (3)The stability and sharpness of jet flame are improved more in the torch of W-C electrode configuration than in the torch of W-Cu electrode configuration.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.306-306
• /
• 2010

A high density (> $10^{11}\;cm^{-3}$) and low electron temperature (< 2 eV) plasma is produced by using a conventional HF (13.56 MHz) plasma enhanced chemical vapor deposition (PECVD) with an additional ultra high frequency (UHF, 314 MHz) plasma source utilizing two parallel antenna assembly. It is applied for the high rate synthesis of high quality nanocrystalline silicon (nc-Si) films. A high deposition rate of 1.8 nm/s is achieved with a high crystallinity (< 70%), a low spin density (< $3{\times}10^{16}\;cm^{-3}$) and a high light soaking stability (< 1.5). Optical emission spectroscopy measurements reveal emission intensity of $Si^*$ and $SiH^*$, intensity ratio of $H{\alpha}/Si^*$ and $H{\alpha}/SiH^*$ which are closely related to film deposition rate and film crystallinity, respectively. A high flux of precursor and atomic hydrogen which are produced by an additional high excitation frequency is effective for the fast deposition of highly crystallized nc-Si films without additional defects.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.20 no.8
• /
• pp.6-14
• /
• 2006

This paper is a study about a proper method of plasma generation to cleaning method and a high frequency power equipment circuit to generation of plasma that used cleaning of chamber for TFT-LCD PECVD. The high density plasma required for cleaning causes a possibility of high density plasma more than $1{\times}10^{11}[EA/cm^3]$. It apply a ferrite core of ferromagnetic body to a existing ICP form. In case of power transfer equipment on 400[kHz] high frequency to generation of plasma it makes certain a stable switching operation in condition of plasma through using a inverter form for general purpose HB. And it demonstrates the performance of power transfer equipment using methods of measurement which use a transformer of series combination the density of plasma and the rate of dissolution of $NF_3$ in condition of $A_r\;and\;NF_3$.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2007.02a
• /
• pp.88-88
• /
• 2007

• The Transactions of the Korean Institute of Electrical Engineers P
• /
• v.58 no.4
• /
• pp.465-468
• /
• 2009

The dispersion relation and the characteristic of propagation are measured. The measurements of the dispersion relation are observed by a plunger method employed in slow plasma density by pumping microwaves on the axis are observed in plasma loaded slow wave structure. In case of small incident microwave powers the well known plasma density cavity are observed. At the axial positions of minimal radius in the waveguides, the maxima og the electron density, the plasma potential and the RF electric field are observed in cases of high-power microwaves.

• Korean Journal of Materials Research
• /
• v.11 no.12
• /
• pp.1063-1067
• /
• 2001

The effect of the pulse parameters(pulse ratio and frequency) on the characteristics of the nitrided layer in the pulsed plasma nitrified SCM435 Steels was investigated. Material properties of the nitrided layer were analysed by employing optical microscope, scanning electron microscope(SEM), X-ray diffractometer(XRD) and micro-Vickers hardness tester. It was found that both the compound layer thickness and the surface hardness decreased with decreasing of pulse ratios. At high pulse ratio, the compound layer thickness and the surface hardness were rapidly decreased with decreasing frequency compared to lower pulse ratios.

• Proceedings of the IEEK Conference
• /
• 2000.06b
• /
• pp.290-293
• /
• 2000

Low frequency(<100Hz) weak magnetic field(<20gauss) is applied axially to an inductively coupled oxygen plasma(ICP), and its plasma characteristics are monitored by OES(Optical Emission Spectroscopy) and Langmuir probe. It is found that periodic magnetic field enhances ashing rate by 25％ and improves its uniformity upto 4.5％ over 8" wafer. From electron energy distribution function, both low and high energy electrons are identified and relative abundancy is found to be controlled by the applied frequency. Moreover, it is observed that ionization and dissociation species are varied with applied frequency. We insert an aluminium baffle in the chamber to get better uniformity and less plasma damage.

• Proceedings of the KIEE Conference
• /
• 2005.07c
• /
• pp.2179-2181
• /
• 2005

An experimental study on the water plasma characteristics of removal efficiency for organic contaminants in dye waste water has been investigated. In this study, dielectric barrier discharging electrodes with round shape have disposed cross each other in reactor, and pulse power was supplied to between each electrodes. Its output pulse voltage range is from 0[V] to 30[kV] and output frequency range is from 100[Hz] to 2[kHz]. Using proposed system, High frequency discharge is tested in the mixed Tone(air and water) and the space distribution of streamer corona plasma is observed. In spite of the increasement of voltage and frequency, the proposed system have a stable operation characteristics. It is verified by the experimental results.

• Proceedings of the KIEE Conference
• /
• 1995.07c
• /
• pp.1314-1316
• /
• 1995

Basic discharge characteristics of a ferroelectric ball and mica sheet double barrier have been studied for learning the fundamentals of the barrier discharges and for checking the potential to be used as a plasma generator. It is found that plasma generation of the plasma generator was influenced greatly by the dielectric constant of the ferroelectric ball barrier and applied power frequency. As a result, there are optimum conditions of the dielectric constant as a barrier and the applied frequency to generate ozone effectively, which were ${\varepsilon}_r$=600 and f=4 kHz at the present experimental case.

• Journal of computational fluids engineering
• /
• v.17 no.2
• /
• pp.71-77
• /
• 2012

Numerical simulations are carried out for flow over a circular cylinder controlled by the momentum forcing which is generated by a pair of plasma actuators symmetrically mounted on the cylinder surface. A popular and empirical plasma model is used for the spatial distribution of momentum forcing. In this study, we consider two different types of actuation, i.e., steady and unsteady (or pulsed) actuation. In the unsteady actuation, the actuation is turned on and off periodically, its frequency being a control parameter. The objective of this study is to investigate the effects of actuator location and actuation frequency on the flow structures and the forces on the cylinder. Results show that the cylinder wake can be effectively controlled by proper actuator location. For example, when the actuators are located at $120^{\circ}$ from the stagnation point, vortex shedding is completely suppressed with the boundary layer almost fully attached to the surface, resulting in drag reduction and lift elimination.