• 제목/요약/키워드: p-Si

검색결과 4,621건 처리시간 0.046초

기계적 가공과 무전해 선택적 증착기술을 이용한 나노/마이크로 금속패턴 제작에 관한 연구 (A Study on Nano/micro Pattern Fabrication of Metals by Using Mechanical Machining and Selective Deposition Technique)

  • 조상현;윤성원;강충길
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1507-1510
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    • 2005
  • This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

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비점오염원 관리지역의 선정 기법에 관한 연구 (A Study for the Selection Method of Control Area of Nonpoint Pollution Source)

  • 박상현;정우혁;이상진;임봉수
    • 한국물환경학회지
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    • 제26권5호
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    • pp.761-767
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    • 2010
  • This study introduces a model of territorial analysis on Chungcheongnam-do Nonsan-chun valley area, which gives an example of a method of selecting the management area for non-point pollution source from land use to help eliminate its source. High discharge load per unit area signify high level of land ratio with high level of basic unit of development load (including factory sites, school sites, roadways), which mean that there are a significant level of urbanization. It is these areas with the examination of the water quality of the nearby river that should be considered as the management area for non-point pollution source. Thus, the management area for non-point pollution source should be sought in areas with high discharge load per unit area and high density of water pollution area. When level of drainage is high the pollution density level is relatively lower, and when the level of drainage is low the density level is relatively higher. The level of pollution from non-point pollution source is much lower with more water flowing through. The possible non-point pollution source areas that were selected with these standards were then examined with the distance from the river, the slope angle, land usage, elevation, BOD discharge density load, T-N discharge density load, T-P discharge density load, and were given a level one through five. Out of the possible areas Nonsan-si Yeonmu-eup Anshim-li was the densest area, and it was given level one. The level one area should be examined further with the field analysis to be selected as the actual management area for non-point pollution source.

고체상미량추출법을 이용한 BTEX와 MTBE의 경쟁적 추출효과 및 미량분석에 관한 연구 (Competitive Extraction and Trace Analysis of BTEX and MTBE by Solid-Phase Microextraction (SPME))

  • 안상우;천석영;이시진;박재우;장순웅
    • 한국물환경학회지
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    • 제26권4호
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    • pp.622-628
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    • 2010
  • In this study, Solid-phase microextraction (SPME) with GC/FID was studied as a possible alternative to liquid-liquid extraction for the analysis of BTEX and MTBE. Experimental parameters affecting the SPME process (such as kind of fibers, adsorption time, desorption time, volume ratio of sample to headspace, salt addition, and magnetic stirring) were optimized. Experimental parameters such as CAR/PDMS, adsorption time of 20 min, desorption time of 5 min at $250^{\circ}C$, headspace volume of 50 mL, sodium chloride (NaCl) concentration of 25% combined with magnetic stirring were selected in optimal experimental conditions for analysis of BTEX and MTBE. The general affinity of analytes to CAR/PDMS fiber was high in the order p-Xylene>Toluene>Ethylbenzene>MTBE>Benzene. The linearity of $R^2$ for BTEX and MTBE was from 0.970 to 0.999 when analyte concentration ranges from $30{\mu}g/L$ to $500{\mu}g/L$, respectively. The relative standard deviation (% RSD) were from 2.5% to 3.2% for concentration of $100{\mu}g/L$ (n=5), respectively. Finally, the limited of detection (LOD) observed in our study for BTEX and MTBE were from $7.5{\mu}g/L$ to $15{\mu}g/L$, respectively.

정체수역에서의 Mattress/Filter 채움재에 따른 수질개선효과 (Effect of Water Quality Improvement of Fill Materals in the Stagnant Stream Channel)

