• 제목/요약/키워드: nano film

검색결과 1,428건 처리시간 0.043초

Effects of process variables on aqueous-based AlOx insulators for high-performance solution-processed oxide thin-film transistors

  • Huh, Jae-Eun;Park, Jintaek;Lee, Junhee;Lee, Sung-Eun;Lee, Jinwon;Lim, Keon-Hee;Kim, Youn Sang
    • Journal of Industrial and Engineering Chemistry
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    • 제68권
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    • pp.117-123
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    • 2018
  • Recently, aqueous method has attracted lots of attention because it enables the solution-processed metal oxide thin film with high electrical properties in low temperature fabrication condition to various flexible devices. Focusing the development of aqueous route, many researchers are only focused on metal oxide materials. However, for expansive application of the aqueous-based metal oxide films, the systematic study of performance change with process variables for the development of aqueous-based metal oxide insulator film is urgently required. Here, we propose importance of process variables to achieve high electrical-performance metal oxide insulator based on the aqueous method. We found that the significant process variables including precursor solution temperature and humidity during the spincoating process strongly affect chemical, physical, and electrical properties of $AlO_x$ insulators. Through the optimization of significant variables in process, an $AlO_x$ insulator with a leakage current value approximately $10^5$ times smaller and a breakdown voltage value approximately 2-3 times greater than un-optimized $AlO_x$ was realized. Finally, by introducing the optimized $AlO_x$ insulators to solutionprocessed $InO_x$ TFTs, we successfully achieved $InO_x/AlO_x$ TFTs with remarkably high average field-effect mobility of ${\sim}52cm^2V^{-1}\;s^{-1}$ and on/off current ratio of 106 at fabrication temperature of $250^{\circ}C$.

나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구 (Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography)

  • 홍성훈;배병주;곽신웅;이헌
    • 한국표면공학회지
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    • 제41권6호
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    • pp.331-334
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    • 2008
  • The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

확산판의 투과율이 고출력 양자점 조명의 광특성에 미치는 영향에 대한 연구 (Study of the Effect of the Transmittance of a Diffuser Plate on the Optical Characteristics of High-power Quantum-dot Illumination)

  • 김혜린;유동근;유재환;장준원;최무규;홍승찬;고재현;조성윤;김용득;박태희;고영욱
    • 한국광학회지
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    • 제32권5호
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    • pp.220-229
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    • 2021
  • 눈부심 방지를 위한 확산판의 투과율과 연색지수 향상을 위한 양자점 필름의 농도가 고출력 직하형 백색 LED 조명의 광특성에 미치는 영향을 조사했다. 확산판의 투과율이 감소할 경우 조명의 휘도는 줄어들었고 색좌표, 상관색온도는 별다른 변화를 보이지 않았으며 연색지수는 약간 상승했다. 시야각에 따른 광특성의 편차는 거의 없었고 휘도 분포는 람버시안 분포에 가까웠다. 양자점 필름의 농도가 증가할 경우 스펙트럼 상 적색 성분이 늘어나면서 이 성분의 비중을 표현하는 색좌표 x가 증가했고 상관색온도는 약 6000 K에서 4000 K 부근으로 현저히 감소했다. 아울러 조명의 구조를 최적화하면 연색지수가 95까지 증가함을 확인했다. 이런 결과는 적절한 투과율의 확산판과 양자점 필름의 조합을 통해 눈부심이 없고 시야각에 따른 색편차가 거의 없으며 특히 색좌표의 가변이 가능한 고연색성의 조명 구현이 가능함을 보여준다.

전기도금법으로 제조한 Ni-Fe 나노박막의 스트레스와 자기적 특성에 미치는 용액의 조건 및 전류밀도의 영향 (Effect of Bath Conditions and Current Density on Stress and Magnetic Properties of Ni-Fe Nano Thin Films Synthesized by Electrodeposition Methods)

  • 구본급
    • 한국표면공학회지
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    • 제44권4호
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    • pp.137-143
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    • 2011
  • The internal stress and magnetic properties (coercivity and squareness) of Ni-Fe nano thin film synthesized by electrodeposition method were studied as a function of acidic chloride bath conditions (composition and temperature) and current density. Fe deposition patterns were different depending on the temperature of the solution, the stress of film decreased with increasing the solution temperature, and the depending on the amount of Fe deposition showed a parabolic shape. The grain size of film was inversely proportional to stress of thin film. The internal stress of thin film and magnetic properties were deeply relevant, and the stress of thin film had a relationship with bath conditions and grain size of the thin film surface.

