• 제목/요약/키워드: plasma application

검색결과 908건 처리시간 0.026초

Safety evaluation of atmospheric pressure plasma jets in in vitro and in vivo experiments

  • Lee, Ji-Yoon;Park, Shin-Young;Kim, Kyoung-Hwa;Yoon, Sung-Young;Kim, Gon-Ho;Lee, Yong-Moo;Seol, Yang-Jo
    • Journal of Periodontal and Implant Science
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    • 제51권3호
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    • pp.213-223
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    • 2021
  • Purpose: The atmospheric pressure plasma jet (APPJ) has been introduced as an effective disinfection method for titanium surfaces due to their massive radical generation at low temperatures. Helium (He) has been widely applied as a discharge gas in APPJ due to its bactericidal effects and was proven to be effective in our previous study. This study aimed to evaluate the safety and effects of He-APPJ application at both the cell and tissue levels. Methods: Cellular-level responses were examined using human gingival fibroblasts and osteoblasts (MC3T3-E1 cells). He-APPJ was administered to the cells in the experimental group, while the control group received only He-gas treatment. Immediate cell responses and recovery after He-APPJ treatment were examined in both cell groups. The effect of He-APPJ on osteogenic differentiation was evaluated via an alkaline phosphatase activity assay. In vivo, He-APPJ treatment was administered to rat calvarial bone and the adjacent periosteum, and samples were harvested for histological examination. Results: He-APPJ treatment for 5 minutes induced irreversible effects in both human gingival fibroblasts and osteoblasts in vitro. Immediate cell detachment of human gingival fibroblasts and osteoblasts was shown regardless of treatment time. However, the detached areas in the groups treated for 1 or 3 minutes were completely repopulated within 7 days. Alkaline phosphatase activity was not influenced by 1 or 3 minutes of plasma treatment, but was significantly lower in the 5 minute-treated group (P=0.002). In vivo, He-APPJ treatment was administered to rat calvaria and periosteum for 1 or 3 minutes. No pathogenic changes occurred at 7 days after He-APPJ treatment in the He-APPJ-treated group compared to the control group (He gas only). Conclusions: Direct He-APPJ treatment for up to 3 minutes showed no harmful effects at either the cell or tissue level.

옥시불화이트륨 분말의 고상합성 및 플라즈마 스프레이 코팅 적용 (Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating)

  • 이정일;김영주;채희라;김윤정;박성주;신경선;하태빈;김지현;정구훈;류정호
    • 한국결정성장학회지
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    • 제31권6호
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    • pp.276-281
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    • 2021
  • 반도체 회로를 제조하기 위해서 에칭, 세척, 증착 등의 공정들이 반복적으로 진행된다. 따라서 이러한 공정이 진행되면 진공장비 내부는 부식성이 높은 가혹한 플라즈마 환경에 노출되게 된다. 따라서 반도체 공정 장비의 내부를 플라즈마 노출에 강한 재료를 사용하여 코팅층의 에칭과 오염 입자의 생성을 최소화하여야 한다. 본 연구에서는 고상합성법에 의해 Y2O3와 YF3 분말을 원료물질로 옥시불화이트륨(YOF)를 성공적으로 합성하였다. Y2O3와 YF3 분말의 혼합비율은 1.0:1.0에서 1.0:1.6까지 조절하였으며, 혼합비율이 합성된 YOF 분말의 결정구조와 미세구조에 미치는 영향을 XRD와 FE-SEM으로 조사하였다. 합성된 YOF 분말을 이용하여 알루미늄 기판에 플라즈마 스프레이법으로 성공적으로 코팅하였다.

실험계획법을 이용한 가스 혼합-순환식 플라즈마 공정의 최적화 (Optimization of Gas Mixing-circulation Plasma Process using Design of Experiments)

