• 제목/요약/키워드: nickel substrates

검색결과 100건 처리시간 0.023초

플라즈마 기상 화학 증착법을 이용한 탄소나노튜브의 선택적 수직성장 기술 (Selective Growth of Freestanding Carbon Nanotubes Using Plasma-Enhanced Chemical Vapor Deposition)

  • 방윤영;장원석
    • 한국정밀공학회지
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    • 제24권6호
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    • pp.113-120
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    • 2007
  • Chemical vapor deposition (CVD) is one of the various synthesis methods that have been employed for carbon nanotube (CNT) growth. In particular, Ren et al reported that large areas of vertically aligned multi-wall carbon nanotubes could be grown using a direct current (dc) PECVD system. The synthesis of CNT requires a metal catalyst layer, etchant gas, and a carbon source. In this work, the substrates consists of Si wafers with Ni-deposited film. Ammonia $NH_3$) and acetylene ($C_2H_2$) were used as the etchant gases and carbon source, respectively. Pretreated conditions had an influence on vertical growth and density of CNTs. And patterned growth of CNTs could be achieved by lithographical defining the Ni catalyst prior to growth. The length of single CNT was increased as niclel dot size increased, but the growth rate was reduced when nickel dot size was more than 200 nm due to the synthesis of several CNTs on single Ni dot. The morphology of the carbon nanotubes by TEM showed that vertical CNTs were multi-wall and tip-type growth mode structure in which a Ni cap was at the end of the CNT.

플라즈마 가스와 RF 파워에 따른 NiO 박막의 우선배향성 및 표면형상 변화 (The Evolution of Preferred Orientation and Morphology of NiO Thin Films under Variation of Plasma gas and RF Sputtering Power)

  • 류현욱;최광표;노효섭;박용주;권용;박진성
    • 한국재료학회지
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    • 제14권2호
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    • pp.121-125
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    • 2004
  • Nickel oxide (NiO) thin films were deposited on Si(100) substrates at room temperature by RF magnetron sputtering from a NiO target. The effects of plasma gas and RF power on the crystallographic orientation and surface morphology of the NiO films were investigated. X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM) were employed to characterize the deposited film. It was found that the type of plasma gases affected the crystallographic orientation, deposition rate, surface morphology, and crystallinity of NiO films. Highly crystalline NiO films with (100) orientation were obtained when it was deposited under Ar atmosphere. On the other hand, (l11)-oriented NiO films with poor crystallinity were deposited in $O_2$. Also, the increase in RF power resulted in not only higher deposition rate, larger grain size, and rougher surface but also higher crystallinity of NiO films.

흑색 코발트 태양 선택흡수막의 광학적특성과 구조 (Optical Properties and Structure of Black Cobalt Solar Selective Coatings)

  • 이길동
    • 한국태양에너지학회 논문집
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    • 제31권4호
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    • pp.48-56
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    • 2011
  • Black cobalt solar selective coatings were prepared by thermal oxidation of electroplated cobalt metal on copper and nickel substrates. The optical properties and structure of the black cobalt selective coating for solar energy utilizations were characterized by glow discharge spectrometry (GDS), ultraviolet-visible-near infrared (UV-VIS-NIR) spectrometer, atom force microscopy(AFM) and X-ray photoelectron spectroscopy(XPS). The optical properties of optimum black cobalt selective coating prepared on copper substrate were a solar absorptance of 0.82 and a thermal emittance of 0.01. From the GDS depth profile analysis of these coatings, the concentration of cobalt particles near the interface was higher than at the surface, but oxygen concentration at the surface was higher than at the interface. These results suggest that the selective absorption was dominated by this chemical composition variation in the coating. The surface of this film exhibited morphology with root-mean-square(rms) roughness of about 144.3nm. XPS measurements data showed that several phases of Co coexist($Co_3O_4$,CoO) in the film.

Reverse Offset Printing용 고신축성 Blanket 재료 선정에 관한 연구 (A Study on the Selection of Highly Flexible Blanket for Reverse Offset Printing)

  • 신승항;김석;조영태
    • 한국기계가공학회지
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    • 제20권5호
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    • pp.121-127
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    • 2021
  • Reverse offset printing is considering as an emerging technology for printed electronics owing to its environmentally friendliness and cost-effectiveness. In reverse offset printing, selecting the materials for cliché and blanket is critical because of its minimum resolution, registration errors, aspect ratio of reliefs, pattern area, and reusability. Various materials such as silicon, quartz, glass, electroplated nickel plates, and imprinted polymers on rigid substrates can be used for the reverse offset printing of cliché. However, when new structures are designed for specific applications, new clichés need to re-fabricated each time employing multiple time-consuming and costly processes. Therefore, by modifying the blanket materials containing the printing ink, several new structures can be easily created using the same cliché. In this study, we investigated various elastomeric materials and evaluated their applicability for designing a highly stretchable blanket with controlled elastic deformation to implement tunable reverse offset printing.

