• Ceramist
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• v.9 no.6
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• pp.24-29
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• 2006

Electron beam physical vapor deposition (EB-PVD) process has currently been applied to thermal barrier coatings (TBCs) for aircraft engines. Due to unique columnar structure, EB-PVD TBCs have advantages in resistances to thermal shock and thermal cycle for their applications, compared to films prepared by plasma spray By the EB-PVD equipment, we successfully obtained yttria-stabilized zirconia (YSZ) layer which has columnar and feather like structure including a large amount of nano size pores and gaps. The EB-PVD technique has been developed for coating functional perovskite type oxides such as (La, Sr)MnO3. Electrode properties have been improved by interface and structural control.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.102-107
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• 2009

We investigated optical emission of oxygen plasma discharged by 13.56 MHz radio frequency (rf) by using optical emission spectroscopy (OES). Experimental measurement is done at a range of oxygen flow rate of 1$\sim$20 seem, rf power of 25$\sim$250 W, and orifice 3 and 5 mm in diameter. When oxygen plasma was generated, typical emission spectra for oxygen plasma were observed regardless of diameter of orifice. Strong atomic emission lines are observe at 776.8 an 843.9 nm, corresponding to the $3p^{5}P-3s^{5}S^{0}$ and $3p^{3}P-3s^{3}S^{0}$ transitions, respectively. The emission intensity of line at 776.8 and 843.9 nm increased with increasing the oxygen flow rate and rf power. The increasing rate of emission intensity of 776.8 nm line was larger than that of 843.9 nm line. When the diameter of orifice was 3 mm, the oxygen plasma was more stably generated than orifice 5 mm in diameter.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.1
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• pp.63-67
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• 2015

In this study, we demonstrate the change of optical characteristic by thickness of metal deposition on nano metal grid polarizer film fabrication. Nano metal grid polarizer film consists of aluminium grid polarizer layer on PET (Polyethylene phthalate) substrate. We aim at metal grid layer formation for the large nano wire grid polarizer fabrication. we draw process conditions of the nano metal grid polarizer film fabrication to improve transmittance and extinction ratio and Nano wire grid polarizer film (NWGP) film is fabricated with 140 nm pitch, 70 nm width, and 70 nm depth of metal grid on optimum design conditions. As a result, we get high optical properties of nano wire grid polarizer which is the maximum transmittance of 80% and the extinction ratio of $10^6$ at 600 nm wavelength respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.440-440
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• 2012

Nanomaterials have emerged as new building blocks to construct light energy harvesting assemblies. Size dependent properties provide the basis for developing new and effective systems with semiconductor nanoparticles, quantized charging effects in metal nanoparticle or their combinations in 2 and 3 dimensions for expanding the possibility of developing new strategies for photovoltaic system. As top-down approach, we developed a simple and effective method for the large scale formation of self-assembled Cu(In,Ga)$Se_2$ (CIGS) nanostructures by ion beam irradiation. The compositional changes and morphological evolution were observed as a function of the irradiation time. As the ion irradiation time increased, the nano-dots were transformed into a nano-ridge structure due to the difference in the sputtering yields and diffusion rates of each element and the competition between sputtering and diffusion processes during irradiation. As bottom-up approach, we developed the growth of CIGS nanowires using thermal-chemical vapor deposition (CVD) method. Vapor-phase synthesis is probably the most extensively explored approach to the formation of 1D nanostructures such as whiskers, nanorods, and nanowires. However, unlike binary or ternary chalcogenides, the synthesis of quaternary CIGS nanostructures is challenging because of the difficulty in controlling the stoichiometry and phase structure. We introduced a method for synthesis of the single crystalline CIGS nanowires in the form of chalcopyrite using thermal-CVD without catalyst. It was confirmed that the CIGS nanowires are epitaxially grown on a sapphire substrate, having a length ranged from 3 to 100 micrometers and a diameter from 30 to 500 nm.

