• Title/Summary/Keyword: optical resolution

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The Measurement of Nano-grating by Scanning Probe Microscopy Using Digital PID Control (Digital PID Control을 적용한 Scanning Probe Microscopy의 Nano-grating 측정)

  • Park, Gyeong-Deok;Ji, Won-Su;Kim, Dae-Chan;Jang, Dong-Hun;O, Beom-Hwan;Park, Se-Geun;Lee, Il-Hang;Lee, Seung-Geol
    • Proceedings of the Optical Society of Korea Conference
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    • 2008.07a
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    • pp.185-186
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    • 2008
  • In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.

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An Efficient Method to Obtain MCF in Millimeter Wave Systems

  • Lee, Jong-Gil
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.28 no.3A
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    • pp.151-156
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    • 2003
  • Millimeter waves are potentially useful for high resolution ranging and imaging in low optical visibility conditions such as fog and smoke. Also, They can be used for wide band communications since the currently used spectrum bands are already crowded. However, it is necessary to develop a theoretical and experimental understanding of millimeter wave propagation to assess the performance of millimeter wave systems. The intensity fluctuations and mutual coherence function (MCF) describe atmospheric effects on the millimeter wave propagation. Using the quasi-optical method (QOM), a practical and efficient method is suggested to obtain MCF from the flux measurement in the antenna focal plane.

Measurement of CO Q-branch Raman Spectrum by using High Resolution Inverse Raman Spectrometer (고분해능 Inverse 라만 분광기를 이용한 CO Q-branch 라만 분광 측정)

  • 한재원
    • Proceedings of the Optical Society of Korea Conference
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    • 1989.02a
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    • pp.59-64
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    • 1989
  • Raman vibrational Q0branch spectra of pure CO are measured by using the technique of quasicw inverse Raman spectroscopy utilizing a pulsed single-frequency laser source. This approach gives enhanced sensitivity compared to earlier work which employed CW lasers, allowing extension of that work to higher accuracy, higher J states, and higher pressure. Fitting laws with pertubation theory and modified energy gap(MEG) theory are described, and the line broadening and shifting coefficients of J=0 to 24 are determined with both fitting laws.

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A Double Resolution Pixel Array for the Optical Angle Sensor (2배 해상도를 가지는 픽셀 어레이 광학 각도 센서)

  • Choe, Kun-Il;Han, Gun-Hee
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.2
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    • pp.55-60
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    • 2007
  • This paper presents a compact double resolution scheme for the optical angle sensor based on 1-dimensional CMOS photodiode pixel array. All the pixels are divided into the even pixel and the odd pixel groups. The winner take all circuit is provided for each group. The proposed interpolation scheme increases the resolution by 2 from the winner addresses and winner values. The interpolation scheme can be implemented without any additional pixels or winner take all circuits and require only a comparator and a XOR gate. The proposed pixel array chip that has 336 photodiode pixels with $5.6{\mu}m$ pitch was fabricated with $0.35{\mu}m$ CMOS process and was assembled with a $50{\mu}m$ slit to form an angle sensor. The measured resolution is $0.1{\circ}$ with the proposed interpolation. The chip consumes 35mW and provides 8k samples per second.

Evaluation of Imaging Performance of Phase Shift Mask Depending on Reflectivity with Sub-resolution Assist Feature in EUV Lithography (SRAF를 적용한 극자외선 노광기술용 위상 변위 마스크의 반사도에 따른 이미징 특성 연구)

  • Jang, Yong Ju;Kim, Jung Sik;Hong, Seongchul;Cho, HanKu;Ahn, Jinho
    • Journal of the Semiconductor & Display Technology
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    • v.14 no.3
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    • pp.1-5
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    • 2015
  • In photolithography process, resolution enhancement techniques such as optical proximity correction (OPC) and phase shift mask (PSM) have been applied to improve resolution. Especially, sub-resolution assist feature (SRAF) is one of the most important OPC to enhance image quality including depth of focus (DOF). However, imaging performance of the mask could be varied with the diffraction order amplitude changed by inserting SRAF. Therefore, in this study, we investigated the imaging properties and process margin of attenuated PSM with SRAF. Reflectivities of attenuated PSMs at 13.5 nm were 3, 6, 9% and simulation was performed by $PROLITH^{TM}$. As a result, aerial image properties and DOF as well as diffraction efficiency were improved by increasing the reflectivity of attenuated PSM. Additionally, printed critical dimension variations depending on SRAF width and space error were also reduced for attenuated PSM with high reflectivity. However, SRAF could be printed when reflectivity of attenuated PSM is high enough. In conclusion, optimization of reflectivity of attenuated PSM and SRAF to prevent side-lobe from being printed is needed to be considered.

