• Title/Summary/Keyword: plasma frequency

검색결과 856건 처리시간 0.034초

결정질 실리콘 태양전지에서 RF-PECVD를 이용한 실리콘 질화막의 패시베이션 향상 연구

  • 송세영;신경철;강민구;송희은;장효식
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.470.2-470.2
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    • 2014
  • RF-PECVD 장치에 의해 증착된 실리콘 질화막(SiNx)은 결정질 실리콘 태양전지에서 반사 방지막 효과 및 우수한 표면 패시베이션 특성을 제공하는 것으로 알려져 있다. 본 논문에서는 실리콘 질화막의 패시베이션 특성을 향상시키기 위해서 공정온도를 $400^{\circ}C$로 고정하고 공정압력, 가스비, RF (radio frequency) power를 가변하였다. 이 때의 실리콘 질화막의 굴절률 및 두께는 각각 2.0, 80 nm로 증착하여 그에 따른 특성에 대해 분석하였다. 공정 압력이 감소할수록 실리콘 질화막이 증착된 결정질 실리콘 태양전지의 유효 반송자 수명이 증가함을 보였고, 반면에 증착속도는 감소하였다. 또한 RF-power 500 W에서 실리콘 질화막이 증착된 결정질 실리콘 태양전지의 유효 반송자 수명이 상대적으로 높았으며 출력이 올라갈수록 증착속도가 증가하였다. 결과적으로 결정질 실리콘 태양전지에 증착한 실리콘 질화막은 0.8torr 공정 압력과 RF-power 500 W에서 $38.8{\mu}s$로 가장 좋은 유효 반송자 수명을 확인하였다. 위의 결과를 바탕으로 결정질 실리콘 태양전지를 제작하였고 향상된 패시베이션 특성을 갖는 실리콘 질화막의 조건을 찾기 위해서 개방전압(open circuit voltage)을 비교하였다. 공정압력 0.8 torr, RF-power 500 W에서 가장 높은 결과를 보였으며 이는 유효 반송자 수명과 유사한 결과를 나타냈다. 하지만 낮은 FF (fill factor)로 인해 변환 효율이 낮은 결과를 보였다. 태양전지 제작시 낮은 fill factor를 보인 이유와 위의 단점을 보완하기 위해 추가 실험을 수행하였으며, 개선된 fill factor를 통해 18.3% 효율의 태양전지를 제작하였다.

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Effects of $CH_{2}F_{2}$ and $H_2$ flow rates on process window for infinite etch selectivity of silicon nitride to PVD a-C in dual-frequency capacitively coupled plasmas

  • 김진성;권봉수;박영록;안정호;문학기;정창룡;허욱;박지수;이내응
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 춘계학술대회 논문집
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    • pp.250-251
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    • 2009
  • For the fabrication of a multilevel resist (MLR) based on a very thin amorphous carbon (a-C) layer an $Si_{3}N_{4}$ hard-mask layer, the selective etching of the $Si_{3}N_{4}$ layer using physical-vapor-deposited (PVD) a-C mask was investigated in a dual-frequency superimposed capacitively coupled plasma etcher by varying the following process parameters in $CH_{2}F_{2}/H_{2}/Ar$ plasmas : HF/LF powr ratio ($P_{HF}/P_{LF}$), and $CH_{2}F_{2}$ and $H_2$ flow rates. It was found that infinitely high etch selectivities of the $Si_{3}N_{4}$ layers to the PVD a-C on both the blanket and patterned wafers could be obtained for certain gas flow conditions. The $H_2$ and $CH_{2}F_{2}$ flow ratio was found to play a critical role in determining the process window for infinite $Si_{3}N_{4}$/PVDa-C etch selectivity, due to the change in the degree of polymerization. Etching of ArF PR/BARC/$SiO_x$/PVDa-C/$Si_{3}N_{4}$ MLR structure supported the possibility of using a very thin PVD a-C layer as an etch-mask layer for the $Si_{3}N_{4}$ layer.

