• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.383-386
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• 2006

Magnesium oxide thin films were deposited with different thickness and oxygen flow rates for investigating the effects of the electrical resistivity of MgO thin films in AC-PDPs. The surface roughness was characterized by AFM. It reveals that higher oxygen flow rate generates higher electrical resistivity of MgO thin films.

• 약학회지
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• 제25권1호
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• pp.15-25
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• 1981

This study was attempted to investigate the action of debrisoquine, a sympathetic blocking agent presently employed in treating hypertension, on renal function and to elucidate the mechanism of its action. Debrisoquine, given intravenously, elicited increased urine flow, osmolar and free water clearances, along with marked increases in excretion of both sodium and potassium. Glomerular filtration rate also increased, but renal plasma flow tended to decrease, so that the filtration fraction tended to increase. Rates of reabsorption of sodium and potassium in renal tubules were also significantly diminished. The diuresis induced by debrisoquine was completely blocked by treatment with phentolamine and reserpine, and also markedly inhibited by acute renal denervation. Debrisoquine, when injected directly into a renal artery, produced antidiuretic effect and a reduction in urinary excretion of sodium and potassium, along with diminished renal plasma flow and increased filtration fraction. The above observations indicate that debrisoquine, when given intravenously, induces diuresis in the dog as a result of both diminished tubular reabsorption of electrolytes and of renal hemodynamic changes, which seem to be related to its inhibitory action of catecholamine-release from the sympathetic nerve endings.

• 한국기계가공학회지
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• 제18권9호
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• pp.88-93
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• 2019

The purpose of this study is to analyze the flow of a system that collects fumes in the plasma cutting machine widely used in industrial sites. A plan for improving the fume collection facility of an industrial plant using a large plasma cutter was investigated through flow analysis. Results show that it is effective to capture and suck fumes from a nearby cutter. If more hoods were installed near the cutter, fumes that were scattered internally could be removed effectively. In addition, if suction inflow was increased, the fumes could be removed more effectively.

• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2010년도 한국우주과학회보 제19권1호
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• pp.40.4-41
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• 2010

Using magnetic field and plasma moment data obtained by THEMIS satellites(A, D, and E), we selected 203 fast flow events accompanied by dipolarization in the near-Earth region( X(GSM) = -7 ~ -12 RE) and statistically examined their properties. It was found that most of the fast flows show the maximum velocity between 1 minute before dipolarization onset and 2 minutes after onset and proceed earthward and duskward. We also found that only the flows with low velocity of less than 400 km/s are observed at X > -8 RE, while the high velocity flows(as well as low velocity flows) are observed at the further tailward region(X < -8 RE). And most of the tailward flows are slow regardless of distance at X(GSM) = -7 ~ -12 RE. On the other hand, if we consider the fast flow as a bubble (Pontius and Wolf, 1990), the entropy parameter, PV5/3 is an important factor to describe the plasma sheet dynamics. Thus we investigated the relationship between the flow velocity and the amount of change in PV5/3 before and after dipolarization onset and found out that the dipolarizations with more depleted entropy parameter tend to show higher flow velocity. Also we examined how the magnetic field at geosynchronous orbit responds to the fast flow accompanied by dipolarization in the near-earth plasma sheet, using the measurements from GOES 11 and 12 statellites. We found that most of the fast flows do not reach geosynchronous orbit as suggested by Ohtani et al. (2006).

• 한국항공우주학회지
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• 제47권11호
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• pp.753-760
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• 2019

스파크제트 액츄에이터(Sparkjet Actuator), 혹은 플라즈마 합성 제트 액츄에이터(Plasma Synthetic Jet Actuator)는 능동 유동 제어 장치의 일종으로 신쎄틱 제트와 같은 기존의 능동 유동 제어 장치에 비해 더 강한 제트를 분출할 수 있기 때문에 초음속 유동 제어에 대한 가능성이 높다고 여겨지고 있다. 스파크제트 액츄에이터는 아크 플라즈마를 이용하여 캐비티(Cavity) 내부에 고온, 고압 유동을 발생시키고 이를 오리피스(Orifice) 혹은 노즐 목을 통해 분출시킴으로써 제트를 만들어낸다. 본 연구는 캐비티 내부에 위치한 전극의 위치를 변화시킴으로서 스파크제트 액츄에이터의 추력 및 유동 특성에 생기는 변화를 수치적으로 확인하였다. 전극 위치가 캐비티의 바닥에 가까워질수록 충격량이 증가하였고 캐비티 내부 평균 압력이 높게 유지되었다. 전극 위치가 캐비티 전체 높이의 25% 위치에 있을 때 2.515 μN·s의 충격량이 발생하였고 75% 위치에 있을 때 2.057 μN·s의 충격량이 발생하였다. 전극 위치가 캐비티 전체 높이의 50%에 있을 때보다 충격량이 각각 대략 9.92%와 -10.09% 정도 변화하였다.