반도체 패키지 기판용 Ni-less 표면처리 기술 개발동향 (Development Trend of Ni-less Surface Treatment Technology for Semiconductor Packaging Substrates)

  • 조민교;조진기;김경민;김성용;한덕곤;성태현
    • 마이크로전자및패키징학회지
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    • 제30권1호
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    • pp.49-54
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    • 2023
  • 최근 SIP (System in Packaging) 기술은 고주파(5G 이상) 통신 및 미세 피치 회로 특성을 만족해야 한다. 기존 ENIG (Electroless Ni/Immersion Au Plating) 표면처리는 전송 손실이 증가하여 고주파에 적합하지 않으므로, 니켈 도금층이 없어도 패턴 및 패드의 신뢰성 수준을 만족시킬 수 있는 표면 처리 기술이 검토되고 있다. 본 논문에서는 고주파 통신 대응을 위한 Ni-less 표면처리기술과 소재에 따른 주파수 특성 등에 대한 연구 동향을 조사하였다.

고속전단 시험을 이용한 Sn-37Pb BGA solder joints의 기계적 신뢰성 특성 평가 (Mechanical reliability of Sn-37Pb BGA solder joints with high-speed shear test)

  • 장진규;하상수;하상옥;이종근;문정탁;박재현;서원찬;정승부
    • 마이크로전자및패키징학회지
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    • 제15권4호
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    • pp.65-70
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    • 2008
  • 본 연구에서는 BGA(Ball Grid Array) 솔더 접합부에 high impact가 가해졌을 경우 접합부의 기계적 특성에 대해서 연구하였다. 시편은 ENIG(Electroless Nickel Immersion Gold) 표면 처리된 FR-4 기판 위에 직경이 500 ${\mu}m$인 Sn-37Pb 솔더볼을 BGA 방식으로 배열하고 리플로우(Reflow)를 통하여 제작하였다. HTS(High Temperature Storage) 테스트를 위해, 시편을 일정한 온도의 $120^{\circ}C$에서 250시간 동안 시효처리(Aging)를 실시하였다. 시효처리 후, 각각의 시편은 고속 전단 시험기(Dage-4000HS)를 이용하여 속도 변수는 0.01, 0.1, 1, 3 m/s로 설정하여 고속전단 시험을 실시하였다. 전단시험 후, 솔더 접합 계면과 파면을 주사전자현미경(Scanning Electron Microscope, SEM)을 통하여 관찰하였다. 솔더 접합 계면에는 $Ni_3Sn_4$의 금속간 화합물이 성장하였으며, 시효처리 후, 솔더 접합 계면에 생성된 금속간 화합물의 두께가 증가하는 것을 관찰 할 수 있었다. 전단 시험 결과, 전단 속도가 빨라짐에 따라 전단 강도값은 증가하는 경향을 나타내었다. 솔더 접합부의 파단은 전단 속도와 시효처리 시간에 따라 다양한 파괴 모드로 진행됨을 알 수 있었다. 또한, 파괴 모드는 연성파괴 형상을 보이다가 전단속도가 증가함에 따라 취성 파괴 형상으로 변하는 것을 알 수 있었다.

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자연산화막 존재에 따른 코발트 니켈 복합실리사이드 공정의 안정성 (Silicidation Reaction Stability with Natural Oxides in Cobalt Nickel Composite Silicide Process)

  • 송오성;김상엽;김종률
    • 한국산학기술학회논문지
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    • 제8권1호
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    • pp.25-32
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    • 2007
  • 코발트 니켈 합금형 실리사이드 공정에서 단결정실리콘과 다결정실리콘 기판에 자연산화막이 있는 경우 나노급 두께의 코발트 니켈 합금 금속을 증착하고 실리사이드화하는 경우의 반응 안정성을 확인하였다. 4인치 P-type(100)Si 기판 전면에 poly silicon을 입힌 기판과 single silicon 상태의 두 종류 기판을 준비하고 두께 4 nm의 자연산화막이 있는 상태에서 10 nm 코발트 니켈 합금을 니켈의 상대조성을 $10{\sim}90%$로 달리하며 열증착하였다. 통상의 600, 700, 800, 900, 1000, $1100^{\circ}C$ 각 온도에서 실리사이드화 열처리를 시행 후 잔류 합금층을 제거하고, XRD(X-ray diffraction)및 FE-SEM(Field emission scanning electron microscopy), AES(Auger electron spectroscopy)를 사용하여 실리사이드가 생겼는지 확인하였다. 마이크로라만 분석기로 실리사이드 반응시의 실리콘 층의 잔류 스트레스도 확인하였다. 자연산화막이 존재하는 경우 실리사이드 반응이 진행되지 않았고, 폴리실리콘 기판과 고온에서는 금속과 산화층의 반응잔류물이 생성되었다. 단결정 기판의 고온열처리에서는 실리사이드 반응이 없더라도 핀홀이 발생할 수 있는 정도의 열스트레스가 존재하였다. 코발트 니켈 복합실리사이드 공정에서는 자연산화막을 제거하는 공정이 필수적이었다.

