• Title/Summary/Keyword: nano beam

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Improvement of Ion Beam Resolution in FIB Process by Selective Beam Blocking (선택적 빔 차단을 통한 집속이온빔 가공 정밀도 향상)

  • Han, Min-Hee;Han, Jin;Kim, Tae-Gon;Min, Byung-Kwon;Lee, Sang-Jo
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.8
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    • pp.84-90
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    • 2010
  • In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.

Application of CRAMPS for a Phase Transition in H+-ion irradiated TlH2PO4

  • Kim, Se-Hun;Han, J.H.;Lee, Cheol-Eui;Lee, Kwang-Sei;Kim, Chang-Sam;Dalal, N.S.;Han, Doug-Young
    • Journal of the Korean Magnetic Resonance Society
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    • v.14 no.2
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    • pp.134-143
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    • 2010
  • We studied the hydrogen-bonded $TlH_2PO_4$ (TDP) ferroelectrics treated with the proton-beam bombardment. The TDP material was irradiated with 1-MeV proton beam at a dose of $10^{15}/cm^2$. In order to analyze the hydrogen environment in TDP, we carried out the $^1H$ high resolution nuclear magnetic resonance (NMR) - i.e., Combined Rotation And Multiple Pulse Spectroscopy (CRAMPS) measurement. The isotropic chemical shift of hydrogen indicates its displacive property is related to the $PO_4$ lattice deformation which occurs throughout the antiferroelectric-, the ferroelastic- and the paraelastic-phase transitions. The temperature dependence of $\sigma_{iso}$ reveals the electronic charge redistribution is induced by the proton-beam irradiation and the elastic property.

A study of Physically Implanted Surface Islands by direct Nd:YAG Laser Beam Irradiation

  • Oh, Chang-Heon;Cheon, Suyoung;Lim, Changjin;Lee, Jeongjun;Jeon, Jihyun;Kim, Kyoung-Kook;Chung, Chan-Moon;Cho, Soohaeng
    • Applied Science and Convergence Technology
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    • v.26 no.4
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    • pp.66-69
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    • 2017
  • Physically implanted surface islands of Nano Carbon Tube (NCT) and ${\alpha}-F_2O_3$ particles have been produced on Al-doped ZnO (AZO)/glass surfaces by simple and direct ND:YAG laser beam irradiation. Sheet resistance of the reconstructed surface increased by about 3.6% of over AZO. Minimal surface damage can be repaired by ND:YAG laser beam irradiation in conjunction with proper impurities. Implanted islands of NCT, which are considered to be a good conductive impurity, on AZO increased the sheet resistance by about 1.8%, while implanted islands of ${\alpha}-F_2O_3$, an insulating impurity, on AZO increased sheet resistance by about 129% compared with a laser beam treated AZO. This study provides insight regarding surface implantations of nanowires and micro-circuits, doping effects for semiconductors and optical devices, surface area and impurity effects for catalysis.

A Novel Fabrication Method of the High-Aspect-Ratio Nano Structure (HAR-Nano Structure) Using a Nano X-Ray Shadow Mask (나노 X-선 쉐도우 마스크를 이용한 고폭비의 나노 구조물 제작)

  • Kim Jong-Hyun;Lee Seung-S.;Kim Yong-Chul
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.10 s.253
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    • pp.1314-1319
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    • 2006
  • This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

Curing Behaviors of Transparent Aliphatic Epoxy Acrylate by Electron Beam Irradiation (광투과성 지방족 에폭시 아크릴레이트의 전자선 경화 특성 연구)

  • Park, Sang-Yul;Son, Hyemi;Myung, Dongshin;Kim, Myung-Hwa;Seo, Young-Soo
    • Polymer(Korea)
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    • v.37 no.3
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    • pp.302-307
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    • 2013
  • We synthesized aliphatic epoxy acrylate monomer by the reaction of glycerol diglycidyl ether and acrylic acid. The reaction was monitored by FTIR, Raman spectroscopy and $^1H$ NMR. Electron-beam (E-beam) curing behaviors of the synthesized monomer were studied by spectroscopic analysis, glass transition temperature, and tensile properties. We found that curing reaction was complete in a low dosage of ca. 30 kGy. The viscosity of monomer was a low enough for coating without using diluents and the cured sample was highly transparent, indicating that the monomer can be used for an E-beam curable coating material on transparent optical films.

Application of Nano-TDR Health Monitoring System in Civil Engineering (나노-TDR센서를 이용한 토목구조물 모니터링 시스템)

  • Han, Heui-Soo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.13 no.5 s.57
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    • pp.93-100
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    • 2009
  • This study presents reasonable relationships to estimate the deformation based on beam mechanism analysis and TDR(Time Domain Reflectometry) data. To declar the length points of co-axial cable installed in civil structure, Nano material ($BaTiO_3$ powders and silver mixture) is used on co-axial cables. From the laboratory test, nano material could make the correct information about attached cable points on beam, and TDR sensor system and Fourier series (data filter) found out the deformation of beam. Therefore it is concluded that the correct deformed information of beam were acquired by Nano-TDR and Fourier filter, they are much more effective to apply at health monitoring system in civil structure compared to conventional TDR or Fiber Optic Sensor (FOS) systems.

Accuracy improvement in motion tracking of tennis balls using nano-sensors technology

  • Shuning Yan;Chaozong Xiang;Li Guo
    • Advances in nano research
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    • v.14 no.5
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    • pp.409-419
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    • 2023
  • Tracking the motion of tennis balls is a challenging task in using cameras around the tennis court. The most important instance of the tennis trajectory is the time of impact and touch the court which in some cases could not be detected precisely. In the present study, we aim to present a novel design of tennis balls equipped with nano-sensors to detect the touch of the ball to the court. In the impact instance, tennis ball receives significant acceleration and change in the linear momentum. This large acceleration could deform a small-beam structure with piezoelectric layer to produce voltage. The voltage could further be utilized to produce infrared waves which could be easily detected by infrared detection sensors installed on the same video cameras or separately near the tennis court. Therefore, the exact time of the impact could be achieved with higher accuracy than image analyzing method. A detailed dynamical property of such sensors is discussed using nonlinear beam equations. The results show that within the acceleration range of tennis ball during an impact, the piezoelectric patches of the nano-sensors in the tennis ball could produce enough voltages to propagate infrared waves to be detected by infrared detectors.