A Data Burst Assembly Algorithm in Optical Burst Switching Networks

  • Oh, Se-Yoon;Hong, Hyun-Ha;Kang, Min-Ho
    • ETRI Journal
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    • v.24 no.4
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    • pp.311-322
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    • 2002
  • Presently, optical burst switching (OBS) technology is under study as a promising solution for the backbone of the optical Internet in the near future because OBS eliminates the optical buffer problem at the switching node with the help of no optical/electro/optical conversion and guarantees class of service without any buffering. To implement the OBS network, there are a lot of challenging issues to be solved. The edge router, burst offset time management, and burst assembly mechanism are critical issues. In addition, the core router needs data burst and control header packet scheduling, a protection and restoration mechanism, and a contention resolution scheme. In this paper, we focus on the burst assembly mechanism. We present a novel data burst generation algorithm that uses hysteresis characteristics in the queueing model for the ingress edge node in optical burst switching networks. Simulation with Poisson and self-similar traffic models shows that this algorithm adaptively changes the data burst size according to the offered load and offers high average data burst utilization with a lower timer operation. It also reduces the possibility of a continuous blocking problem in the bandwidth reservation request, limits the maximum queueing delay, and minimizes the required burst size by lifting up data burst utilization for bursty input IP traffic.

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MEMS Technology for Biophotonic Applications (바이오포토닉스응용을 위한 MEMS 미세광학소자의 개발)

  • Jeong, Gi-Hun
    • Proceedings of the Optical Society of Korea Conference
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    • 2009.02a
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    • pp.387-388
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    • 2009
  • Biophotonics is an emerging area in a fusion of biology and photonics, especially in advanced bioimaging, optical biosensors, photomodulation, and biochip optical read-out, and optical manipulation. This emerging area also creates many opportunities for interdisciplinary study of biology and photonics. Micro-Electro-Mechanical-System(MEMS) is an attractive technology in miniaturizing sensors and actuactors. For last decade, it has contributed to the development for active and passive small and integrated optical components in optical communication. Recently, this technology is also merging into biology for high sensitive biosensing and high resolution and fast bioimaging in small form factor. In this talk, some key advantages of small optical components and recent biophotonic MEMS achievement will be discussed for miniaturized advanced biophotonic systems.

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A Study on the Dip-pen Nanolithography Process and Fabrication of Optical Waveguide for the Application of Biosensor

  • Kim, Jun-Hyong;Yang, Hoe-Young;Yu, Chong-Hee;Lee, Hyun-Yong
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.4
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    • pp.163-168
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    • 2008
  • Photonic crystal structures have been received considerable attention due to their high optical sensitivity. One of the techniques to construct their structure is the dip-pen lithography (DPN) process, which requires a nano-scale resolution and high reliability. In this paper, we propose a two dimensional photonic crystal array to improve the sensitivity of optical biosensor and DPN process to realize it. As a result of DPN patterning test, we have observed that the diffusion coefficient of the mercaptohexadecanoic acid (MHA) molecule ink in octanol is much larger than that in acetonitrile. In addition, we have designed and fabricated optical waveguides based on the mach-zehnder interferometer (MZI) for application to biosensors. The waveguides were optimized at a wavelength of 1550 nm and fabricated according to the design rule of 0.45 delta%, which is the difference of refractive index between the core and clad. The MZI optical waveguides were measured of the optical characteristics for the application of biosensor.

Measurements of optical wavelength using an optical fiber retarder (광섬유 위상지연기를 이용한 광파장 측정)

  • 이현우;김용평
    • Korean Journal of Optics and Photonics
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    • v.12 no.1
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    • pp.5-9
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    • 2001
  • A wavemeter was realized using the phenomena that the phase lag between principal polarization states in an optical retarder is a function of wavelength. The change in the polarization state of the optical beam as it passes through the optical retarder is dependent on wavelength. The wavelength of the optical beam is determined by comparing the power difference between principal polarization states. A prototype wavemeter was successfully implemented using a polarization maintaining fiber with birefringence $3\times10^{-4}$ and length 100 mm as the optical retarder. The measurement resolution was 0.08 nm over a wavelength region of 1554.38 nm-1557.l9 nm, which agreed well with theoretically calculated results. In addition, the dependence of operating characteristics on temperature was analyzed theoretically and experimentally.mentally.

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