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EFFECT OF ADDED Si ON DENSIFICATION OF Ni-AI INTERMETALLIC COATING ON SPHEROIDAL GRAPHITE CAST IRON SUBSTRATES

  • Kim, Tetsuro ata;Keisuke Uenishi;Akira Ikenaga;Kojiro F. Kobayashi
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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    • pp.726-731
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    • 2002
  • Reaction synthesis is a process to form ceramics, intermetallics and their composites from elemental powder mixture. Application of this process to a surface modification techniques has a possibilities to enable the process at a lower temperature or for a shorter time, although synthesized materials are likely to include voids and unreacted elements. This paper intend to examine the effect of Si addition to the mixture of Al and Ni on the densification of synthesized Ni-Al intermetallic compounds and to evaluate the surface properties of obtained coatings. By the Si addition, exothermic reaction temperature to form Ni-Al intermetallic was lowered to be below the melting point of Al. Si soluted $Al_3$Ni$_2$, $Al_3$Ni and $Al_{6}$Ni$_3$Si were mainly formed in the coating layer when powder mixture was heated to 973K for 300s. Besides, densification was enhanced by increasing hot press pressure, Si additions and heating rate. When the composition of eutectic Al-Si reaches 78%, void ratio of sintered compact reduced to 0.4%. It is caused by higher flowability of Al-Si liquid phase generated and its infiltration into the void. Since the hardness of NiAl(Si) compound (about 600HV) formed in the coating layer is higher than that of Ni-Al compound (about 400HV), coating layer with high density and superior wear property is obtained by hot press using reaction synthesis from Al-Ni-Si powder mixture.

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다공성 니켈 나노 구조체를 이용한 3차원 그래핀의 합성 (Synthesis of Three-Dimensional Graphene Using Porous Nickel Nanostructure)

  • 송우석;명성;이선숙;임종선;안기석
    • Composites Research
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    • 제29권4호
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    • pp.151-155
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    • 2016
  • 그래핀은 저차원 구조에서 기인하는 우수한 특성으로 인해 슈퍼커패시터의 전극소재로 응용이 가능한 소재이다. 본 연구에서는 2차원 구조인 그래핀의 비 표면적 향상을 위해 다공성 니켈 나노구조체 표면에 열 화학기상증착법과 마이크로웨이브 플라즈마 화학기상증착법을 이용하여 3차원의 그래핀을 합성하였다. 주사전자현미경, 라만 분광법, X-선 광전자 분광법을 통해 합성된 그래핀의 구조적, 화학적 특성을 분석한 결과, 3차원 구조의 우수한 결정성을 지니는 다중층 그래핀이 다양한 기판 위에 합성된 것을 확인할 수 있었다.

진공증착법으로 제작한 Ag-X(X=Cu,Ni,C) 합금의 기계적 성질에 관한 연구 (A Study on the Mechanical Properties of Ag-X(X=Cu,Ni,C) Alloys Prepared by the Vacuum-deposition Technique)

  • 오창섭;한창석
    • 열처리공학회지
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    • 제24권5호
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    • pp.243-250
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    • 2011
  • When alloys are vacuum-deposited on cooled substrates, super-rapidly cooled alloy films in the unequilibrium state can be obtained. As an application of this method, Ag-Cu, Ag-Ni and Ag-C alloys were successfully produced, and their mechanical properties with tempering temperature were investigated. The following results were obtained : (1) In case of Ag-Cu alloys, the solid solution was hardened by tempering at $150^{\circ}C$. The hardening is considered to occur when the solid solution begins to decompose into ${\alpha}$ and ${\beta}$ phases. The Knoop hardness number of a 40 at.%Ag-Cu alloy film deposited on a cooled glass substrate was 390 $kg/mm^2$. The as-deposited films were generally very hard but fractured under stresses below their elastic limits. (2) In case of Ag-Ni and Ag-C alloys, after the tempering of 4 at.%Ni-Ag alloy at $400^{\circ}C$ and of 1 and 2 at.%C-Ag alloys at $200^{\circ}C$, they were hardened by the precipitation of fine nickel and carbon particles. The linear relationship between proof stress vs. $(grain\;diameter)^{-l/2}$ for bulk silver polycrystals can be applied to vacuum-deposited films up to about 0.1 ${\mu}m$ grain diameter, but the proof stress of ultra-fine grained silver with grain diameters of less than 0.1 ${\mu}m$ was smaller than the value expected from the Petch's relation.