• 대한핵의학회지
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• 제8권1_2호
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• pp.1-11
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• 1974

The author in an attempt to evaluate hemodynamic changes in the clinical stages of Korean hemorrhagic fever measured plasma volume, cardiac output and effective renal plasma flow utilizing radioisoto es during various phases of the disease. Cardiac output was measured by radiocardiography with external monitoring method using RIHSA. Effective renal plasma flow was obtained from blood clearance curve drawn by external monitoring after radiohippuran injection according to the method described by Razzak et al. The study was carried out in thirty-eight cases of Korean hemorrhagic fever and the following conclusions were obtained. 1. Plasma volume was increased in the patients during the oliguric-and hypertensive diuretic phases, while it was normal in the patients during the normotensive-diuretic phase. 2. Cardiac index was increased in the patients during the oliguric phase and was slightly increased in the patients at the hypertensive diuretic phase. It was normal in the other phases. 3. Total peripheral resistance was increased in the hypertensive patients during diuretic phase, while it was normal in the rest of phases. 4. Effective renal plasma flow was significantly reduced in the patients during the oliguric and diuretic phases as well as at one month after the oliguric onset. There was no significant difference between the oliguric and the early diuretic phases. Renal plasma flow in the group of patients at one month after the oliguric onset was about 45% of the normal, however, it returned to normal level at six months after the onset. 5. Clinical syndrome of relative hypervolemia was observed in some patients during the oliguric phase or hypertensive diuretic phase. Characteristic hemodynamic findings were high cardiac output and normal to relatively increased peripheral resistance in these cases. Relatively increased circulating blood volume due to decreased effective vascular space was suggested for the mechanism of relative hypervolemia. 6. Cardiac hemodynamic alteration returned to normal during late stage of the diuretic phase, while renal hemodynamic changes were normalized at six months after the onset.

• 한국재료학회지
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• 제11권6호
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• pp.527-532
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• 2001

O$_2$plasma와 H(hfac)을 이용한 Cu 박막의 건식 식각을 조사하였다. 휘발성이 큰 Cu(hfac)$_2$와 $H_2O$를 탈착시키기 위하여 $O_2$ Plasma를 이용한 Cu 박막의 산화와 생성된 Cu 산화막을 H(hfac)과의 반응으로 제거하는 공정으로 식각을 수행하였다. Cu 박막의 식각율은 50-700 /min의 범위를 보였으며, 기판온도, H(hfac)/O$_2$ 유량비, plasma power에 따라 변하였다. Cu 박막의 식각율은 기판온도 215$^{\circ}C$보다 높은 온도구간에서 RF power가 증가함에 따라 증가하였고, 산화 공정과 H (hfac)과의 반응이 균형을 이루는 최적의 H (hfac)/O$_2$ 유량비는 1:1임을 확인하였다. Ti mask를 사용한 Cu Patterning은 유량비 1 : 1, 기판온도 25$0^{\circ}C$에서 실시하였고, 30$^{\circ}$외 taper slope를 갖는 등방성 etching profile을 얻을 수 있었다. Taper angle을 갖는 Cu 건식 patterning은 고해상도의 대면적 thin film transistor liquid-crystal(TFT-LCDs)를 위래 필요한 것으로써 기판온도, RF power, 유량비를 조절한 one-step 공정으로부터 성공적으로 얻을 수 있었다.

• Applied Science and Convergence Technology
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• 제24권5호
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• pp.196-202
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• 2015

Human blood consists of 55% of plasma and 45% of blood cells such as white blood cell (WBC) and red blood cell (RBC). In plasma, there are many kinds of promising biomarkers, which can be used for the diagnosis of various diseases and biological analysis. For diagnostic tools such as a lab-on-a-chip (LOC), blood plasma separation is a fundamental step for accomplishing a high performance in the detection of a disease. Highly efficient separators can increase the sensitivity and selectivity of biosensors and reduce diagnostic time. In order to achieve a higher yield in blood plasma separation, we propose a novel fluid wing structure that is optimized by COMSOL simulations by varying the fluidic channel width and the angle of the bifurcation. The fluid wing structure is inspired by the inertial particle separator system in helicopters where sand particles are prevented from following the air flow to an engine. The structure is ameliorated in order to satisfy biological and fluidic requirements at the micro scale to achieve high plasma yield and separation efficiency. In this study, we fabricated the fluid wing structure for the efficient microfluidic blood plasma separation. The high plasma yield of 67% is achieved with a channel width of $20{\mu}m$ in the fabricated fluidic chip and the result was not affected by the angle of the bifurcation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.176-177
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• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.