• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.88-88
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• 2003

Optical Emission Spectroscopy(OES) is a very important technology for real-time monitoring of plasma in a reactor during dry etching process. OES technology is non-invasive to the plasma process. It can be used to collect information on excitation and recombination between electrons and ions in the plasma. It also helps easily diagnose plasma intensity and monitor end-point during plasma etch processing. We studied high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar plasma with an OES as a function of processing pressure, RIE chuck power, ICP source power and gas composition. The scan range of wavelength used was from 400 nm to 1000 nm. It was found that OES peak Intensity was a strong function of ICP source power and processing pressure, while it was almost independent on RIE chuck power in BCl$_3$-based planar ICP processes. It was also worthwhile to note that increase of processing pressure reduced negatively self-induced dc bias. The case was reverse for RIE chuck power. ICP power and gas composition hardly had influence on do bias. We will report OES results of high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar Plasma in detail in this presentation.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.525-525
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• 2013

Low temperature plasma diagnosis is one of the big issues in laboratory scale or processing industry. One of the most powerful techniques of plasma diagnostics is the use of the scattering of electromagnetic radiation from the plasma. Electron temperature and density are important parameters for understanding the information of plasmas in the plasma processing industry. Laser scattering experiments on plasma can provide a substantial amount of information about plasma parameters such as the electron density ne, the electron temperature Te, and the neutral density nn and temperature Tn. Thomson scattering spectroscopy is used several method, in accordance with detector type. Commonly, Thomson scattering is used several notch filter to separate expanded wavelength. Since using a spectrometer with surface relief grating or notch filter, the system of the measurement will be complicated and bigger. In this study, using VPHG (Volume Phase Holographic Grating) in order to install the simple and cheap system. VPHG has the advantage of the system installation, because it can be Transmission Type. The diffraction efficiency and dispersion angle of VPHG is higher than the surface relief grating relatively. For a wavelength and bandwidth selection, Using a slit or mask to select a rejection wavelength instead of notch filter.

• Genomics & Informatics
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• v.13 no.3
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• pp.70-75
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• 2015

MicroRNAs (miRNAs) have been demonstrated to play an important role in carcinogenesis. Previous studies revealed that miRNAs are present in human plasma in a remarkably stable form that is protected from endogenous RNase activity. In this study, we measured the plasma expression levels of three miRNAs (miR-21, miR-27a, and miR-155) to investigate the usefulness of miRNAs for gastric cancer detection. We initially examined plasma miRNA expression levels in a screening cohort consisting of 15 patients with gastric cancer and 15 healthy controls from Korean population, using TaqMan quantitative real-time polymerase chain reaction. We observed that the expression level of miR-27a was significantly higher in patients with gastric cancer than in healthy controls, whereas the miR-21 and miR-155a expression levels were not significantly higher in the patients with gastric cancer. Therefore, we further validated the miR-27a expression level in 73 paired gastric cancer tissues and in a validation plasma cohort from 35 patients with gastric cancer and 35 healthy controls. In both the gastric cancer tissues and the validation plasma cohort, the miR-27a expression levels were significantly higher in patients with gastric cancer. Receiver-operator characteristic (ROC) analysis of the validation cohort, revealed an area under the ROC curve value of 0.70 with 75% sensitivity and 56% specificity in discriminating gastric cancer. Thus, the miR-27a expression level in plasma could be a useful biomarker for the diagnosis and/or prognosis of gastric cancer.

• Korean Journal of Materials Research
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• v.11 no.6
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• pp.441-447
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• 2001

A study on the TiN coating layer in small holes on the Purpose of die-casting dies application has been performed with a PACVD process. For the hole having diameter of 4 mm. the uniform TiN coating layer in the hole to the depth of 20 mm was achieved using DC pulsed power source. To understand the forming mechanism of TiN coating layer, plasma diagnosis on Ti, $N_{2}^{+}$ and A $r^{+}$ emissions was carried out during plasma coaling process by optical emirssion spectroscopy. When the duty ratio was equal or over 50%, the Peaks of Ti,$ N_{2}^{+}$ and A $r^{+}$ emission were obviously observed. While duty ratio was equal or under 28.6%, no peaks for Ti, $N_{2}^{+}$ and A $r^$ were observed and the formation of TiN coating layer was rarely observed. For the coating in 4 mm hole diameter, the coating layer with bipolar process was two times deeper than that with unipolar process.

• Journal of Genetic Medicine
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• v.8 no.1
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• pp.1-16
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• 2011

