• Nano
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• 제13권10호
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• pp.1850112.1-1850112.6
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• 2018

Optical manipulation on microscale and nanoscale structures opens up new possibilities for assembly and control of microelectromechanical systems and nanoelectromechanical systems. Static optical force induces constant displacement while changing optical force stimulates vibration of a microcantilever/nanocantilever. The vibratory behavior of a single carbon nanocoil cantilever under optical actuation is investigated. A fitting formula to describe the laser-induced vibration characteristics is deduced based on a classical continuum model, by which the resonance frequency of the carbon nanocoil can be determined directly and accurately. This optically actuated vibration method could be widely used in stimulating quasi-1D micro/nanorod-like materials, and has potential applications in micro-/nano-opto-electromechanical systems.

• 센서학회지
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• 제23권3호
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• pp.165-169
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• 2014

An existing infrared (IR) analysis system is generally composed of infrared source, IR focusing lenses, IR detector, and optical chopper. An optical chopper is widely used in combination with lock-in amplifier to improve the signal-to-noise ratio by periodically interrupting incident light beam. During recent years, a few researches on miniaturized optical chopper have been reported to apply to micro-scaled optical systems. In this paper, a micro optical chopper operated by electromagnetic actuation is proposed and applied to a miniaturized micro-scaled optical system operating in IR spectral range. Additionally, the fabrication method of the proposed micro chopper is demonstrated. The proposed micro optical chopper is composed of the polydimethylsiloxane (PDMS) membrane, solenoid, and permanent magnet. The permanent magnet is bonded on the PDMS membrane using an ultraviolet-activated adhesive. The operation of the chopper is based on the attractive and repulsive forces between permanent magnet and solenoid induced by an electrical current flowing through the solenoid. The fabricated micro optical chopper could operate up to 200 Hz of frequency. The maximum operating distance of the chopper with 7mm diameter membrane was $750{\mu}m$ at 100 Hz of frequency.

• 소음진동
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• 제8권2호
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• pp.346-352
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• 1998

This paper presents actuating characteristics of an asymmetric high-speed optical pick-up fine actuator that can be installed in a small area such as a notebook personal computer. In the asymmetric actuator four points (mass center, actuation center, supporting point of wire suspension on a bobbin, and optical axis) are not coincident so that the proposed actuator suspension reveals undesirable suspension resonance in the pitch and yaw direction. Lumped parameter dynamic model in each direction is used to investigate the driving characteristics with respect to relative location of the four points. Some of desired design directions toward reducing resonance peaks are suggested by using sensitivity information. In order to avoid undesirable resonance, at least supporting point on the obbin must be located in the middle of the mass and actuation center of the asymmetric pick-up actuator.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권1호
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• pp.55-59
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• 2003

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

• Current Optics and Photonics
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• 제5권5호
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• pp.532-537
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• 2021

We present a compact endoscopic probe in a needle form which has a fast beam-scanning capability for optical coherence tomography (OCT). In our study, a beam-scanning OCT imaging needle was fabricated with a 26G syringe needle (0.46 mm in outer diameter) and a thin OCT imaging probe based on the stepwise transitional core (STC) fiber. The imaging probe could freely rotate inside the needle for beam scans. Hence, OCT imaging could be performed without rotation or translation of the needle body. In our design, the structural integrity of the needle's steel tubing was preserved for mechanical robustness. Probing the optical signal was performed through the needle's own window formed at the end. For hand-held operation of our imaging needle, a light and compact scanner module (130 g and 45 × 53 × 60 mm³) was devised. Connected to the imaging needle, it could provide rotational actuation driven by a galvanometer. Because of its finite actuation range, our scanner module did not need a fiber rotary joint which might add undesirable complexity. The beam scan speed was 20 Hz and supported 20 frames per second at the maximum for endoscopic OCT imaging.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.865-868
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• 2001

We designed and fabricated a planner-type thermoelastic microactuator with a latch-up operation for optical switching. Latch-up actuation is prerequisite to implement an optical switch with low power consumption and high reliability. The proposed microactuator consists of four cantilever-shaped thermal actuators, four displacement linkages, two shallow arch-shaped leaf springs, a mobile shuttle mass with a micromirror, and four elastic boundaries. The structural layer of the planar microactuator is phosphorous-doped 12$\mu\textrm{m}$-thick polysilicon, and the sacrificial layer is LTO(Low Temperature Oxide) of 3$\mu\textrm{m}$thickness. The displacement of actuator is as large as 3$\mu\textrm{m}$when the length of actuation bar is 100$\mu\textrm{m}$in length at 5V input voltage. The proposed microactuators have advantages of easy assembly with other optical component by way of fiber alignment in the substrate plane, and its fabrication process features simplicity while retaining batch-fabrication economy.

• 센서학회지
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• 제20권1호
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• pp.40-45
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• 2011

Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40\;{\mu}m$ long, $7\;{\mu}m$ wide, and $3\;{\mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.

• 한국가시화정보학회지
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• 제18권1호
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• pp.38-43
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• 2020

This paper presents a new type of electrowetting driven tandem light deflector for high performance optical application. To steer an incident light, the proposed light deflector deforms the fluid interface using electrowetting actuation. The performance of the light deflector was experimentally verified by using a prototype of the proposed light deflector. Single and tandem light deflectors were separately prepared using microfabrication processes. The optical tests of the deflectors were conducted using a laser light. The proposed tandem light deflector obtained a 45° beam steering angle with a 5.3° deflection angle while a single light deflector was required for a 10.9° deflection angle to obtain the same beam steering angle. The proposed tandem light deflector with high optical capability can be applied to various optical applications from camera modules in mobile smart devices to advanced future optical systems.

• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.27-33
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• 2004

This paper is concerned with development of a micro tensile testing machine for optical functional materials such as single or poly crystal silicon and nickel film. Two micro tensile testers have been developed for various types of materials and dimensions. One of the testers is actuated by a PZT and the other is actuated by a servo motor for a precise displacement control. The specifications of PZT actuated micro tensile tester developed are as follows: the volumetric size of tester is desktop sized of 710$\times$200$\times$270 $mm^3$; the minimum load capacity and the load resolution in the load cell of 1N are 3 mN and 0.1 mN respectively; the full stroke and the stoke resolution of piezoelectric actuator are 1 mm and 10nm respectively. A special automatic specimen installing equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimen for testing.