  • 김동석;박영식
    • 한국환경과학회지
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    • 제23권3호
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    • pp.359-368
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    • 2014
  • The aim of our research was to apply experimental design methodology in the optimization of N, N-Dimethyl-4-nitrosoaniline (RNO, which is indictor of OH radical formation) degradation using gas mixing-circulation plasma process. The reaction was mathematically described as a function of four independent variables [voltage ($X_1$), gas flow rate ($X_2$), liquid flow rate ($X_3$) and time ($X_4$)] being modeled by the use of the central composite design (CCD). RNO removal efficiency was evaluated using a second-order polynomial multiple regression model. Analysis of variance (ANOVA) showed a high coefficient of determination ($R^2$) value of 0.9111, thus ensuring a satisfactory adjustment of the second-order polynomial multiple regression model with the experimental data. The application of response surface methodology (RSM) yielded the following regression equation, which is an empirical relationship between the RNO removal efficiency and independent variables in a coded unit: RNO removal efficiency (%) = $77.71+10.04X_1+10.72X_2+1.78X_3+17.66X_4+5.91X_1X_2+3.64X_2X_3-8.72X_2X_4-7.80X{_1}^2-6.49X{_2}^2-5.67X{_4}^2$. Maximum RNO removal efficiency was predicted and experimentally validated. The optimum voltage, air flow rate, liquid flow rate and time were obtained for the highest desirability at 117.99 V, 4.88 L/min, 6.27 L/min and 24.65 min, respectively. Under optimal value of process parameters, high removal(> 97 %) was obtained for RNO.

Optimized ultra-thin tunnel oxide layer characteristics by PECVD using N2O plasma growth for high efficiency n-type Si solar cell

  • Jeon, Minhan;Kang, Jiyoon;Oh, Donghyun;Shim, Gyeongbae;Kim, Shangho;Balaji, Nagarajan;Park, Cheolmin;Song, Jinsoo;Yi, Junsin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.308-309
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    • 2016
  • Reducing surface recombination is a critical factor for high efficiency silicon solar cells. The passivation process is for reducing dangling bonds which are carrier. Tunnel oxide layer is one of main issues to achieve a good passivation between silicon wafer and emitter layer. Many research use wet-chemical oxidation or thermally grown which the highest conversion efficiencies have been reported so far. In this study, we deposit ultra-thin tunnel oxide layer by PECVD (Plasma Enhanced Chemical Vapor Deposition) using $N_2O$ plasma. Both side deposit tunnel oxide layer in different RF-power and phosphorus doped a-Si:H layer. After deposit, samples are annealed at $850^{\circ}C$ for 1 hour in $N_2$ gas atmosphere. After annealing, samples are measured lifetime and implied Voc (iVoc) by QSSPC (Quasi-Steady-State Photo Conductance). After measure, samples are annealed at $400^{\circ}C$ for 30 minute in $Ar/H_2$ gas atmosphere and then measure again lifetime and implied VOC. The lifetime is increase after all process also implied VOC. The highest results are lifetime $762{\mu}s$, implied Voc 733 mV at RF-power 200 W. The results of C-V measurement shows that Dit is increase when RF-power increase. Using this optimized tunnel oxide layer is attributed to increase iVoc. As a consequence, the cell efficiency is increased such as tunnel mechanism based solar cell application.

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Spark Plasma Sintering 법으로 제조한 CoSb3 Skutterudite계 열전소재의 n형 첨가제 효과 (Effect of n-type Dopants on CoSb3 Skutterudite Thermoelectrics Sintered by Spark Plasma Sintering)

  • 이재기;최순목;이홍림;서원선
    • 한국재료학회지
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    • 제20권6호
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    • pp.326-330
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    • 2010
  • $CoSb_3$ Skutterudites materials have high potential for thermoelectric application at mid-temperature range because of their superior thermoelectric properties via control of charge carrier density and substitution of foreign atoms. Improvement of thermoelectric properties is expected for the ternary solid solution developed by substitution of foreign atoms having different valances into the $CoSb_3$ matrix. In this study, ternary solid solutions with a stoichiometry of $Co_{1-x}Ni_xSb_3$ x = 0.01, 0.05, 0.1, 0.2, $CoSb_{3-y}Te_y$, y = 0.1, 0.2, 0.3 were prepared by the Spark Plasma Sintering (SPS) system. Before the SPS synthesis, the ingots were synthesized by vacuum induction melting and followed by annealing. For phase analysis X-ray powder diffraction patterns were checked. All the samples were confirmed as single phase; however, with samples that were more doped than the solubility limit some secondary phases were detected. All the samples doped with Ni and Te atoms showed a negative Seebeck coefficient and their electrical conductivities increased with the doping amount up to the solubility limit. For the samples prepared by SPS the maximum value for dimensionless figure of merit reached 0.26, 0.42 for $Co_{0.9}Ni_{0.1}Sb_3$, $CoSb_{2.8}Te_{0.2}$ at 690 K, respectively. These results show that the SPS method is effective in this system and Ni/Te dopants are also effective for increasing thermoelectric properties of this system.

