DOI QR코드

DOI QR Code

Development Trend of Ni-less Surface Treatment Technology for Semiconductor Packaging Substrates

반도체 패키지 기판용 Ni-less 표면처리 기술 개발동향

  • Min-Kyo Cho (Department of Material Engineering, Tech University of Korea) ;
  • Jin-Ki Cho (Department of Material Engineering, Tech University of Korea) ;
  • Kyoung-Min Kim (Department of Material Engineering, Tech University of Korea) ;
  • Sung Yong Kim (Dept. of Electronics Eng., Tech University of Korea) ;
  • Deok-Gon Han (MK Chem & Tech Co., Ltd) ;
  • Tae-Hyun Sung (MK Chem & Tech Co., Ltd)
  • 조민교 (한국공학대학교 신소재공학과) ;
  • 조진기 (한국공학대학교 신소재공학과) ;
  • 김경민 (한국공학대학교 신소재공학과 ) ;
  • 김성용 (한국공학대학교 전자공학부) ;
  • 한덕곤 ((주)엠케이켐앤텍) ;
  • 성태현 ((주)엠케이켐앤텍)
  • Received : 2023.03.20
  • Accepted : 2023.03.30
  • Published : 2023.03.30

Abstract

Recently, System in Packaging(SIP) technology needs to meet high frequency (5G and more) communication technology and fine pitch surface treatment. The conventional Electroless Ni/Immersion Au plating(ENIG) is not suitable for high frequency range because of magnetic properties are increasing the transmission loss. Without nickel plating layer, the pattern and pad reliability level must be meet the condition. In this review paper, we investigated research trends on Ni-less surface treatment technology for high-frequency communication and frequency characteristics according to materials.

최근 SIP (System in Packaging) 기술은 고주파(5G 이상) 통신 및 미세 피치 회로 특성을 만족해야 한다. 기존 ENIG (Electroless Ni/Immersion Au Plating) 표면처리는 전송 손실이 증가하여 고주파에 적합하지 않으므로, 니켈 도금층이 없어도 패턴 및 패드의 신뢰성 수준을 만족시킬 수 있는 표면 처리 기술이 검토되고 있다. 본 논문에서는 고주파 통신 대응을 위한 Ni-less 표면처리기술과 소재에 따른 주파수 특성 등에 대한 연구 동향을 조사하였다.

Keywords

Acknowledgement

이 성과는 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 "월드클래스플러스 (R&D, P171000005)" 사업의 지원을 받아 수행된 연구임

References

  1. D. Cullen, B. Kline, G. Moderhock, and L. Gatewood, "Effects of Surface Finish on High Frequency signal loss using Various Substrate Materials", MacDermid, Inc., (2000)
  2. Y. Tomita, Q. Wu, A. Maeda, S. Baba, and N. Ueda, "Advanced surface plating on the organic FCBGA package", in IEEE ECTC 2000, 861-867 (2000)
  3. C. E. Ho, T. T. Kuo, W. Gierlotka, and F. M. MA, "Development and Evaluation of Direct Deposition of Au,Pd(P) Bilayers over Cu Pads in Soldering Applications", J. Electronic Materials, 41(12), 3276-3283 (2012) https://doi.org/10.1007/s11664-012-2200-9
  4. Y. G. Jung, M. J. Lee, S. W. Park, D. S. Ryu, Y. S. Jung, C. H. Hwang, C. H. Lee, S. S. Park, M. Jimarez, and M. J. Lee, "Development of Large Die Fine Pitch Flip Chip BGA using TCNCP Technology", in IEEE 2012, 439-443 (2012)
  5. M. J. Lee, C. C. Lim, and P. T. Teh, "Packaging Technology and Design Challenges for Fine Pitch Cu Pillar and BOT (Bond on Trace) using Thermal Compression Bonding", 36th International Electronic Manufacturing Technology Conference, 15216609 (2014)
  6. A. Gross and N. Sitte, "Nickel free final finishes in the electronics industry", in IMAPS/EMPC, (2015)
  7. K. Shah, "Reliable Nickel-Free Surface Finish Solution for High-Frequency, HDI PCB Applications", J. Microelectron. Electron. Packag., 17(4), 121-127 (2020) https://doi.org/10.4071/imaps.1227802
  8. A. Gross and N. Sitte, "Nickel-Free Final Finishes in the Electronics Industry", 2015 European Microelectronics Packaging Conference (EMPC), 1-4 (2015)
  9. D. Baudrand and J. Bengston, "Electroless Plating Processes: Developing Technologies for Electroless Nickel, Palladium and Gold", Metal Finishing, 93(9), 55-57 (1995) https://doi.org/10.1016/0026-0576(95)99502-2
  10. H. O. Ali and I. R. A. Christie, "A Review of Electroless Gold Deposition Processes", Gold Bulletin, 17, 118-127 (1984) https://doi.org/10.1007/BF03214674
  11. Y. Okinaka, "An Electrochemical Study of Electroless GoldDeposition Reaction", J. Electrochem. Soc., 120(6), 739 (1973)
  12. Y. Tao and F. Scharf, "Revisiting the Effect of Nickel Characteristics on High-Speed Interconnect Performance", IEEE Transactions on Microwave Theory and Techniques, 64(8), 2447-2453 (2016) https://doi.org/10.1109/TMTT.2016.2586943
  13. J. Y. Hur, C. M. Lee, S. B. Koo, J. M. Jeon, and H. K. Lee, "A Study on Electroless Palladium Layer Characteristics and Its Diffusion in the Electroless Palladium Immersion Gold (EPIG) Surface Treatment for Fine Pitch Flip Chip Package", J. Korean Inst. Surf. Eng., 50(3), 170-176 (2017) https://doi.org/10.5695/JKISE.2017.50.3.170
  14. B. Rautio and J. Coonrod, "An Efficient EM Simulation Model for ENIG Plated Metal Finishes Including Conductor Side-Wall Plating Verified With Physical Measurement from 1 to 50 GHz", 2018 IEEE MTT-S International Microwave Workshop Series on 5G Hardware and System Technologies (IMWS-5G), 18149259 (2018)
  15. P. Seiler and D. Plettemeier, "Measurement of PCB Surface Finishes for Substrate Characterization up to 67 GHz", 2018 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting, 18403070 (2018)
  16. Y. H. Huang, W. Z. Hsieh, P. T. Lee, Y. S. Wu, T. T. Kuo, and C. E. Ho, "Reaction of Au,Pd,Cu and Au,Pd,Au,Cu multilayers with Sn Ag Cu alloy", Surface & Coatings Technology, 358, 753-761 (2019) https://doi.org/10.1016/j.surfcoat.2018.11.085
  17. A. Ippich, "PCB Surface Finish Impact to Losses at High Frequencies", 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems (COMCAS), 19279817 (2019)
  18. I. Y.-E. Su, C.-H. Huang, C. Hansen, and Y.-S. Lin, "The investigation of the correlation between Electroless Nickel Immersion Gold and High-speed Signal Transmission", 2020 15th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 20237805 (2020)
  19. S.-Y. Jun, J.-H. Bang, M.-S. Kim, D.-G. Han, T.-Y. Lee, and S. Yoo, "Thermo-Compression Bonding of Cu/SnAg Pillar Bumps with Electroless Palladium Immersion Gold (EPIG) Surface Finish", Materials, 16(4), 1739 (2023)
  20. T.-Y. Lee, "A study on low thermal expansion coefficient silane-modified non-conductive adhesive (NCA) and Ni-free surface finish for fine-pitch flip-chip thermo-compression bonding", in Ph. D. Hanyang University, Seoul (2022)