• 제목/요약/키워드: optical roughness measurement

검색결과 92건 처리시간 0.025초

INTERNATIONAL COLLABORATION FOR SILICON CARBIDE MIRROR POLISHING AND DEVELOPMENT

  • HAN, JEONG-YEOL;CHO, MYUNG;POCZULP, GARY;NAH, JAKYUNG;SEO, HYUN-JOO;KIM, KYUNG-HWAN;TAHK, KYUNG-MO;KIM, DONG-KYUN;KIM, JINHO;SEO, MINHO;LEE, JONGGUN;HAN, SUNG-YEOP
    • 천문학논총
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    • 제30권2호
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    • pp.687-690
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    • 2015
  • For research and development of Silicon Carbide (SiC) mirrors, the Korea Astronomy and Space Science Institute (KASI) and National Optical Astronomy Observatory (NOAO) have agreed to cooperate and share on polishing and measuring facilities, experience and human resources for two years (2014-2015). The main goals of the SiC mirror polishing are to achieve optical surface figures of less than 20 nm rms and optical surface roughness of less than 2 nm rms. In addition, Green Optics Co., Ltd (GO) has been interested in the SiC polishing and joined the partnership with KASI. KASI will be involved in the development of the SiC polishing and the optical surface measurement using three different kinds of SiC materials and manufacturing processes (POCO$^{TM}$, CoorsTek$^{TM}$ and SSG$^{TM}$ corporations) provided by NOAO. GO will polish the SiC substrate within requirements. Additionally, the requirements of the optical surface imperfections are given as: less than 40 um scratch and 500 um dig. In this paper, we introduce the international collaboration and interim results for SiC mirror polishing and development.

Powder blasting을 이용한 Fused silica glass의 마이크로 채널 가공 및 특성 평가에 관한 연구 (Evaluation of micro-channel characteristics of fused silica glass using powder blasting)

  • 이정원;김태민;신봉철
    • Design & Manufacturing
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    • 제14권1호
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    • pp.36-41
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    • 2020
  • Recently, due to the development of MEMS technology, researches for the production of effective micro structures and shapes have been actively conducted. However, the process technology based on chemical etching has a number of problems such as environmental pollution and time problems due to multi-process. Various processes to cope with this process are being studied, and one of the mechanical etching processes is the powder blasting process. This process is a method of spraying fine particles, which has the advantage of being an effective process in manufacturing hard brittle materials. However, it is also a process that adversely affects the material surface roughness and material properties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silica glass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyze the micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. The analysis was performed for the effective processing of powder blasting.

O2 / Ar 플라즈마를 이용한 구리호일 표면 개질에 관한 연구 (A Study on the Surface Modification Mechanism of Copper Foil Using O2 / Ar Plasma)

  • 이종찬;손진영;김문근;권광호;이현우
    • 한국전기전자재료학회논문지
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    • 제26권11호
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    • pp.836-840
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    • 2013
  • In this study, the surface modification of copper foil using an inductively coupled $O_2$ / Ar plasma as $O_2$ gas fraction (0~100%) was investigated in order to improve the surface characteristics. After plasma treatment, the measurement of the surface roughness, surface contact angle and surface energy were performed for the surface analysis of copper foil. As a result, the surface roughness and the surface energy were increased. And plasma diagnostics was performed by a double Langmuir probe (DLP) and optical emission spectroscopy (OES). Using these results, the plasma surface modification mechanism was investigated.

초정밀 열 영상 현미경 광학계 개발 (Development of the Ultra Precision Thermal Imaging Optical System)

  • 양순철;원종호
    • 한국정밀공학회지
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    • 제27권12호
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    • pp.15-21
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    • 2010
  • Recently, there is a demand for a thermal imaging microscope in the medical field as well as the semi-conductor industry Although the demand of the advanced thermal imaging microscope has been increased, it is very difficult to obtain the technology of developing a thermal camera, because it is used for defense industry. We developed the ${\times}5$ zoom microscope which has $3\;{\mu}m$ spatial resolution to research the design and fabrication of the IR (Infrared) optical system. The optical system of the IR microscope consists of four spherical lenses and four aspheric lenses. We verified individual sensitivity of each optical parameter as the first order approach to the analysis. And we also performed structure and vibration analysis. The optical elements are fabricated using Freeform 700A. The measurement results of surface roughness and form accuracy using NT 2000 and UA3P are Ra 2.36 nm and P-V $0.13\;{\mu}m$. Finally we ascertained resolution power of $3\;{\mu}m$ using USAF (United State Air Force) 1951 IR resolution test chart.

