• 한국레이저가공학회지
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• 제6권3호
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Tribology and Lubricants
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• 제23권6호
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• pp.301-305
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• 2007

The wear particle analysis has been known as very effective method to foreknow and decide a moving situation and a damage of machine parts by using the digital computer image processing. But it was not laid down and trusted to calculate shape parameters of wear particle and wear volume. In order to apply image processing method in the foreknowledge and decision of lubricated condition, it needs to verify the reliability of the calculated data by the image processing and to lay down the number of images and the amount of wear particle in one image. In this study, the lubricated friction experiment was carried out in order to establish the optimum image capture with the SM45C specimen under experiment condition. The wear particle data were calculated differently according to the number of image and the amount of wear particle in one image.

• 진공이야기
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• 제2권3호
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• pp.11-15
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• 2015

Particle characteristics diagnosis system (PCDS) was developed to measure submicron particle characteristics by modulation of particle beam mass spectrometry (PBMS) with scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDS). It is possible to measure the particle size distribution in real-time, and the shape, composition can be measured in sequence keeping vacuum condition. Apparatus was calibrated by measuring the size classified NaCl particle which generated at atmospheric pressure. After the calibration, particles were sampled from the exhaust line of plasma enhanced chemical vapor deposition (PECVD) process and measured. Result confirms that PCDS is capable for analyzing particles in vacuum condition.

• 대한기계학회논문집B
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• 제24권5호
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• pp.733-743
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• 2000

We solve the integral representation of the Navier-Stokes equations in a lagrangian view by tracking the particles, which have vortex strengths. We simulate the unsteady viscous flow around an impulsively started cylinder using the vortex particle method. Particles are advanced via the Biot-Savart law for a lagrangian evolution of particles. The particle strength is modified based on the scheme of particle strength exchange. The solid boundary satisfies the no-slip boundary condition by the vorticity generation algorithm. We newly modify the diffusion scheme and the boundary condition for simulating an unsteady flow efficiently. To save the computation time, we propose the mixed scheme of particle strength exchange and core expansion. We also use a lot of panels to ignore the curvature of the cylinder, and not to solve the evaluation of the surface density. Results are compared to those from other theoretical and experimental works.

• 대한기계학회논문집A
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• 제21권5호
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• pp.835-841
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• 1997

Microscopic examination of the morphology of wear debris is an accepted method for machine condition and fault diagnosis. However wear particle analysis has not been widely accepted in industry because it is dependent on expert interpretation of particle morphology and subjective assessment criteria. This paper was undertaken to analyze the morphology of wear debris for machine condition diagnosis of the lubricated moving surfaces by image processing and analysis. The lubricating wear test was performed under different sliding conditions using a wear test device made in our laboratory and wear testing specimen of the pin-on-disk-type was rubbed in paraffine series base oil. In order to describe characteristics of debris of various shape and size, four shape parameters (50% volumetric diameter, aspect, roundness and reflectivity) have been developed and outlined in the paper. A system using such techniques promises to obviate the need for subjective, human interpretation of particle morphology in machine condition monitoring, thus to overcome many of the difficulties in current methods and to facilitate wider use of wear particle analysis in machine condition monitoring.

• 한국입자에어로졸학회지
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• 제10권2호
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• pp.75-82
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• 2014

It is necessary to find out the reaction characteristics of $CaCO_3$ sorbent particles in air and $O_2/CO_2$ atmospheric conditions in order that an in-furnace desulfurization technique can be applied to oxy-fuel combustion system. In this study, rate of change of GMD(geometric mean diameter) and specific surface area of $CaCO_3$ sorbent particles reacted in DTF(drop tube furnace) experimental setup were analyzed to investigate the effect of particle size and humidity on the reaction characteristics of them. In air atmospheric condition, calcination process occurs actively within shorter residence times as the particle size increases. On the contrary, in $O_2/CO_2$ atmospheric condition, a calcination process is delayed as particle size increases. The increment of humidity accelerates calcination process in an air atmospheric condition and increase rate of calcination in an $O_2/CO_2$ atmospheric condition.

• 한국입자에어로졸학회지
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• 제13권2호
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Water Engineering Research
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• 제1권2호
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• pp.119-127
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• 2000

In the process of crossflow microfiltration, a deposit of cake layer tends to form on the membrane, which usually controls the performance of filtration. It is found, however, that there exist a condition under which no deposit of cake layer is made. This condition is called the sub-critical flux condition, and the critical flux here means a flux below which a decline of flux with time due to the deposit of cake layer does not occur. In order to study the characteristics of the critical flux, a numerical model is developed to predict the critical flux condition, and is verified with experimental results. For development of the model, the concept of effective particle diameter is introduced to find a representative size of various particles in relation to diffusive properties of particles. The model is found to be in good match with the experimental results. The findings from the use of the model include that the critical flux condition is determined by the effective particle diameter and the ratio of initial permeate flux to crossflow velocity.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.392-397
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• 2000

Mono-disperse particles generated by a condensation particle generator are widely used to meet the experimental and industrial needs. The characteristics of particles generated by homogeneous nucleation have been studied experimentally using a laminar flow condensation particle generator. Dry nitrogen gas saturated with oleic acid vapor was cooled well below the saturation temperature causing the highly supersaturated vapor to nucleate. The dependence of GSD(Geometric Standard Deviation), GMD(Geometric Mean Diameter), and the mass concentration of particles on the temperature at the evaporator, flow rate and the temperature condition at condenser was studied. The experimental results show that the mass concentration of particles is affected by the radial temperature profile at condenser. Nucleation at the center of the condenser causes the mass concentration of particles to increase. The experimental results also show that the suppression of additional nucleation by a constant temperature condition at the condenser increases the mean diameter of particle.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.3102-3107
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• 2008

This paper was focused on the particulate matter (PM) on the gasoline and bio ethanol. Bio ethanol as a clean fuel is considered one of the alternative fuels that decreased the PM emission from the vehicle. Particle formation in SI engine was depended on the fuel and engine operating condition. In this paper, Particle number concentration behaviors were analyzed by DMS500 (Differential Mobility Spectrometer) and CPC (Condensation Particle Counter) instrument which was recommended by PMP (Particle Measurement Programme). Particle emissions were measured with various engine operating variables such as air excess ratio ($\lambda$), spark timing and intake valve opening (IVO) at part load condition. In vehicle test, the number of particulate matter was analyzed with golden particle measurement system, which was consist of CVS (Constant Volume Sampler), particle number counter and particle number diluter.