  • 고진석;전지영;지홍기;이순탁
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2005년도 학술발표회 논문집
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    • pp.464-468
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    • 2005
  • 산업활동으로 인해 발생하는 슬래그 등의 폐기물을 적절히 처리하는 방법으로서는 저비용 처리형태와 자연계에서 슬래그 등의 특성을 고려한 Filter 기능을 수행할 수 있도록 수질이 악화된 하천이나 정체수역에 투입시켜 수질을 개선시킬 수 있는 방법의 도입이 필요하다. 현재 POSCO에서 발생하는 슬래그와 폐콘크리트의 화학적 성분은 주로 $CaO,\;SiO_2,\;Al_2O_3,\;Fe_2O_3$ 등으로 이루어져 있으며, 침전유발물질 및 흡착성물질이 공존하고 있다. 다공질 형태의 비표면적을 가지고 있어서 정화용 필터로 이용하기에 좋은 이점을 가지고 있다. 슬래그나 폐콘크리트를 Mattress/Filter 채움재 및 수질정화용 여재로 활용하면 폐기물처리, 자원 재활용 그리고 수질 환경 개선의 세 가지 효과를 동시에 얻을 수 있는 방법이 된다. 본 연구에서는 슬래그와 폐콘크리트를 활용한 정체수역에서 정화시스템의 정화특성을 조사하기 위하여 유입수와 유출수의 pH, 용존산소, 질소, 인 등을 측정하여 비교하였다. 수질개선을 위한 Mattress/Filter 시스템의 기본개념은 하천의 오염된 물이 Mattress/Filter의 공극사이를 통과하면서 채움재에 형성된 생물막이 수질 개선과정에서 나타나는 접촉작용, 생물 흡착작용, 생물산화의 분해작용 등을 촉진시키도록 하였다. Mattress/Filter를 이용한 수중 수질개선시스템에서 채움재로 제철폐기물인 슬래그와 건설폐기물인 폐콘크리트를 사용함으로써 Mattress/Filter의 다공성 및 넓은 표면적이라는 특성에 따른 물리적$\cdot$화학적$\cdot$생물학적 작용이 촉진되고 있음을 확인할 수 있었으며, 그 결과 정체수역에 설치한 Mattress/Filter는 다공질 속에서 쉽게 생물막을 형성시키고 유기물의 흡착을 촉진시켜 오염물질을 정화하는데 필요한 자정작용의 효과 증대와 수질개선을 촉진시킬 수 있는 자연생태적 하천정화시스템임을 확인할 수 있었다.

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Atomic Layer Deposition of Al2O3 Thin Films Using Dimethyl Aluminum sec-Butoxide and H2O Molecules

  • Jang, Byeonghyeon;Kim, Soo-Hyun
    • 한국재료학회지
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    • 제26권8호
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    • pp.430-437
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    • 2016
  • Aluminum oxide ($Al_2O_3$) thin films were grown by atomic layer deposition (ALD) using a new Al metalorganic precursor, dimethyl aluminum sec-butoxide ($C_{12}H_{30}Al_2O_2$), and water vapor ($H_2O$) as the reactant at deposition temperatures ranging from 150 to $300^{\circ}C$. The ALD process showed typical self-limited film growth with precursor and reactant pulsing time at $250^{\circ}C$; the growth rate was 0.095 nm/cycle, with no incubation cycle. This is relatively lower and more controllable than the growth rate in the typical $ALD-Al_2O_3$ process, which uses trimethyl aluminum (TMA) and shows a growth rate of 0.11 nm/cycle. The as-deposited $ALD-Al_2O_3$ film was amorphous; X-ray diffraction and transmission electron microscopy confirmed that its amorphous state was maintained even after annealing at $1000^{\circ}C$. The refractive index of the $ALD-Al_2O_3$ films ranged from 1.45 to 1.67; these values were dependent on the deposition temperature. X-ray photoelectron spectroscopy showed that the $ALD-Al_2O_3$ films deposited at $250^{\circ}C$ were stoichiometric, with no carbon impurity. The step coverage of the $ALD-Al_2O_3$ film was perfect, at approximately 100%, at the dual trench structure, with an aspect ratio of approximately 6.3 (top opening size of 40 nm). With capacitance-voltage measurements of the $Al/ALD-Al_2O_3/p-Si$ structure, the dielectric constant of the $ALD-Al_2O_3$ films deposited at $250^{\circ}C$ was determined to be ~8.1, with a leakage current density on the order of $10^{-8}A/cm^2$ at 1 V.