Owing to the risk of fetal loss associated with prenatal diagnostic procedures (amniocentesis, chorionic villus sampling), noninvasive prenatal diagnosis (NIPD) is ultimate goal of prenatal diagnosis. The discovery of circulating cell-free fetal DNA (cffDNA) in maternal plasma in 1997 has opened up new probabilities for NIPD by Dr. Lo et al. The last decade has seen great development in NIPD. Fetal sex and fetal RhD status determination by cffDNA analysis is already in clinical use in certain countries. For routine use, this test is limited by the amount of cell-free maternal DNA in blood sample, the lack of universal fetal markers, and appropriate reference materials. To improve the accuracy of detection of fetal specific sequences in maternal plasma, internal positive controls to confirm to presence of fetal DNA should be analyzed. We have developed strategies for noninvasive determination of fetal gender, and fetal RhD genotyping using cffDNA in maternal plasma, using real-time quantitative polymerase chain reaction (RT-PCR) including RASSF1A epigenetic fetal DNA marker (gender-independent) as internal positive controls, which is to be first successful study of this kind in Korea. In our study, accurate detection of fetal gender through gestational age, and fetal RhD genotyping in RhD-negative pregnant women was achieved. In this assay, we show that the assay is sensitive, easy, fast, and reliable. These developments improve the reliability of the applications of circulating fetal DNA when used in clinical practice to manage sex-linked disorders (e.g., hemophilia, Duchenne muscular dystrophy), congenital adrenal hyperplasia (CAH), RhD incompatibility, and the other noninvasive pregnant diagnostic tests on the coming soon. The study was the first successful case in Korea using cffDNA in maternal plasma, which has created a new avenue for clinical applications of NIPD.

• Journal of Chest Surgery
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• v.10 no.1
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• pp.44-48
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• 1977

Benign hyperplasia of hilar lymph glands is rare. Most of the lesions were intrathoracic cavity. The lesions were discovered most often on routine roentgenograms of the chest or because. of pressure symptoms or the presence of a palpable mass if outside the thorax. Diagnosis is. made after removal of gland, a procedure which may also have therapeutic value. They have been divided into 2 histol0gic types: the hyaline-vascular lesions, which were, most numerous, were characterized by small hyaline-vascular follicles and interfollicular capillary proliferation ;the plasma cell lesions were characterized by large follicles with! intervening sheets of plasma cells. We experienced one case of benign hyperplasia of lymph gland in left hilum, which were. most numerous, characterized by small hyaline-vascular follicles and interfollicular capillary proliferation-hyaline-vascular type. This 29 years old male patient was treated by right upper lobectomy with excision of lesion. The postoperative courses was uneventful.

• Radiation Oncology Journal
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• v.32 no.3
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• pp.208-212
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• 2014

Marfan syndrome is one of the collagen vascular diseases that theoretically predisposes patients to excessive radiation-induced fibrosis yet there is minimal published literature regarding this clinical scenario. We present a patient with a history of Marfan syndrome requiring radiation for a diagnosis of a right brachial plexus malignant nerve sheath tumor. It has been suggested that plasma transforming growth factor beta 1 (TGF-${\beta}1$) can be monitored as a predictor of subsequent fibrosis in this population of high risk patients. We therefore monitored the patient's TGF-${\beta}1$ level during and after treatment. Despite maintaining stable levels of plasma TGF-${\beta}1$, our patient still developed extensive fibrosis resulting in impaired range of motion. Our case reports presents a review of the literature of patients with Marfan syndrome requiring radiation therapy and the limitations of serum markers on predicting long-term toxicity.

• Journal of Korean Medical Ki-Gong Academy
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• v.1 no.1
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• pp.95-109
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• 1996

To investigate anti-stress effects of Manual Kigong, Manual-Apparatus Combined Kikong, and Systemic Kigong, this experiments were performed changing of plasma catecholaminess and serum cortisol measured. Also using D.I.T.I(Digital Infrared Thermongraphy Imaging), Pulse Analyzer, Electric Current on Neurometer, and Digital Flicker on Testing-Stressed. And following results were abtained. 1) Menual-Appartus Combined Kikong decreased significantly increasing concentration of plasma epinephrine and norepinephrine level in Testing-stressed. 2) Manual Kigong decreased increasing concentration of serum cortisol level in Testing-stressed. 3) Manual Kigong and Manual-Aparatues Combined Kikong increased decreasing thermomerty on the palm's center caused Testing-stressed. 4) All of three treats are small change in SET(Systolic Ejection Time) by Pulse Analyzer caused Testing-stressed. 5) More changes of Electric Current on the Neurometer Diagnosis caused Testing-stressed are as followed. Manual-Apparatus Combined Kikong >Systemic Kigong >Manual Kigong From the results, it may be concluded that Manual-Apparatus Combined Kikong Theraphy having more anti-stress effects than Manual Theraphy. Systemic Kigong Therapy.

• Tuberculosis and Respiratory Diseases
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• v.73 no.3
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• pp.174-177
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• 2012

Primary endobronchial schwannomas are extremely rare tumors that originate from Schwann cells. We report a case of primary endobronchial schwannoma. A 44-year-old woman, without respiratory symptoms, was presented with a nodule in the left main bronchus on her chest computed tomography scan. The nodule was removed by a rigid bronchoscopy with argon plasma coagulation. Biopsy confirmed the diagnosis of schwannoma. There was no recurrence during her 4-month follow-up.

• Proceedings of the IEEK Conference
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• 2001.06b
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• pp.37-40
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• 2001

The semiconductor's design rule becomes more stringent, hence the silicon-dioxide etching technique is important issue. In this work we compared the etching characteristics of different three types of Plasma source, Normal ICP, magnetized ICP and E-IC $P^{TM}$. The E-IC $P^{TM}$ source shows higher etch rate at lower pressure and this is advantageous for the fine pattern process. The etching characteristics were varied with external magnetic field frequency at I-lCP and this is examined with Nanospe $c^{TM}$ and SEM. We designed Langmuir probe system for time resolved diagnosis. ion density of E-ICP is varying periodically with the applied external magnetic field frequencyquency