인체 산화적 DNA손상에 대한 Human Biomonitoring도구로서 Alkaline Comet Assay의 활용 가능성 연구 (Application of the Alkaline Comet Assay for Detecting Oxidative DNA Damage in Human Biomonitoring)

  • 박은주;강명희
    • Journal of Nutrition and Health
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    • 제35권2호
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    • pp.213-222
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    • 2002
  • The alkaline comet assay has been used with increasing popularity to investigate the level of DNA damage in biomonitoring studies within the last decade in Western countries. The purpose of this study was to evaluate the usefulness of the alkaline comet assay as a biomarker of oxidative DNA damage for monitoring in the Korean population, and also to evaluate the effect of nutritional status and lifestyle factors on H2O2 induced oxidative DNA damage measured by the alkaline comet assay in human lymphocytes. The study population consisted of 61 healthy Korean male volunteers, aged 20-28. Epidemiological background data including dietary habits, smoking habits and anthropometrical measurements were collected through personal interviews. After blood collection, the comet assay in peripheral lymphocytes and plasma lipids analysis was carried out and the results analyzed. Tail moment (TM) and tail length (TL) of the comet assay were use\ulcorner to measure DNA damage in the lymphocytes of the subjects. Statistically significant (p < 0.05) positive correlations were observed between DNA damage (TM or TL) and smoking habits expressed as cigarettes smoked per day and pack years (r = 0.311 and 0.382 for TM, r = 0.294 and 0.350 for TL, respectively). There were also significant positive correlations between DNA damage parameter and waist-hip ratio. Higher plasma triglyceride levels were associated with increased damage to DNA. There were no correlations between the consumption frequencies of vegetables and DNA damage to the subjects. However, consumption frequencies of fruit and fruit juice intake were inversely associated with the TM and TL. The results indicate that die comet assay is a simple, rapid and sensitive method for detecting lymphocyte DNA damage induced by cigarette smoking. Consumption of fruit or fruit juices could potentiall modify the damaged DNA in the human peripheral lymphocytes of young Korean men.

전극 구조에 관한 2차원 RF 플라즈마의 모델링 (Modeling of Two-dimensional Self-consistent RF Plasmas on Discharge Chamber Structures)

  • 소순열;임장섭;김철운
    • 조명전기설비학회논문지
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    • 제19권4호
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    • pp.1-8
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    • 2005
  • 본 연구에서는 2차원적 유체 모델을 통하여 보다 실질적인 플라즈마를 이해하고자 하였으며, 기하학적인 방전전극 구조를 반영하도록 전극단에서 챔버 외벽의 거리를 변화시키면서 플라즈마의 특성을 정량적으로 비교 분석하고자 하였다. 방전 챔버의 구조로서, 전극의 반경과 방전 챔버의 높이는 일정하게 유지하면서 방전 챔버의 넓이를 변화시킴에 따라 형성되는 플라즈마의 특성을 분석하였다. 그 결과, 전극단과 챔버 외벽의 거리가 짧을수록 그 영역에서 전계가 강하게 형성되어, 외벽을 향하는 각 입자들의 움직임도 매우 활발하다는 것을 알 수 있었다. 또한, 전각단과 외벽과의 거리가 짧을수록 전극 면상에서 형성되는 입자들의 수밀도와 유속의 변화가 일정하게 형성되는 것을 알 수 있었다. 이러한 결과는 웨이퍼의 대구경화에 따른 플라즈마의 균일성을 고려할 경우에 매우 효과적일 것으로 고려되어 진다.