열 산화공정을 이용하여 제작된 고전압 GaN 쇼트키 장벽 다이오드 (High-Voltage GaN Schottky Barrier Diode on Si Substrate Using Thermal Oxidation)

  • 하민우;노정현;최홍구;송홍주;이준호;김영실;한민구;한철구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1418-1419
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    • 2011
  • 차세대 전력 반도체인 고전압 GaN 쇼트키 장벽 다이오드의 역방향 특성을 개선하기 위해서 열 산화공정이 제안되었다. AlGaN/GaN 에피탁시 위에 쇼트키 장벽 다이오드 구조가 제작되었으며, 쇼트키 컨택은 증착 후 $450^{\circ}C$에서 산화되었다. 열 산화공정이 메사 측벽의 AlGaN 및 GaN 표면에 $AlO_x$$GaO_x$를 형성하여 표면으로 흐르는 누설전류를 억제한다. 표면 및 GaN 버퍼를 통한 누설전류는 열 산화 공정 이후 100 ${\mu}m$-너비당 51.3 nA에서 24.9 pA로 1/2000 배 수준으로 감소하였다. 표면 산화물 형성으로 인하여 생성된 Ga-vacancy와 Al-vacancy는 acceptor로 동작하여 surface band bending을 증가시켜 쇼트키 장벽 높이를 증가시킨다. 애노드-캐소드 간격이 5 ${\mu}m$인 제작된 소자는 0.99 eV의 높은 쇼트키 장벽 높이를 획득하여, -100 V에서 0.002 A/$cm^2$의 낮은 누설전류를 확보하였다. 애노드-캐소드 간격이 5에서 10, 20, 50 ${\mu}m$로 증가되면 소자의 항복전압은 348 V에서 396, 606, 941 V로 증가되었다. 열 산화공정은 전력용 GaN 전자소자의 누설전류감소와 항복전압 증가를 위한 후처리 공정으로 적합하다.

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Importance of Leu-5 and Pro-6 in the Inhibitory Activity of the Serratia marcescens Metalloprotease Inhibitor (SmaPI)

  • Bae, Kwang-Hee;Kim, Dong-Min;Kim, Sun-Taek;Kim, Tae-Hoon;Shin, Yong-Chul;Byun, Si-Myung
    • BMB Reports
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    • 제34권2호
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    • pp.109-113
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    • 2001
  • The Serratia marcescens metalloprotease inhibitor (SmaPI) is a proteinase inhibitor toward Serratia marcescens metalloprotease (SMP). The three-dimensional structure of SmaPI was calculated by computer modeling using the structure complex between SMP and the Erwinia chrysanthemi inhibitor as a template. Based on this model structure, the substitution of the amino acid residues, Ala4, Leu-5, Pro-6, and Thr-7, were located at the hinge region of the N-terminal segment by site-directed mutagenesis. Although the A4R and T7A mutant SmaPIs showed a nearly full inhibitory activity, the inhibitory activity of SmaPI decreased significantly when the Leu-5 was converted to Ala, Gly, Ile, or Val. Surprisingly, the L5I and L5V mutant SmaPIs showed less inhibitory activities than the L5A mutant. From these results, we suggested that the orientations and positions of respective aliphatic groups in the side-chain of position 5 mainly affected the inhibitory activity of SmaPI. The overall side-chain hydrophobicity was only slightly affected. The side-chain of the Leu-5 residue contributed approximately 0.79 kcal/mol out of 8.44 kcal/mol to the binding of SmaPI with SMP The inhibitory activities of P6A and F6G were also severely decreased. The Pro-6 may have a critical role in maintaining the strict conformation of the N-terminal portion that may be important in the inhibitory activity of SmaPI. In conclusion, Leu-5 and Pro-6 have crucial roles in the inhibitory function of SmaPI toward SMP.