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견(犬)에 있어서 비장적출(脾臟摘出)이 혈액(血液) 및 골수거대핵세포상(骨髓巨大核細胞像)에 미치는 영향(影響) (Effect of splenectomy on the blood and marrow megakaryocyte picture in dogs)

  • 홍경태;이현범;이근우
    • 대한수의학회지
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    • 제33권2호
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    • pp.327-336
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    • 1993
  • Present experiments were undertaken in order to clarify the effect of splenectomy on the hematology and marrow megakaryocyte picture and to know the genesis of postsplenectomy thrombocytosis in dogs. Six mongrel dogs weighing 8.5~18㎏ were used, of which three were splenectomized and the other three were laparotomized for comparison. Erythrocyte count, total and differential leukocyte counts, thrombocyte count and packed cell volume measurement were made using the blood samples. In addition, bone marrow samples obtained from the femur at 7th and 23rd day of the operation were examined for the number per low-power field, the diameter, and the distribution frequency of the megakaryocyte. From these experiments, following results were obtained : Erythrocyte count and packed cell volume showed significant decrease beginning on the 15th day of splenectomy. Total and differential leukocyte counts showed marked increase for the first 2 days of postsplenectomy. The thrombocyte count of splenectomized dogs increased from the 2nd day of the operation, reached to the peak count on the 15th day, and returned to the preoperation count by the 28th day. The megakaryocyte count per low-power field of the biopsied preparation increased in according to the increase in thrombocyte count. The megakaryocyte diameter of splenectomized dog showed no increase on the 7th or 23rd day of the operation. However, the distribution frequency of the larger megakaryocyte was higher in the splenectomized dogs than in the laparotomized dogs. The total plasma protein concentration showed no significant change after splenectomy or laparotomy. From these results, it may be concluded that the postsplenectomy thrombocytosis results from the increased megakaryocytopoesis or the activated thrombocytopoesis of the marrow megakaryocytes.

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루테늄이 도입된 티타네이트 나노시트의 합성 및 산화 촉매 활성 연구 (Synthesis and Oxidative Catalytic Property of Ruthenium-doped Titanate Nanosheets)

  • 이윤희;권기영
    • 공업화학
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    • 제28권5호
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    • pp.593-596
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    • 2017
  • 본 연구에서는 염기조건에서 수열합성법으로 소듐 티타네이트 나노시트를 합성하였다. 합성한 소듐 티타네이트 나노시트를 $RuCl_3$ 수용액에서 자외선을 조사하여 루테늄을 소듐 티타네이트 나노시트의 표면에 도입하였다. X-선 회절분석과 투과전자현미경 및 에너지 분산형 분광기 실험을 통하여 샘플의 결정성과 형태를 분석하였고, 그 결과 루테늄원자가 소듐 티타네이트 표면에 균일하게 흡착되어 있는 것을 확인할 수 있었다. 또한 유도결합플라즈마 발광분광분석법을 통하여 소듐 티타네이트 나노시트에 도입된 루테늄을 정량하였다. 루테늄이 도입된 소듐 티타네이트 나노시트의 경우 산소를 산화제로 이용한 알코올 산화반응에 응용하였으며, 특히 루테늄이 7% 도입된 소듐 티타네이트 나노시트는 $105^{\circ}C$, 1기압 상에서 벤질 알코올을 다른 부산물 없이 벤즈알데하이드로 산화시키는 데 있어서 turnover frequency가 $2.1h^{-1}$인 촉매활성을 보였다.

높은 A/R의 콘택 산화막 에칭에서 바닥모양 변형 개선에 관한 연구 (A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC)

  • 황원태;김길호
    • 한국전기전자재료학회논문지
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    • 제18권5호
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    • pp.389-395
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    • 2005
  • The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

운용모드에 따른 과학기술위성2호의 전력 수요예측 분석 (Power Budget Analysis for STSAT-2 According to the Operation Mode)

