• Journal of Electrical Engineering and Technology
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• v.11 no.2
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• pp.455-462
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• 2016

The electron transport coefficients in not only pure atoms and molecules but also in the binary gas mixtures are necessary, especially on understanding quantitatively plasma phenomena and ionized gases. Electron transport coefficients (electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient) in binary mixtures of TEOS gas with buffer gases such as Kr, Xe, He, and Ne gases, therefore, was analyzed and calculated by a two-term approximation of the Boltzmann equation in the E/N range (ratio of the electric field E to the neutral number density N) of 0.1 - 1000 Td (1 Td = 10⁻¹⁷ V.cm²). These binary gas mixtures can be considered to use as the silicon sources in many industrial applications depending on mixture ratio and particular application of gas, especially on plasma assisted thin-film deposition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.1061-1064
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• 2001

Deep Interests have been paid on the application of non-thermal plasma technique to solve the environmental pollution problems. $CO_2$, is one of the severe pollutants which cause the acid rain and global warming. In this study, in order to improve the conversion efficiency of $CO_2$, the streamer corona discharge plasma and barrier discharge plasma reactors were made, and the conversion characteristics of $CO_2$by the corona discharge plasma and some discharge characteristics of these discharge chambers are studied experimentally.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.4
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• pp.315-319
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• 2007

A technique to model plasma processes was presented. This was accomplished by combining the backpropagation neural network (BPNN) and genetic algorithm (GA). Particularly, the GA was used to optimize five training factor effects by balancing the training and test errors. The technique was evaluated with the plasma etch data, characterized by a face-centered Box Wilson experiment. The etch outputs modeled include Al etch rate, AI selectivity, DC bias, and silica profile angle. Scanning electron microscope was used to quantify the etch outputs. For comparison, the etch outputs were modeled in a conventional fashion. GABPNN models demonstrated a considerable improvement of more than 25% for all etch outputs only but he DC bias. About 40% improvements were even achieved for the profile angle and AI etch rate. The improvements demonstrate that the presented technique is effective to improving BPNN prediction performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.207-211
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• 2000

Deep Interests have been paid on the application of non-thermal plasma technique to solve the environmental pollution problems. $CO_2$ is one of the severe pollutants which cause the acid rain and global warming. In this study, in order to improve the conversion efficiency of $CO_2$, the streamer corona discharge plasma and barrier discharge plasma reactors were made, and the conversion characteristics of $CO_2$ by the corona discharge plasma and some discharge characteristics of these discharge chambers are studied experimentally.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.10a
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• pp.265-271
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• 1998

High temperature wear behavior of plasma sprayed zirconia based coating sealing with zirconia sol were investigated for high temperature wear resistance application. The zirconia powders containing 2.5, 5.0, 7.5, 10.0 mol% of MoS$_2$, $Fe_2O_3$ for plasma spray were made by spray drying method. As-sprayed coating was sealed by zirconia-sol to fill up the pore and crack in coating. wear test were performed at temperature ranges from room temperature to 600$\circ$C. The microstructural changes of before and after sealing process were examined by SEM, XRD and EPMA. After sealing process, the porosity was decreased and micro-hardness was increased. The wear properties of coating after sealing process were improved by sealing of pores and cracks. The behavior of wear amount and coefficient of friction were same tendency to before sealing process.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.3
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• pp.148-156
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• 2014

This study is a follow-up study of "Development of Plasma Ignition System" was presented at the 2013 KSAE spring conference. This study compares lean limit of conventional ignition system with plasma ignition system on constant volume combustion test & Engine Combustion test.

• Tribology and Lubricants
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• v.11 no.5
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• pp.108-113
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• 1995

Wear and friction behavior of plasma-sprayed coatings in Mo- and Co-based alloy were studied for the application of piston-ring automobile engine. The plasma-sprayed coatings were varied with gun current density, gas flow, and distance. The surface roughness, microhardness, and wear volume were measured depending on the spray distances. The high temperature hardness value were also measured as a function of temperature. Ball-on-disc geometry configuration tribometer was utilized in air. The wear tests were performed in the temperature ranges from room temperature to 825$^{\circ}$C to investigate the tribological trend of the piston-ring materials in the lack of lubricant. The cross sections of wear track were investigated, using microscopy.

• Transactions on Electrical and Electronic Materials
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• v.3 no.4
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• pp.1-4
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• 2002

As the application of semiconductor chips into electronics increases, it requires more complete integration, which results in higher performance. And it needs minimization in device design for cost saving of manufacture. Therefore oxide gap fill has become one of the major issues in sub-micron devices. Currently HDP (High-Density Plasma) CVD system is widely used in IMD (Inter Metal Dielectric) to fill narrower space between metal lines. However, HDP-CVD system has some potential problems such as plasma charging damage, metal damage and etc. Therefore, we will introduce about one of via resistance failure by metal damage and a preventive method in this paper.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.354-355
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• 2009

In the fabrication of inverted top-emitting organic light emitting diodes (ITOLEDs), the sputtering process is needed for deposition of transparent conducting oxide (TCO) as top anode. Energetic particle bombardment, however, changes the physical properties of underlying layers. In this study, we examined plasma process effects on tungsten oxide ($WO_3$) hole injection layer (HIL). From our results, we suggest the theoretical mechanism to explain the correlation between the physical property changes caused by plasma process on $WO_3$ HIL and degradation of device performances.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.251-256
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• 2004

A concept in which laser-sustained plasmas (LSPs) are combined with inductively coupled plasmas (ICPs) is proposed. The concept is aiming at extensions of operative conditions of a CW laser thruster due to the fact that the ICP has some characteristics which are in contrast to those of LSPs. An estimation confirmed that the concept would effectively work. And a fundamental experiment was conducted. The results showed that the radio frequency magnetic field induced by a alternate current of 13.56 MHz coupled inductively with LSPs, resulting in the enlargement of the plasma region and the attainment of the enthalpy. It is expected that some improvements will enable to transfer the RF power to the work gas more effectively and to demonstrate the synergy effect between the LSPs and the ICPs.