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잔류응력과 계면접합강도를 고려한 금속복합재료의 열탄소성 변형 해석 (Thermal Elasto-Plastic Deformation Analysis of Metal Matrix Composites Considering Residual Stress and Interface Bonding Strength)

  • 강충길;서영호
    • 한국정밀공학회지
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    • 제16권1호통권94호
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    • pp.227-237
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    • 1999
  • As the interface bonding phenomenon between the matrix and the reinforcements has a large effect on the mechanical properties of MMCs, a sugestion of the strength analysis technique considering the residual stress and the interface bonding phenomenon is very important for the design of pans and the estimation of fatigue behavior. In this paper the three dimensional finite element anaysis is performed during the elasto-plastic deformation of the particulate reinforced metal matrix composites. It was analyzed with the volume fractions in view of microscale. Bonding strength. interface separation and matrix void growth between the matrix and the reinforcements will be predicted on deformation under tensile loading. An interface seperation is estimated by the fracture criterion which is a critical value of generalized plastic work per unit volume. The shape of the reinforcement is assumed to be a perfect sphere. And the type of the reinforcement distribution is assumed as FCC array. The thermal residual stress in MMCs is induced by the heat treatment. It is included at the simulation as an initial residual stress. The element birth and death method of the ANSYS program is used for the estimation of the interface bonding strength, void generation and propagation. It is assumed that the fracture in the matrix region begin to occur under the external loading when the plastic work per unit volume is equal to the critical value. The fracture strain will be defined. The experimental data of the extruded $SiC_p$>/606l Al composites are compared with the theoretical results.

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Sorption of $UO^{2+}_2$ onto Goethite and Kaolinite: Mechanistic Modeling Approach

  • Jinho Jung;Lee, Jae-Kwang;Cho, Young-Hwan;Keum, Dong-Kwon;Hahn, Pil-Soo
    • Nuclear Engineering and Technology
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    • 제31권2호
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    • pp.182-191
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    • 1999
  • The sorption of UO$_{2}$$^{2+}$ onto goethite and kaolinite under various experimental conditions was successfully interpreted using surface complexation modeling (SCM). The SCM approach used in this work is the triple-layer model (TLM) in which weakly bonded ions are modeled as outer-sphere (ion-pair) complexes and strongly bonded ions as inner-sphere (surface coordination) complexes. The change of ionic strength did not affect the U(VI) sorption onto goethite, thus the formation of inner-sphere surface complexes, (FeO)$_2$UO$_2$ and (FeO)$_2$(UO$_2$)$_3$OH$_{5}$ was assumed to simulate the effects of ionic strength and goethite concentration. On the other hand, the U(VI) sorption onto kaolinite showed ionic strength dependence, thus the formation of AlO-UO$_{2}$$^{2+}$(outer-sphere complex) and SiO(UO$_2$)$_3$OH$_{5}$ (inner-sphere complex) was assumed to simulate the experimental data. In the presence of carbonates, the sorption of U(VI) onto kaolinite decreased in the weakly alkaline pH range. This was well simulated assuming the formation of a outer-sphere surface complex, A1OH$^{2+}$- (UO$_2$)$_2$CO$_3$OH$_3$. Since SCM approach uses thermodynamic data such as surface complexation constants, it is more predictive than empirical modeling approach in which conditional values such as partition coefficient are used. used.

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인공 및 자연강우를 이용한 축산자원화물의 배출특성에 관한 연구 (A study on the runoff characteristics of livestock resources using artificial and natural rainfall)

  • 장미향;송시훈;이현규;최윤영;황하선;김은정;김용석;이재관;류덕희;박배경
    • 한국환경과학회지
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    • 제22권12호
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    • pp.1661-1669
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    • 2013
  • This study conducted a laboratory simulation using artificial and natural rainfall in order to investigate the runoff characteristics of livestock resources through the analysis of the surface runoff water and infiltration water by rainfall intensity and fertilization level. Cattle manure and pig liquid fertilizer was used as livestock resource. As a result of this study, it was observed that the surface runoff occurred over 32 mm/hr rainfall intensity, and flow rate of the surface runoff water and the runoff ratio of contaminant parameters from livestock resource was increased, as rainfall intensity was stronger. With doubled fertilization level, T-N increased in compost and the amount of $COD_{Mn}$ runoff also considerably increased in liquefied fertilizer. In the case of natural rainfall, the runoff ratio of T-P clearly increased in compost and the T-N of final surface runoff ratio in compost and liquefied fertilizer was ranged from 0.13047 to 0.13623 with stronger rainfall intensity.