  • 신구환;남명용;임종태
    • 한국항공우주학회지
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    • 제33권3호
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    • pp.93-98
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    • 2005
  • 과학기술위성2호는 2007년 12월에 발사될 예정이다. 이 위성의 주관측기는 DREAM으로서, 주요 임무는 지구 또는 대기로부터 발생되는 복사에너지를 라디오파 대역에서 관측하는 것이다. 이 외 과학기술위성2호는 과학기술 실험용기기로서 정밀디지탈 태양센서, 2중헤드 별센서 등이 탑재되며, 과학기술위성2호의 자세제어 및 모멘텀 덤핑용 과학기술실험용 탑재체로서 펄스형 플라즈마 추력기가 실린다. 본 논문에서는 관측기기 및 과학기술실험용 탑재체 등의 운용모드를 고려한 과학기술위성2호의 운용모드에 따른 전력의 수요예측에 대하여 연구하였고, 임무를 수행하는 동안 안정적인 전력을 공급하기위한 필요전력에 대하여 분석하였다.

Chemical Doping of $TiO_2$ with Nitrogen and Fluorine and Its Support Effect on Catalytic Activity of CO Oxidation

  • Chakravarthy, G. Kalyan;Kim, Sunmi;Kim, Sang Hoon;Park, Jeong Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.142.2-142.2
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    • 2013
  • The effect of substrate on catalytic activity of CO oxidation with transition metal Platinum nanoparticles on doped and undoped TiO2 was investigated. Titanium dioxide was doped chemically with non-metal anions including nitrogen and fluorine. Undoped TiO2 was synthesized via simple conventional sol-gel route. Thin films of titania were developed by spin coating technique and the characterization techniques SEM, XRD, UV-Vis Absorption Spectroscopy and XPS were carried out to examine the morphology of films, crystal phase, crystallites, optical properties and elemental composition respectively. XPS analysis from doped TiO2 confirmed that the nitrogen site were interstitial whereas fluorine was doped into TiO2 lattice substitutionally. Catalytic activity systems of Pt/doped-TiO2 and Pt/undoped-TiO2 were fabricated to reveal the strong metal-support interaction effect during catalytic activity of CO oxidation reactions. By arc plasma deposition technique, platinum nanoparticles with mean size of 2.7 nm were deposited on the thin films of doped and undoped titanium dioxide. The CO oxidation was performed with 40 Torr CO and 100 Torr O2 with 620 Torr He carrier gas. Turn over frequency was observed two to three folds enhancement in case of Pt/doped TiO2 as compared to Pt/TiO2. The electronic excitation and the oxygen vacancies that were formed with the doping process were the plausible reasons for the enhancement of catalytic activity.

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신증후군 환아에 대한 Deflazacort의 효과와 안전성 (Efficacy and Safety of Deflazacort in Korean Children with Nephrotic Syndrome)

  • 김미정;전계원;진동규;이숙향
    • 한국임상약학회지
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    • 제10권2호
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    • pp.51-56
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    • 2000
  • Deflazacort, an oxazoline derivative of prednisolone, has been claimed to have anti-inflammatory effects with fewer side effects compared to prednisone. The objectives of the study were to evaluate efficacy and safety of deflazacort in children with nephrotic syndrome. Eligible Patients were the children with nephrotic syndrome who were treated with deflazacort from October. 1994 to April. 1999. Nephrotic syndrome was defined as having albumin level of less than 2.5 mg/dL and 24-hour urinary protein excretion of greater than $40\;mg/m^2/hr$. The primary parameters evaluating the efficacy of deflazacort were response rate, time to respond and relapse frequency. The safety profiles were the impact on children's growth, calcium sparing effect, glucose metabolism, lipid profile and adverse drug reactions. As results, total of 60 children were evaluated (47 boys, 13 girls). Response rate was $95\%$ (57/60) for initial and late responders. Median time to respond was 12 days (range 7-110 days) and median relapse frequency was one time (range 0-6). Weight/height ratio increased from $22.05\pm3.47\;to\23.20\pm3.44\;kg/m$ (p<0.001) and plasma calcium level, from $7.55\pm3.86\;to\;9.98\pm3.77\;mg/dL$ after treatment (p<0.001). Change of fasting glucose level was not statistically significant $(91.92\pm3.53\;vs.\;98.19\pm4.78\;mg/dL,\;p=0.072)$, while change of total cholesterol was significant $(362.3\pm12.0\;vs\;251.4\pm11.5\;mg/dL$, p<0.001). In conclusion, patients on deflazacort showed similar efficacy in treatment of nephrotic syndrome as reported for prednisone with less impact on growth inhibition and metabolic side effects of hyperglycemia and hyperlipidemia.