• Journal of the Korean Vacuum Society
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• v.15 no.3
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• pp.280-286
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• 2006

A distributed Bragg reflector (DBR) for the application of $1.3{\mu}m$ vertical cavity surface emitting laser (VCSEL) has grown by digital-alloy AlGaAs layer using the molecular beam epitaxy (MBE) method. The measured reflection spectra of the digital-alloy AlGaAs/GaAs DBR have uniformity in 0.35% over the 1/4 of 3-inch wafer. Furthermore, the TEM image showed that the composition and the thickness of the digital-alloy AlGaAs layer in AlGaAs/GaAs DBR was not affected by the temperature distribution over the wafer whole surface. Therefore, the digital-alloy AlGaAs/GaAs DBR can be used to get higher yield of VCSEL with the active medium of InAs quantum dots whose gain is inhomogeneously broadened.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.477-477
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• 2012

The effects of argon neutral beam (NB) energy on the amorphous carbon (a-C) films were investigated, while the a-C films were deposited by neutral particle beam assisted sputtering (NBAS) system. The deposition characteristics of these films were studied as a function of NB energy (or reflector bias voltage). The film structures were investigated by Raman spectroscopy. The hardness was measured by nano-indentation tests and the optical band gap was measured by UV-visible spectroscopy.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.30-34
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• 2005

This paper describes the design and manufacturing of a focused-ion-beam machining system which can make small features of nano size. We use a SIMION simulator in order to obtain the design data of an ion column. The simulation result shows that the focal length of ion beam decreases as the applied voltage of object lens increases. Finally, we obtained the good images of a mesh of 50 micrometers by using the adjustment of applied voltage, acceleration power, and dimension of each elements.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2010.04a
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• pp.550-553
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• 2010

본 논문에서는 seta와 spatula로 구성된 게코(gecko) 접착 시스템의 해석을 위한 새로운 adhesive beam contact model을 제시한다. adhesive contact 해석에 있어서 기존의 JKR model은 nano pillar와 같은 형태의 접촉방식의 해석에는 매우 유용하지만, seta와 같이 보(beam)의 형상을 가지는 구조물의 접촉방식의 해석에는 부적합하다. 따라서 본 연구에서는 seta와 같은 보의 형상을 가지는 접촉 시스템의 해석을 위해 adhesive beam contact model을 제시하고, 유한요소 해석을 통하여 접촉면에서의 불균일한 응력분포 상태가 분리 메커니즘에 미치는 영향에 대한 해석 결과를 제시한다. 또한 spatula의 기하학적 형상과 보의 접촉각(contact angle)등이 seta adhesion system의 분리 메커니즘(detachment mechanism)에 미치는 영향에 대한 결과를 제시한다.

• Advances in nano research
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• v.5 no.2
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• pp.113-126
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• 2017

This paper proposes a new nonlocal higher-order hyperbolic shear deformation beam theory (HSBT) for the static bending and vibration of nanoscale-beams. Eringen's nonlocal elasticity theory is incorporated, in order to capture small size effects. In the present model, the transverse shear stresses account for a hyperbolic distribution and satisfy the free-traction boundary conditions on the upper and bottom surfaces of the nanobeams without using shear correction factor. Employing Hamilton's principle, the nonlocal equations of motion are derived. The governing equations are solved analytically for the edges of the beam are simply supported, and the obtained results are compared, as possible, with the available solutions found in the literature. Furthermore, the influences of nonlocal coefficient, slenderness ratio on the static bending and dynamic responses of the nanobeam are examined.

• Multiscale and Multiphysics Mechanics
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• v.1 no.1
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• pp.15-33
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• 2016

In this paper, an asymptotic method is employed to formulate nano- or micro-beams based on strain gradient elasticity. Although a basic theory for the strain gradient elasticity has been well established in literature, a systematic approach is relatively rare because of its complexity and ambiguity of higher-order elasticity coefficients. In order to systematically identify the strain gradient effect, an asymptotic approach is adopted by introducing the small parameter which represents the beam geometric slenderness and/or the internal atomistic characteristic. The approach allows us to systematically split the two-dimensional strain gradient elasticity into the microscopic one-dimensional through-the-thickness analysis and the macroscopic one-dimensional beam analysis. The first-order beam problem turns out to be different from the classical elasticity in terms of the bending stiffness, which comes from the through-the-thickness strain gradient effect. This subsequently affects the second-order transverse shear stress in which the surface shear stress exists. It is demonstrated that a careful derivation of a first strain gradient elasticity embraces "Gurtin-Murdoch traction" as the surface effect of a one-dimensional Euler-Bernoulli-like beam model.