마그네트런 스퍼터링법으로 증착한 투명전극용 Al도핑된 ZnO의 공정 분위기에 따른 구조적, 전기적, 광학적 특성비교 (Dependence of the Structural, Electrical, and Optical Properties of Al-doped ZnO Films for Transparent Conductors on the Process Atmosphere in Magnetron Sputtering)

  • 임근빈;이종무
    • 한국재료학회지
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    • 제15권8호
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    • pp.518-520
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    • 2005
  • Effects of the $O_2/Ar$ flow ratio in the sputtering process on the crystallinity, surface roughness, carrier concentration, carrier mobility, and optical properties of Al-doped ZnO thin films deposited on sapphire (001) substrates by RF magnetron sputtering were investigated. XRD spectra showed a preferred orientation along the c-axis and a minimum FWHM of the (002) XRD intensity peak for the $O_2/Ar$ flow ratio of 0.5. The (101)peak also appeared and the degree of preferred orientation decreased as the $O_2/Ar$ flow ratio increased from 0.5 to 1.0. AFM analysis results showed that the surface roughness was lowest at the $O_2/Ar$ flow ratio of 0.5 and tended to increase owing to the increase of the grain size as the $O_2/Ar$ flow ratio increased further. According to the Hall measurement results the carrier concentration and carrier mobility of the fan decreased and thus the resistivity increased as the $O_2/Ar$ flow ratio increased. The transmittance of the ZnO:Al film deposited on the glass substrate was characteristic of a standing wave. The transmittance increased as the $O_2/Ar$ flow ratio in-RF magnetron sputtering increased up to 0.5. Considering the effects of the $O_2/Ar$ flow ratio on the surface roughness, electrical resistivity and transmittance properties of the ZnO:Al film the optimum $O_2/Ar$ flow ratio was 0.5 in the RF magnetron sputter deposition of the ZnO:Al film.

Emulsion과 Solution SBR Compound에 있어서 혼합시간(混合時間)에 따른 Carbon Black분산(分散)의 분석방법(分析方法)들 사이의 비교연구(比較硏究) (A Comparative Study Characterization Methods of Carbon Black Dispersion in Solution and Emulsion SBR Compounds Prepared at Various Mixing Levels)

  • 이성덕
    • Elastomers and Composites
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    • 제24권3호
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    • pp.193-202
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    • 1989
  • An experimental study of the development of carbon black dispersion by an internal mixer and its characterization is presented. We describe the measurement of carbon black agglomerate size and related characteristics using four different experimental techniques : optical microscopy, scanning elctrion microscopy, surface roughness, and electrical couductivity. The results from these different experiments are compared uning the same carbon black for a series of six different butadiene-styrene copolymers. The results from the different techniques are cross plotted and are critically discussed. It is found that surface but then sharply deteriorate. At subsequent stages of mixing optical microscopy seemed the most reliable measure.

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투명전도막으로써 DC 마그네트론 스퍼터링법으로 증착한 VOx 박막의 특성 (Characteristics of vanadium oxide prepared by DC magnetron sputtering method for the transport conductive oxide)

  • 이성용;박용섭;박재욱;이성욱;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.246-246
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    • 2008
  • In this work, VOx thin films have been deposited by DC magnetron sputtering method with various DC power. The characterization of the deposited thin films were changed by DC power. The experimental data are obtained on the growth rate and optical and electrical properties of VOx thin films with the increase of DC power. The growth rate. and the surface roughness decrease with DC power. Also, we investigated the electrical and optical properties of VOx thin films using hall measurement, 4-point probe, and UV-visible methods.