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채널 강조와 공간 강조의 결합을 이용한 딥 러닝 기반의 초해상도 방법 (Deep Learning-based Super Resolution Method Using Combination of Channel Attention and Spatial Attention)

  • 이동우;이상훈;한현호
    • 한국융합학회논문지
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    • 제11권12호
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    • pp.15-22
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    • 2020
  • 본 논문은 채널 강조(Channel Attentin)와 공간 강조(Spatial Attention) 방법을 결합한 딥 러닝 기반의 초해상도 방법을 제안하였다. 초해상도 과정에서 질감, 특징과 같은 주변 픽셀의 변화량이 큰 고주파 성분의 복원이 중요하다. 채널 강조와 공간 강조를 결합한 특징 강조를 이용한 초해상도 방법을 제안하였다. 기존의 CNN(Convolutional Neural Network) 기반의 초해상도 방법은 깊은 네트워크의 학습이 어려우며, 고주파 성분의 강조가 부족하여 윤곽선이 흐려지거나 왜곡이 발생한다. 문제를 해결하기 위해 스킵-커넥션(Skip Connection)을 적용한 채널 강조와 공간 강조를 결합한 강조 블록과 잔차 블록(Residual Block)을 사용하였다. 방법으로 추출한 강조된 특징 맵을 부-픽셀 컨볼루션(Sub-pixel Convolution)을 통해 특징맵을 확장하여 초해상도를 진행하였다. 이를 통해 기존의 SRCNN과 비교하여 약 PSNR는 5%, SSIM은 3% 향상되었으며 VDSR과 비교를 통해 약 PSNR는 2%, SSIM은 1% 향상된 결과를 보였다.

Correlations Among Maternal and Infant Factors, Lead Exposure, and Serum Prolactin Levels During Lactation: A Cross-sectional Study in Indonesia

  • Linda Ratna Wati;Djanggan Sargowo;Tatit Nurseta;Lilik Zuhriyah;Bambang Rahardjo
    • Journal of Preventive Medicine and Public Health
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    • 제56권5호
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    • pp.422-430
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    • 2023
  • Objectives: Prolactin is vital for breastfeeding and milk production, and its secretion is influenced by factors related to the mother, infant, and environment. To date, no study has concurrently investigated the correlation of these factors with serum prolactin levels during lactation. Therefore, the objective of this study was to investigate the correlations among maternal and infant factors, lead exposure, and serum prolactin levels during lactation. Methods: A cross-sectional approach was employed in Surabaya, Indonesia, among 110 exclusively lactating mothers. The mothers' daily diets were determined using multiple 24-hour recalls, while blood lead levels were measured with inductively coupled plasma mass spectrometry. Serum prolactin levels were assessed using the electrochemiluminescence immunoassay. For bivariate analysis, we employed the Spearman correlation, Mann-Whitney, and Kruskal-Wallis tests, while for multivariate analysis, we utilized multiple linear regression. Results: The average serum prolactin level of the lactating mothers was 129.19±88.96 ng/mL. Positive correlations were found between serum prolactin levels and breastfeeding frequency (p<0.001), protein intake (p<0.001), and calcium intake (p=0.011) but had negative correlation with blood lead levels (p<0.001) and vitamin B6 intake (p=0.003). Additionally, prolactin levels were not significantly associated with maternal age; parity; intake of calories, vitamin D, vitamin E, zinc, folic acid, magnesium, or iron; infant age; or infant sex. Conclusions: Breastfeeding frequency had a stronger positive relationship with serum prolactin levels than protein and calcium intake. However, lead exposure was associated with reduced serum prolactin levels during lactation. Consequently, specific interventions from policymakers are necessary to manage breastfeeding in mothers exposed to lead.