초음파 현미경을 이용한 나노 박막의 접합 강도 평가 (Evaluation of Adhesive Strength for Nano-Structured Thin Film by Scanning Acoustic Microscope)

  • 박태성;곽동열;박익근
    • 비파괴검사학회지
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    • 제32권4호
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    • pp.393-400
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    • 2012
  • 최근 나노 박막은 MEMS/NEMS, 광학 코팅, 반도체 산업 등 다양한 분야에서 사용이 되고 있다. 박막은 마모, 침식, 부식, 고온 산화를 방지하기 위한 목적으로 사용될 뿐 아니라 특성화된 자기, 유전적 특성을 만들기 위한 목적으로 사용된다. 많은 연구자들이 이러한 박막 구조의 특성(밀도, 입자 크기, 탄성 특성, 필름/기지 계면의 특성)을 평가하기 위하여 많은 연구를 진행하고 있다. 이들 중에 박막과 기지 사이의 접합 특성을 평가하는 것이 많은 연구자들의 주 관심사가 되어 왔다. 본 연구에서는 나노 박막의 접합 특성을 평가하기 위하여 각기 다른 접합 특성을 가지는 폴리머 박막 시험편을 제작하였다. 제작된 시험편의 접합 특성을 측정하기 위하여 초음파현미경의 V(z) 곡선법을 이용하여 표면파의 속도를 측정하였다. 또한 계면을 포함하는 시험편의 표면을 전파하는 표면파의 속도와 접합력의 상관관계를 확인하기 위해 나노 스크래치 시험을 적용하였다. 그 결과 초음파현미경을 이용하여 측정된 표면파의 속도와 나노스크래치 시험을 이용한 임계하중이 일치하는 경향성을 나타내었다. 결론적으로 초음파현미경의 V(z) 곡선법은 나노 스케일 박막 계면에서의 접합 상태를 평가할 수 있는 기법으로 그 가능성을 나타내었다.

Post-Annealing Effects on Properties of ZnO Nanorods Grown on Au Seed Layers

  • Cho, Min-Young;Kim, Min-Su;Choi, Hyun-Young;Yim, Kwang-Gug;Leem, Jae-Young
    • Bulletin of the Korean Chemical Society
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    • 제32권3호
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    • pp.880-884
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    • 2011
  • ZnO nanorods were grown by hydrothermal method. Two kinds of seed layers, Au film and island seed layers were prepared to investigate the effect of seed layer on ZnO nanorods. The ZnO nanorod on Au island seed layer has more unifom diameter and higher density compared to that of ZnO nanorod on Au film seed layer. The ZnO nanorods on Au island seed layer were annealed at various temperatures ranging from 300 to $850^{\circ}C$. The pinholes at the surface of the ZnO nanorods is formed as the annealing temperature is increased. It is noted that the pyramid structure on the surface of ZnO nanorod is observed at $850^{\circ}C$. The intensity of ZnO (002) diffraction peak in X-ray diffraction pattern and intensity of near band edge emission (NBE) peak in photoluminescence (PL) are increased as the ZnO nanorods were annealed at the temperature of $300^{\circ}C$.

Study on Poly(3,4-ethylenedioxythiophene) Thin Film Vapour Phase-Polymerized with Iron(III)Tosylate on High Quality 3-Aminopropyltriethoxysilane Self-Assembled Monolayer

  • Choi, Sangil;Kim, Wondae;Cho, Sung Jun;Kim, Sungsoo
    • 통합자연과학논문집
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    • 제5권4호
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    • pp.237-240
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    • 2012
  • In this study, PEDOT thin films polymerized with Iron(III)tosylate ($Fe(PTS)_3$) and grown on atomically smooth and highly dense 3-aminopropyltriethoxysilane self-assembled monolayer (APS-SAM) surfaces by VPP method have been investigated. PEDOT thin films were synthesized on APS self-assembled $SiO_2$ wafer surface at two different concentrations (20 wt% and 40 wt%) and growth time (3 and 30 minutes), and then their sheet resistance were measured and compared. PEDOT thin films grown with 20 wt% $Fe(PTS)_3$ oxidant are highly conductive when compared with the film grown with 40 wt% $Fe(PTS)_3$, as ascertained by the measured sheet resistance values down to 0.06 ${\Omega}/cm$. It clearly suggests that 20 wt% is more effective oxidant concentration for VPP than 40 wt% even though the film grown with 40 wt% oxidant has better quality than the film with 20 wt% $Fe(PTS)_3$ does.

CBD(Chemical Bath Deposition) 법으로 제조된 전기화학식 캐패시터용 NiO 나노박편 필름 (Nickel Oxide Nano-Flake Films Synthesized by Chemical Bath Deposition for Electrochemical Capacitors)

  • 김영하;박수진
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.163.2-163.2
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    • 2010
  • In this work, nano-flake shaped nickel oxide (NiO) films were synthesized by chemical bath deposition technique for electrochemical capacitors. The deposition was carried out for 1 and 2 h at room temperature using nickel foam as the substrate and the current collector. The structure and morphology of prepared NiO film were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). And, electrochemical properties were characterized by cyclic voltammetry, galvanostatic charge-discharge, and AC impedence measurement. It was found that the NiO film was constructed by many interconnected NiO nano-flakes which arranged vertically to the substrate, forming a net-like structure with large pores. The open macropores may facilitate the electrolyte penetration and ion migration, resulted in the utilization of nickel oxide due to the increased surface area for electrochemical reactions. Furthermore, it was found that the deposition onto nickel foam as substrate and curent collector led to decrease of the ion transfer resistance so that its specific capacitance of a NiO film had high value than NiO nano flake powder.

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