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다양한 코팅 처리에 의한 PEEK 추간체유합보형재의 생체 활성 표면에 관한 연구 (A Study on the bioactive surface modification of PEEK intervertebral fusion cage using various coating techniques)

  • 노수빈;박수지;이문환
    • 한국표면공학회지
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    • 제56권4호
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    • pp.273-282
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    • 2023
  • In this study, the surface of Polyetheretherketone (PEEK) disks was modified to have a hydrophilic surface by applying a coating of Polyethylene glycol (PEG), Hyaluronic acid(HA), and Poly-Dopamine(PDA). The investigation aimed to examine whether the coated surfaces showed enhanced bioactivity for orthopedic applications compared to the pure PEEK. The microstructure, surface characteristics, and wettability of PEEK coated with PEG, HA, and PDA were analyzed using scanning electron microscopy(SEM), FT-IR spectrophotometer, Roughness Measurement System, Micro-Vickers, and Contact angle measurement. The mechanical properties were analyzed using a tensile testing machine, while the MTT assay for cell activity was analyzed using a microplate reader to measure optical density. According to the SEM and FT-IR results, the composition and crystal structure of PEG, HA and PDA coated surface were verified. Also, roughness, hardness, and contact angle were all improved in the coating group compared to the pure PEEK. We checked the HepG2 cell proliferation by using MTT assay on 7th days. In MTT assay results, HepG2 cell proliferation was increased with time, at 7 days, cell viability on discs coated with PDA was significantly higher than pure PEEK, PEG, HA coated group. PDA coated PEEK exhibited the highest surface roughness, hardness, contact angle, and cell activity. The mechanical properties were not affected by the presence of the coating.

레이저 산란 영상을 이용한 표면거칠기의 실험적 규명에 관한 연구 (Study on the Experimental Identification of Surface Roughness Using Laser Scattering Image)

  • 홍연기;김경범
    • 대한기계학회논문집A
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    • 제34권1호
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    • pp.35-41
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    • 2010
  • 본 논문에서는 레이저 산란 영상을 이용하여 표면거칠기를 실험적으로 규명하였다. 우선, 레이저 산란 매개변수들과 표면형상에 따라 나타나는 광로의 편향성에 대해 고찰하였고, 이를 이용하여 레이저 산란 검사 시스템을 구성하였다. 연삭표면에서 획득한 레이저 산란 영상을 분석한 결과 영상에서 수직방향으로 나타나는 산란광 분포영역이 증가와 감소를 반복하는 특징이 나타났다. 이러한 차별적 특징을 표현하는 레이저 산란 영상을 획득하기 위해 실험계획법을 이용하여 레이저 산란변수들의 최적조건을 선정하였고, 연삭표면에서 표면거칠기가 증가함에 따라 레이저 산란 영상 내에서 수직방향으로 나타나는 산란광 분포 영역이 선형적으로 증가함을 알 수 있었다. 이러한 정보는 마이크로 표면의 평가 및 거칠기 측정 시 주요한 인자로 사용될 수 있을 것이다.

Er:YAG 레이저 조사가 산화 티타늄 블라스팅 임플란트 표면 미세 구조 및 거칠기에 미치는 영향 (The effect of Er:YAG laser irradiation on the surface microstructure and roughness of $TiO_2$ implant)

  • 안장혁;권영혁;박준봉;허익;정종혁
    • Journal of Periodontal and Implant Science
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    • 제38권1호
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    • pp.67-74
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    • 2008
  • Purpose: The aim of this study was to evaluate the effect of Er:YAG laser on microstructure and roughness of $TiO_2$ blasting implant surface. Materials and Methods: Ten $TiO_2$ blasting implant were used in this experiment. One implant was control group, and nine $TiO_2$ blasting implant surfaces were irradiated with Er:YAG laser under 100 mJ/pulse, 140 mJ/pulse, and 180 mJ/pulse condition for 1 min, 1.5 min, and 2 min respectively. Optical interferometer and scanning electron microscopy was utilized to measure roughness and microstructure of specimens. Results: The surface roughness was decreased after Er:YAG laser irradiation in all groups, but there was no significant difference. 100 mJ/pulse and 140 mJ/pulse group did not alter the $TiO_2$ blasting implant surface in SEM study while 180 mJ/pulse group altered the $TiO_2$ blasting implant surface. Implant surfaces showed melting, microfracture and smooth surface in 180 mJ/pulse group. Conclusion: Detoxification of implant surface using Er:YAG laser must be irradiated with proper energy output and irradiation time to prevent implant surface alteration.