방전 논리게이트 플라즈마 디스플레이 패널의 논리게이트 방전특성 (Discharge Characteristics of Logic Gate for Discharge Logic Gate Plasma Display Panel)

  • 염정덕
    • 조명전기설비학회논문지
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    • 제19권6호
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    • pp.9-15
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    • 2005
  • 본 연구는 새로 고안된 부정-논리곱 논리기능을 가지는 방전 논리 게이트 플라즈마 디스플레이 패널의 논리 게이트 방전특성을 해석한 것이다. 이 방전 논리 게이트는 방전 경로에 따른 전극사이의 전압을 제어하여 논리 출력을 유도한다. 실험결과 논리 게이트의 방전특성은 두 수직전극에 인가되는 전압들의 상호관계에 영향을 받는다는 것을 알았다. 그리고 대화면 PDP에의 적용 가능성을 검토하기 위하여 전극의 선저항에 의한 방전특성을 평가한 결과, 두 수직전극들의 선저항에 의한 전압강하가 논리 게이트의 방전에 미치는 영향은 미미한 것으로 추론되었다. 실험을 통해 방전 논리 게이트를 구성하는 각 전극들의 펄스전압과 전류제한저항의 최적 값들을 구하였으며 49[V]의 최대동작마진을 얻었다.

생체내 예측 및 흰쥐를 이용한 니코틴 패취의 약물동력학적 평가 (In Vivo Prediction and Biopharmaceutical Evaluation of Nicotine Transdermal Patch)

  • 이우영;백승희;박은석;지상철
    • Journal of Pharmaceutical Investigation
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    • 제35권4호
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    • pp.273-278
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    • 2005
  • Nicotine transdermal therapeutic systems $(TTS_S)$ have been regarded as an effective mean to aid smoking cessation. However, most of nicotine $TTS_S$ in the market have some problems such as unpleasant side effects and skin irritation due to the excess amount of the drug permeated and the properties of the additives employed. In order to solve these problems, new nicotine $TTS_S$ were formulated using biocompatible additives. The optimized formula of the drug layer consisted of nicotine, propylene glycol and poloxamer 188 at the ratio of 1.2: 17.0: 2.0. The drug layer had the sickness of $1,250\;{\mu}m$, the pH of 8.12. The skin permeation rate of nicotine from optimized nicotine patch (NP) was $21.5\;{\mu}g/cm^2/h$. Transdermal administration of nicotine patch has been carried out for the determination of pharmacokinetic parameters in rats. Steady-state plasma concentration of nicotine following transdermal application of NP (area of patch = $15\;cm^2$) on the dorsal skin of rats was 143.2 ng/ml and AUC for 24 hrs was 3,022 ng h/ml. In case of $EXODUS^{\circledR}$ and Nicotinell $TTS^{\circledR}$, the steady-state plasma concentration of nicotine and ACU for 24 hrs were 428.9 ng/ml, $9,121\;ng{\cdot}hr/ml$ and 155.3 ng/ml, $3,152\;ng{\cdot}h/ml$, respectively. NP showed the experimental plasma nicotine concentration profile was very similar to the simulated one and had an appropriate skin permeation rate and a steady-state concentration of nicotine, which can show therapeutic blood levels of the drug for 24 hrs without severe side effects.

고온용 ZnO계 열전 재료의 방전플라즈마 소결 특성 및 미세구조 (Sintering Characteristics of ZnO Fabricated by Spark Plasma Sintering Process for High Temperature Thermoelectric Materials Application)

  • 심광보;김경훈;홍영호;채재홍
    • 한국세라믹학회지
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    • 제40권6호
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    • pp.560-565
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    • 2003
  • 방전 플라즈마 소결법(SPS: Spark Plasma Sintering)을 이용하여 800~100$0^{\circ}C$의 낮은 소결 온도에서 완전 치밀화를 이루는 M-doped ZnO를 (M=Al, Ni) 제조하여 그 소결 특성과 미세구조를 분석하였다. 전자현미경 분석 결과, NiO의 첨가는 ZnO 결정격자와의 고용체 형성을 촉진시키고 결정립 성장을 유발하였고, A1$_2$O$_3$는 순수한 ZnO 소결 시 나타나는 입계에서의 증발현상을 제어하고, 이차상 형성을 통하여 결정립 성장을 억제함을 확인할 수 있었다 NiO와 $Al_2$O$_3$를 동시에 첨가한 시편이 가장 우수한 미세구조가 형성됨을 확인하였고, SEM-EBSP (Electron Back-scattered Diffraction Pattern) 분석 결과 또한 우수한 결정립계 분포를 가지고 있음을 확인하였다. 이러한, 소결체의 우수한 미세구조적 특징은 carrier 농도 증가에 따른 전기 전도도와 증가 및 phonon scattering 효과에 의한 열전도도의 감소 효과를 유발하여 ZnO의 열전 특성을 향상시키리라 사료된다.